\label{fig:sic:db_agglom}
\end{figure}
The incorporated C atoms form C-Si dumbbells on regular Si lattice sites.
-With increasing dose and proceeding time the highly mobile dumbbells agglomerate into large clusters.
+With increasing dose and proceeding time, the highly mobile dumbbells agglomerate into large clusters.
Finally, when the cluster size reaches a critical radius, the high interfacial energy due to the 3C-SiC/c-Si lattice misfit is overcome and precipitation occurs.
Due to the slightly lower silicon density of 3C-SiC, excessive silicon atoms exist, which will most probably end up as self-interstitials in the c-Si matrix since there is more space than in 3C-SiC.