2 % bibliography database
6 author = "Paul Erhart and Karsten Albe",
7 title = "Analytical potential for atomistic simulations of
8 silicon, carbon, and silicon carbide",
11 journal = "Phys. Rev. B",
17 notes = "alble reparametrization, analytical bond oder
19 keywords = "silicon; elemental semiconductors; carbon; silicon
20 compounds; wide band gap semiconductors; elasticity;
21 enthalpy; point defects; crystallographic shear; atomic
23 URL = "http://link.aps.org/abstract/PRB/v71/e035211",
24 doi = "10.1103/PhysRevB.71.035211",
28 title = "Modeling the metal-semiconductor interaction:
29 Analytical bond-order potential for platinum-carbon",
30 author = "Karsten Albe and Kai Nordlund and Robert S. Averback",
31 journal = "Phys. Rev. B",
38 doi = "10.1103/PhysRevB.65.195124",
39 publisher = "American Physical Society",
40 notes = "derivation of albe bond order formalism",
44 title = "The solubility of carbon in pulled silicon crystals",
45 journal = "Journal of Physics and Chemistry of Solids",
52 doi = "DOI: 10.1016/S0022-3697(71)80179-8",
53 URL = "http://www.sciencedirect.com/science/article/B6TXR-4PR80SS-D/2/ce21d10d2bb885b5641905883a618ff5",
54 author = "A. R. Bean and R. C. Newman",
55 notes = "experimental solubility data of carbon in silicon",
59 author = "M. A. Capano and R. J. Trew",
60 title = "Silicon Carbide Electronic Materials and Devices",
61 journal = "MRS Bull.",
68 author = "G. R. Fisher and P. Barnes",
69 title = "Towards a unified view of polytypism in silicon
71 journal = "Philos. Mag. B",
75 notes = "sic polytypes",
79 author = "R. K{\"{o}}gler and F. Eichhorn and J. R. Kaschny and
80 A. M{\"{u}}cklich and H. Reuther and W. Skorupa and C.
81 Serre and A. Perez-Rodriguez",
82 title = "Synthesis of nano-sized Si{C} precipitates in Si by
83 simultaneous dual-beam implantation of {C}+ and Si+
85 journal = "Appl. Phys. A: Mater. Sci. Process.",
90 notes = "dual implantation, sic prec enhanced by vacancies,
91 precipitation by interstitial and substitutional
92 carbon, both mechanisms explained + refs",
96 title = "Carbon-mediated effects in silicon and in
97 silicon-related materials",
98 journal = "Materials Chemistry and Physics",
105 doi = "DOI: 10.1016/0254-0584(95)01673-I",
106 URL = "http://www.sciencedirect.com/science/article/B6TX4-3VR9V74-2/2/4ab972315eb79eaa76b55ffab5aed982",
107 author = "W. Skorupa and R. A. Yankov",
108 notes = "review of silicon carbon compound",
112 author = "P. S. de Laplace",
113 title = "Th\'eorie analytique des probabilit\'es",
114 series = "Oeuvres Compl\`etes de Laplace",
116 publisher = "Gauthier-Villars",
120 @Article{mattoni2007,
121 author = "A. {Mattoni} and M. {Ippolito} and L. {Colombo}",
122 title = "{Atomistic modeling of brittleness in covalent
124 journal = "Phys. Rev. B",
130 doi = "10.1103/PhysRevB.76.224103",
131 notes = "adopted tersoff potential for Si, C, Ge ad SiC;
132 longe(r)-range-interactions, brittle propagation of
133 fracture, more available potentials, universal energy
134 relation (uer), minimum range model (mrm)",
138 title = "Comparative study of silicon empirical interatomic
140 author = "H. Balamane and T. Halicioglu and W. A. Tiller",
141 journal = "Phys. Rev. B",
144 pages = "2250--2279",
148 doi = "10.1103/PhysRevB.46.2250",
149 publisher = "American Physical Society",
150 notes = "comparison of classical potentials for si",
154 title = "Stress relaxation in $a-Si$ induced by ion
156 author = "H. M. Urbassek M. Koster",
157 journal = "Phys. Rev. B",
160 pages = "11219--11224",
164 doi = "10.1103/PhysRevB.62.11219",
165 publisher = "American Physical Society",
166 notes = "virial derivation for 3-body tersoff potential",
169 @Article{breadmore99,
170 title = "Direct simulation of ion-beam-induced stressing and
171 amorphization of silicon",
172 author = "N. Gr\o{}nbech-Jensen K. M. Beardmore",
173 journal = "Phys. Rev. B",
176 pages = "12610--12616",
180 doi = "10.1103/PhysRevB.60.12610",
181 publisher = "American Physical Society",
182 notes = "virial derivation for 3-body tersoff potential",
186 author = "Henri Moissan",
187 title = "Nouvelles recherches sur la météorité de Cañon
189 journal = "Comptes rendus de l'Académie des Sciences",
196 author = "Y. S. Park",
197 title = "Si{C} Materials and Devices",
198 publisher = "Academic Press",
199 address = "San Diego",
204 author = "Valeri F. Tsvetkov and R. C. Glass and D. Henshall and
205 Calvin H. Carter Jr. and D. Asbury",
206 title = "Si{C} Seeded Boule Growth",
207 journal = "Materials Science Forum",
211 notes = "modified lely process, micropipes",
215 title = "Computer {"}Experiments{"} on Classical Fluids. {I}.
216 Thermodynamical Properties of Lennard-Jones Molecules",
217 author = "Loup Verlet",
218 journal = "Phys. Rev.",
224 doi = "10.1103/PhysRev.159.98",
225 publisher = "American Physical Society",
226 notes = "velocity verlet integration algorithm equation of
230 @Article{berendsen84,
231 author = "H. J. C. Berendsen and J. P. M. Postma and W. F. van
232 Gunsteren and A. DiNola and J. R. Haak",
234 title = "Molecular dynamics with coupling to an external bath",
237 journal = "J. Chem. Phys.",
240 pages = "3684--3690",
241 keywords = "MOLECULAR DYNAMICS CALCULATION; TRANSPORT THEORY;
242 COMPUTERIZED SIMULATION; LIQUIDS; STRUCTURE FACTORS",
243 URL = "http://link.aip.org/link/?JCP/81/3684/1",
244 doi = "10.1063/1.448118",
245 notes = "berendsen thermostat barostat",
249 author = "Hanchen Huang and N M Ghoniem and J K Wong and M
251 title = "Molecular dynamics determination of defect energetics
252 in beta -Si{C} using three representative empirical
254 journal = "Modell. Simul. Mater. Sci. Eng.",
258 URL = "http://stacks.iop.org/0965-0393/3/615",
259 notes = "comparison of tersoff, pearson and eam for defect
260 energetics in sic; (m)eam parameters for sic",
265 title = "Relationship between the embedded-atom method and
267 author = "Donald W. Brenner",
268 journal = "Phys. Rev. Lett.",
275 doi = "10.1103/PhysRevLett.63.1022",
276 publisher = "American Physical Society",
277 notes = "relation of tersoff and eam potential",
281 title = "Molecular-dynamics study of self-interstitials in
283 author = "Inder P. Batra and Farid F. Abraham and S. Ciraci",
284 journal = "Phys. Rev. B",
287 pages = "9552--9558",
291 doi = "10.1103/PhysRevB.35.9552",
292 publisher = "American Physical Society",
293 notes = "selft-interstitials in silicon, stillinger-weber,
294 calculation of defect formation energy, defect
299 title = "Extended interstitials in silicon and germanium",
300 author = "H. R. Schober",
301 journal = "Phys. Rev. B",
304 pages = "13013--13015",
308 doi = "10.1103/PhysRevB.39.13013",
309 publisher = "American Physical Society",
310 notes = "stillinger-weber silicon 110 stable and metastable
311 dumbbell configuration",
315 title = "Cascade overlap and amorphization in $3{C}-Si{C}:$
316 Defect accumulation, topological features, and
318 author = "F. Gao and W. J. Weber",
319 journal = "Phys. Rev. B",
326 doi = "10.1103/PhysRevB.66.024106",
327 publisher = "American Physical Society",
328 notes = "sic intro, si cascade in 3c-sic, amorphization,
329 tersoff modified, pair correlation of amorphous sic, md
333 @Article{devanathan98,
334 title = "Computer simulation of a 10 ke{V} Si displacement
336 journal = "Nucl. Instrum. Methods Phys. Res. B",
342 doi = "DOI: 10.1016/S0168-583X(98)00084-6",
343 author = "R. Devanathan and W. J. Weber and T. Diaz de la
345 notes = "modified tersoff short range potential, ab initio
349 @Article{devanathan98_2,
350 title = "Displacement threshold energies in [beta]-Si{C}",
351 journal = "J. Nucl. Mater.",
357 doi = "DOI: 10.1016/S0022-3115(97)00304-8",
358 author = "R. Devanathan and T. Diaz de la Rubia and W. J.
360 notes = "modified tersoff, ab initio, combined ab initio
364 @Article{kitabatake00,
365 title = "Si{C}/Si heteroepitaxial growth",
366 author = "M. Kitabatake",
367 journal = "Thin Solid Films",
372 notes = "md simulation, sic si heteroepitaxy, mbe",
376 title = "Intrinsic point defects in crystalline silicon:
377 Tight-binding molecular dynamics studies of
378 self-diffusion, interstitial-vacancy recombination, and
380 author = "M. Tang and L. Colombo and J. Zhu and T. Diaz de la
382 journal = "Phys. Rev. B",
385 pages = "14279--14289",
389 doi = "10.1103/PhysRevB.55.14279",
390 publisher = "American Physical Society",
391 notes = "si self interstitial, diffusion, tbmd",
395 author = "M. D. Johnson and M.-J. Caturla and T. D\'{\i}az de la
398 title = "A kinetic Monte--Carlo study of the effective
399 diffusivity of the silicon self-interstitial in the
400 presence of carbon and boron",
403 journal = "J. Appl. Phys.",
406 pages = "1963--1967",
407 keywords = "MONTE CARLO METHOD; DIFFUSION; SILICON; INTERSTITIALS;
408 CARBON ADDITIONS; BORON ADDITIONS; elemental
409 semiconductors; self-diffusion",
410 URL = "http://link.aip.org/link/?JAP/84/1963/1",
411 doi = "10.1063/1.368328",
412 notes = "kinetic monte carlo of si self interstitial
417 title = "Barrier to Migration of the Silicon
419 author = "Y. Bar-Yam and J. D. Joannopoulos",
420 journal = "Phys. Rev. Lett.",
423 pages = "1129--1132",
427 doi = "10.1103/PhysRevLett.52.1129",
428 publisher = "American Physical Society",
429 notes = "si self-interstitial migration barrier",
432 @Article{bar-yam84_2,
433 title = "Electronic structure and total-energy migration
434 barriers of silicon self-interstitials",
435 author = "Y. Bar-Yam and J. D. Joannopoulos",
436 journal = "Phys. Rev. B",
439 pages = "1844--1852",
443 doi = "10.1103/PhysRevB.30.1844",
444 publisher = "American Physical Society",
448 title = "First-principles calculations of self-diffusion
449 constants in silicon",
450 author = "Peter E. Bl{\"o}chl and Enrico Smargiassi and R. Car
451 and D. B. Laks and W. Andreoni and S. T. Pantelides",
452 journal = "Phys. Rev. Lett.",
455 pages = "2435--2438",
459 doi = "10.1103/PhysRevLett.70.2435",
460 publisher = "American Physical Society",
461 notes = "si self int diffusion by ab initio md, formation
462 entropy calculations",
466 title = "Tight-binding theory of native point defects in
468 author = "L. Colombo",
469 journal = "Annu. Rev. Mater. Res.",
474 doi = "10.1146/annurev.matsci.32.111601.103036",
475 publisher = "Annual Reviews",
476 notes = "si self interstitial, tbmd, virial stress",
479 @Article{al-mushadani03,
480 title = "Free-energy calculations of intrinsic point defects in
482 author = "O. K. Al-Mushadani and R. J. Needs",
483 journal = "Phys. Rev. B",
490 doi = "10.1103/PhysRevB.68.235205",
491 publisher = "American Physical Society",
492 notes = "formation energies of intrinisc point defects in
493 silicon, si self interstitials, free energy",
496 @Article{goedecker02,
497 title = "A Fourfold Coordinated Point Defect in Silicon",
498 author = "Stefan Goedecker and Thierry Deutsch and Luc Billard",
499 journal = "Phys. Rev. Lett.",
506 doi = "10.1103/PhysRevLett.88.235501",
507 publisher = "American Physical Society",
508 notes = "first time ffcd, fourfold coordinated point defect in
513 title = "Ab initio molecular dynamics simulation of
514 self-interstitial diffusion in silicon",
515 author = "Beat Sahli and Wolfgang Fichtner",
516 journal = "Phys. Rev. B",
523 doi = "10.1103/PhysRevB.72.245210",
524 publisher = "American Physical Society",
525 notes = "si self int, diffusion, barrier height, voronoi
530 title = "Ab initio calculations of the interaction between
531 native point defects in silicon",
532 journal = "Mater. Sci. Eng., B",
537 note = "EMRS 2005, Symposium D - Materials Science and Device
538 Issues for Future Technologies",
540 doi = "DOI: 10.1016/j.mseb.2005.08.072",
541 URL = "http://www.sciencedirect.com/science/article/B6TXF-4H6PKRB-3/2/e217bd3d7ee1fffee899eeb4a2f133a4",
542 author = "G. Hobler and G. Kresse",
543 notes = "vasp intrinsic si defect interaction study, capture
548 title = "Ab initio study of self-diffusion in silicon over a
549 wide temperature range: Point defect states and
550 migration mechanisms",
551 author = "Shangyi Ma and Shaoqing Wang",
552 journal = "Phys. Rev. B",
559 doi = "10.1103/PhysRevB.81.193203",
560 publisher = "American Physical Society",
561 notes = "si self interstitial diffusion + refs",
565 title = "Atomistic simulations on the thermal stability of the
566 antisite pair in 3{C}- and 4{H}-Si{C}",
567 author = "M. Posselt and F. Gao and W. J. Weber",
568 journal = "Phys. Rev. B",
575 doi = "10.1103/PhysRevB.73.125206",
576 publisher = "American Physical Society",
580 title = "Correlation between self-diffusion in Si and the
581 migration mechanisms of vacancies and
582 self-interstitials: An atomistic study",
583 author = "M. Posselt and F. Gao and H. Bracht",
584 journal = "Phys. Rev. B",
591 doi = "10.1103/PhysRevB.78.035208",
592 publisher = "American Physical Society",
593 notes = "si self-interstitial and vacancy diffusion, stillinger
598 title = "Ab initio and empirical-potential studies of defect
599 properties in $3{C}-Si{C}$",
600 author = "F. Gao and E. J. Bylaska and W. J. Weber and L. R.
602 journal = "Phys. Rev. B",
609 doi = "10.1103/PhysRevB.64.245208",
610 publisher = "American Physical Society",
611 notes = "defects in 3c-sic",
615 title = "Empirical potential approach for defect properties in
617 journal = "Nucl. Instrum. Methods Phys. Res. B",
624 doi = "DOI: 10.1016/S0168-583X(02)00600-6",
625 URL = "http://www.sciencedirect.com/science/article/B6TJN-453NR6B-G/2/e65b0730e94e13d66f72a2147b449ea7",
626 author = "Fei Gao and William J. Weber",
627 keywords = "Empirical potential",
628 keywords = "Defect properties",
629 keywords = "Silicon carbide",
630 keywords = "Computer simulation",
631 notes = "sic potential, brenner type, like erhart/albe",
635 title = "Atomistic study of intrinsic defect migration in
637 author = "Fei Gao and William J. Weber and M. Posselt and V.
639 journal = "Phys. Rev. B",
646 doi = "10.1103/PhysRevB.69.245205",
647 publisher = "American Physical Society",
648 notes = "defect migration in sic",
652 author = "F. Gao and J. Du and E. J. Bylaska and M. Posselt and
655 title = "Ab Initio atomic simulations of antisite pair recovery
656 in cubic silicon carbide",
659 journal = "Appl. Phys. Lett.",
665 keywords = "ab initio calculations; silicon compounds; antisite
666 defects; wide band gap semiconductors; molecular
667 dynamics method; density functional theory;
668 electron-hole recombination; photoluminescence;
669 impurities; diffusion",
670 URL = "http://link.aip.org/link/?APL/90/221915/1",
671 doi = "10.1063/1.2743751",
674 @Article{mattoni2002,
675 title = "Self-interstitial trapping by carbon complexes in
676 crystalline silicon",
677 author = "A. Mattoni and F. Bernardini and L. Colombo",
678 journal = "Phys. Rev. B",
685 doi = "10.1103/PhysRevB.66.195214",
686 publisher = "American Physical Society",
687 notes = "c in c-si, diffusion, interstitial configuration +
688 links, interaction of carbon and silicon interstitials,
689 tersoff suitability",
693 title = "Calculations of Silicon Self-Interstitial Defects",
694 author = "W.-K. Leung and R. J. Needs and G. Rajagopal and S.
696 journal = "Phys. Rev. Lett.",
699 pages = "2351--2354",
703 doi = "10.1103/PhysRevLett.83.2351",
704 publisher = "American Physical Society",
705 notes = "nice images of the defects, si defect overview +
710 title = "Identification of the migration path of interstitial
712 author = "R. B. Capaz and A. {Dal Pino} and J. D. Joannopoulos",
713 journal = "Phys. Rev. B",
716 pages = "7439--7442",
720 doi = "10.1103/PhysRevB.50.7439",
721 publisher = "American Physical Society",
722 notes = "carbon interstitial migration path shown, 001 c-si
727 title = "Theory of carbon-carbon pairs in silicon",
728 author = "R. B. Capaz and A. {Dal Pino} and J. D. Joannopoulos",
729 journal = "Phys. Rev. B",
732 pages = "9845--9850",
736 doi = "10.1103/PhysRevB.58.9845",
737 publisher = "American Physical Society",
738 notes = "c_i c_s pair configuration, theoretical results",
742 title = "Bistable interstitial-carbon--substitutional-carbon
744 author = "L. W. Song and X. D. Zhan and B. W. Benson and G. D.
746 journal = "Phys. Rev. B",
749 pages = "5765--5783",
753 doi = "10.1103/PhysRevB.42.5765",
754 publisher = "American Physical Society",
755 notes = "c_i c_s pair configuration, experimental results",
759 author = "Chun-Li Liu and Wolfgang Windl and Len Borucki and
760 Shifeng Lu and Xiang-Yang Liu",
762 title = "Ab initio modeling and experimental study of {C}--{B}
766 journal = "Appl. Phys. Lett.",
770 keywords = "silicon; boron; carbon; elemental semiconductors;
771 impurity-defect interactions; ab initio calculations;
772 secondary ion mass spectra; diffusion; interstitials",
773 URL = "http://link.aip.org/link/?APL/80/52/1",
774 doi = "10.1063/1.1430505",
775 notes = "c-c 100 split, lower as a and b states of capaz",
779 title = "Ab initio investigation of carbon-related defects in
781 author = "A. {Dal Pino} and Andrew M. Rappe and J. D.
783 journal = "Phys. Rev. B",
786 pages = "12554--12557",
790 doi = "10.1103/PhysRevB.47.12554",
791 publisher = "American Physical Society",
792 notes = "c interstitials in crystalline silicon",
796 title = "Microscopic Theory of Atomic Diffusion Mechanisms in
798 author = "Roberto Car and Paul J. Kelly and Atsushi Oshiyama and
799 Sokrates T. Pantelides",
800 journal = "Phys. Rev. Lett.",
803 pages = "1814--1817",
807 doi = "10.1103/PhysRevLett.52.1814",
808 publisher = "American Physical Society",
809 notes = "microscopic theory diffusion silicon dft migration
814 title = "Unified Approach for Molecular Dynamics and
815 Density-Functional Theory",
816 author = "R. Car and M. Parrinello",
817 journal = "Phys. Rev. Lett.",
820 pages = "2471--2474",
824 doi = "10.1103/PhysRevLett.55.2471",
825 publisher = "American Physical Society",
826 notes = "car parrinello method, dft and md",
830 title = "Short-range order, bulk moduli, and physical trends in
831 c-$Si1-x$$Cx$ alloys",
832 author = "P. C. Kelires",
833 journal = "Phys. Rev. B",
836 pages = "8784--8787",
840 doi = "10.1103/PhysRevB.55.8784",
841 publisher = "American Physical Society",
842 notes = "c strained si, montecarlo md, bulk moduli, next
847 title = "Monte Carlo Studies of Ternary Semiconductor Alloys:
848 Application to the $Si1-x-yGexCy$ System",
849 author = "P. C. Kelires",
850 journal = "Phys. Rev. Lett.",
853 pages = "1114--1117",
857 doi = "10.1103/PhysRevLett.75.1114",
858 publisher = "American Physical Society",
859 notes = "mc md, strain compensation in si ge by c insertion",
863 title = "Low temperature electron irradiation of silicon
865 journal = "Solid State Communications",
872 doi = "DOI: 10.1016/0038-1098(70)90074-8",
873 URL = "http://www.sciencedirect.com/science/article/B6TVW-46MF8S4-156/2/5f4d9c189a3d97227fde9214195aa081",
874 author = "A. R. Bean and R. C. Newman",
878 title = "{EPR} Observation of the Isolated Interstitial Carbon
880 author = "G. D. Watkins and K. L. Brower",
881 journal = "Phys. Rev. Lett.",
884 pages = "1329--1332",
888 doi = "10.1103/PhysRevLett.36.1329",
889 publisher = "American Physical Society",
890 notes = "epr observations of 100 interstitial carbon atom in
895 title = "{EPR} identification of the single-acceptor state of
896 interstitial carbon in silicon",
897 author = "L. W. Song and G. D. Watkins",
898 journal = "Phys. Rev. B",
901 pages = "5759--5764",
905 doi = "10.1103/PhysRevB.42.5759",
906 publisher = "American Physical Society",
907 notes = "carbon diffusion in silicon",
911 author = "A K Tipping and R C Newman",
912 title = "The diffusion coefficient of interstitial carbon in
914 journal = "Semicond. Sci. Technol.",
918 URL = "http://stacks.iop.org/0268-1242/2/315",
920 notes = "diffusion coefficient of carbon interstitials in
925 title = "Carbon incorporation into Si at high concentrations by
926 ion implantation and solid phase epitaxy",
927 author = "J. W. Strane and S. R. Lee and H. J. Stein and S. T.
928 Picraux and J. K. Watanabe and J. W. Mayer",
929 journal = "J. Appl. Phys.",
934 doi = "10.1063/1.360806",
935 notes = "strained silicon, carbon supersaturation",
938 @Article{laveant2002,
939 title = "Epitaxy of carbon-rich silicon with {MBE}",
940 journal = "Mater. Sci. Eng., B",
946 doi = "DOI: 10.1016/S0921-5107(01)00794-2",
947 URL = "http://www.sciencedirect.com/science/article/B6TXF-44YVPGS-1V/2/024ece074ad18ebbec62a39a2510a268",
948 author = "P. Lav\'eant and G. Gerth and P. Werner and U.
950 notes = "low c in si, tensile stress to compensate compressive
951 stress, avoid sic precipitation",
955 author = "P. Werner and S. Eichler and G. Mariani and R.
956 K{\"{o}}gler and W. Skorupa",
957 title = "Investigation of {C}[sub x]Si defects in {C} implanted
958 silicon by transmission electron microscopy",
961 journal = "Appl. Phys. Lett.",
965 keywords = "silicon; ion implantation; carbon; crystal defects;
966 transmission electron microscopy; annealing; positron
967 annihilation; secondary ion mass spectroscopy; buried
968 layers; precipitation",
969 URL = "http://link.aip.org/link/?APL/70/252/1",
970 doi = "10.1063/1.118381",
971 notes = "si-c complexes, agglomerate, sic in si matrix, sic
975 @InProceedings{werner96,
976 author = "P. Werner and R. K{\"{o}}gler and W. Skorupa and D.
978 booktitle = "Ion Implantation Technology. Proceedings of the 11th
979 International Conference on",
980 title = "{TEM} investigation of {C}-Si defects in carbon
987 doi = "10.1109/IIT.1996.586497",
989 notes = "c-si agglomerates dumbbells",
993 author = "P. Werner and U. G{\"{o}}sele and H.-J. Gossmann and
996 title = "Carbon diffusion in silicon",
999 journal = "Appl. Phys. Lett.",
1002 pages = "2465--2467",
1003 keywords = "silicon; carbon; elemental semiconductors; diffusion;
1004 secondary ion mass spectra; semiconductor epitaxial
1005 layers; annealing; impurity-defect interactions;
1006 impurity distribution",
1007 URL = "http://link.aip.org/link/?APL/73/2465/1",
1008 doi = "10.1063/1.122483",
1009 notes = "c diffusion in si, kick out mechnism",
1013 author = "J. W. Strane and H. J. Stein and S. R. Lee and S. T.
1014 Picraux and J. K. Watanabe and J. W. Mayer",
1016 title = "Precipitation and relaxation in strained Si[sub 1 -
1017 y]{C}[sub y]/Si heterostructures",
1020 journal = "J. Appl. Phys.",
1023 pages = "3656--3668",
1024 keywords = "SILICON CARBIDES; SILICON; PRECIPITATION; STRAINS",
1025 URL = "http://link.aip.org/link/?JAP/76/3656/1",
1026 doi = "10.1063/1.357429",
1027 notes = "strained si-c to 3c-sic, carbon nucleation + refs,
1028 precipitation by substitutional carbon, coherent prec,
1029 coherent to incoherent transition strain vs interface
1034 author = "G. G. Fischer and P. Zaumseil and E. Bugiel and H. J.
1037 title = "Investigation of the high temperature behavior of
1038 strained Si[sub 1 - y]{C}[sub y] /Si heterostructures",
1041 journal = "J. Appl. Phys.",
1044 pages = "1934--1937",
1045 keywords = "SILICON CARBIDES; SILICON; HETEROSTRUCTURES; STRAINS;
1046 XRD; MOLECULAR BEAM EPITAXY; STABILITY; TENSILE
1047 PROPERTIES; EPITAXIAL LAYERS; ANNEALING; PRECIPITATION;
1048 TEMPERATURE RANGE 04001000 K",
1049 URL = "http://link.aip.org/link/?JAP/77/1934/1",
1050 doi = "10.1063/1.358826",
1054 title = "Prospects for device implementation of wide band gap
1056 author = "J. H. Edgar",
1057 journal = "J. Mater. Res.",
1062 doi = "10.1557/JMR.1992.0235",
1063 notes = "properties wide band gap semiconductor, sic
1067 @Article{zirkelbach2007,
1068 title = "Monte Carlo simulation study of a selforganisation
1069 process leading to ordered precipitate structures",
1070 author = "F. Zirkelbach and M. H{\"a}berlen and J. K. N. Lindner
1072 journal = "Nucl. Instr. and Meth. B",
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1129 Silicon Materials Research for Electronic and
1130 Photovoltaic Applications",
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1331 author = "B. J. Alder and T. E. Wainwright",
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1478 ZnSe-based semiconductor device technologies",
1481 journal = "J. Appl. Phys.",
1484 pages = "1363--1398",
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1486 NITRIDES; ZINC SELENIDES; SUBSTRATES; MOS JUNCTIONS;
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1491 notes = "sic intro, properties",
1495 author = "Noch Unbekannt",
1496 title = "How to find references",
1497 journal = "Journal of Applied References",
1504 title = "Atomistic simulation of thermomechanical properties of
1506 author = "Meijie Tang and Sidney Yip",
1507 journal = "Phys. Rev. B",
1510 pages = "15150--15159",
1513 doi = "10.1103/PhysRevB.52.15150",
1514 notes = "modified tersoff, scale cutoff with volume, promising
1515 tersoff reparametrization",
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1520 title = "Silicon carbide as a new {MEMS} technology",
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1532 keywords = "Micromachining",
1533 keywords = "Mechanical stress",
1537 title = "Status of silicon carbide (Si{C}) as a wide-bandgap
1538 semiconductor for high-temperature applications: {A}
1540 journal = "Solid-State Electronics",
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1552 @Article{giancarli98,
1553 title = "Design requirements for Si{C}/Si{C} composites
1554 structural material in fusion power reactor blankets",
1555 journal = "Fusion Engineering and Design",
1561 doi = "DOI: 10.1016/S0920-3796(97)00200-7",
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1563 author = "L. Giancarli and J. P. Bonal and A. Caso and G. Le
1564 Marois and N. B. Morley and J. F. Salavy",
1568 title = "Electrical and optical characterization of Si{C}",
1569 journal = "Physica B: Condensed Matter",
1575 doi = "DOI: 10.1016/0921-4526(93)90249-6",
1576 URL = "http://www.sciencedirect.com/science/article/B6TVH-46G8HRX-99/2/eab9398bf2bbf10df3ae42c2ab28a776",
1577 author = "G. Pensl and W. J. Choyke",
1581 title = "Investigation of growth processes of ingots of silicon
1582 carbide single crystals",
1583 journal = "J. Cryst. Growth",
1588 notes = "modified lely process",
1590 doi = "DOI: 10.1016/0022-0248(78)90169-0",
1591 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46BY2NR-7S/2/fa6fee78ebd8322491f6366e72d5b6dc",
1592 author = "Yu. M. Tairov and V. F. Tsvetkov",
1596 title = "General principles of growing large-size single
1597 crystals of various silicon carbide polytypes",
1598 journal = "Journal of Crystal Growth",
1605 doi = "DOI: 10.1016/0022-0248(81)90184-6",
1606 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46FVMF6-2Y/2/b7c4025f0ef07ceec37fbd596819d529",
1607 author = "Yu.M. Tairov and V. F. Tsvetkov",
1611 title = "Si{C} boule growth by sublimation vapor transport",
1612 journal = "Journal of Crystal Growth",
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1637 R. H. Hopkins and P. G. McMullin and R. C. Clarke and
1642 title = "Control of polytype formation by surface energy
1643 effects during the growth of Si{C} monocrystals by the
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1659 author = "Shigehiro Nishino and J. Anthony Powell and Herbert A.
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1666 journal = "Appl. Phys. Lett.",
1670 keywords = "silicon carbides; layers; chemical vapor deposition;
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1815 J. Choyke and J. L. Bradshaw and L. Henderson and M.
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1837 Rozgonyi and K. L. More",
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1879 Thokala and M. J. Loboda",
1881 title = "Reduced temperature growth of crystalline 3{C}-Si{C}
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1886 journal = "J. Appl. Phys.",
1889 pages = "1271--1273",
1890 keywords = "SILICON CARBIDES; THIN FILMS; CVD; EPITAXY; ABSORPTION
1891 EDGE; CRYSTAL STRUCTURE; STRAINS; DISLOCATIONS; XRD;
1893 URL = "http://link.aip.org/link/?JAP/78/1271/1",
1894 doi = "10.1063/1.360368",
1895 notes = "3c-sic on 6h-sic, cvd, reduced temperature",
1899 title = "Epitaxial growth of Si{C} thin films on Si-stabilized
1900 [alpha]-Si{C}(0001) at low temperatures by solid-source
1901 molecular beam epitaxy",
1902 journal = "J. Cryst. Growth",
1908 doi = "DOI: 10.1016/0022-0248(95)00170-0",
1909 URL = "http://www.sciencedirect.com/science/article/B6TJ6-3Y5MMXM-1N/2/65549019b878bf02d5ec645b7eea9e98",
1910 author = "A. Fissel and U. Kaiser and E. Ducke and B.
1911 Schr{\"{o}}ter and W. Richter",
1912 notes = "solid source mbe of 3c-sic on si and 6h-sic",
1915 @Article{fissel95_apl,
1916 author = "A. Fissel and B. Schr{\"{o}}ter and W. Richter",
1918 title = "Low-temperature growth of Si{C} thin films on Si and
1919 6{H}--Si{C} by solid-source molecular beam epitaxy",
1922 journal = "Appl. Phys. Lett.",
1925 pages = "3182--3184",
1926 keywords = "SILICON CARBIDES; MOLECULAR BEAM EPITAXY; MORPHOLOGY;
1928 URL = "http://link.aip.org/link/?APL/66/3182/1",
1929 doi = "10.1063/1.113716",
1930 notes = "mbe 3c-sic on si and 6h-sic",
1934 author = "Andreas Fissel and Ute Kaiser and Kay Pfennighaus and
1935 Bernd Schr{\"{o}}ter and Wolfgang Richter",
1937 title = "Growth of 6{H}--Si{C} on 6{H}--Si{C}(0001) by
1938 migration enhanced epitaxy controlled to an atomic
1939 level using surface superstructures",
1942 journal = "Applied Physics Letters",
1945 pages = "1204--1206",
1946 keywords = "MICROSTRUCTURE; MOLECULAR BEAM EPITAXY; MORPHOLOGY;
1947 NUCLEATION; SILICON CARBIDES; SURFACE RECONSTRUCTION;
1949 URL = "http://link.aip.org/link/?APL/68/1204/1",
1950 doi = "10.1063/1.115969",
1951 notes = "ss mbe sic, superstructure, reconstruction",
1955 title = "Ab initio Simulations of Homoepitaxial Si{C} Growth",
1956 author = "M. C. Righi and C. A. Pignedoli and R. Di Felice and
1957 C. M. Bertoni and A. Catellani",
1958 journal = "Phys. Rev. Lett.",
1965 doi = "10.1103/PhysRevLett.91.136101",
1966 publisher = "American Physical Society",
1967 notes = "dft calculations mbe sic growth",
1971 author = "J. A. Borders and S. T. Picraux and W. Beezhold",
1973 title = "{FORMATION} {OF} Si{C} {IN} {SILICON} {BY} {ION}
1977 journal = "Appl. Phys. Lett.",
1981 URL = "http://link.aip.org/link/?APL/18/509/1",
1982 doi = "10.1063/1.1653516",
1983 notes = "first time sic by ibs, follow cites for precipitation
1988 author = "K. J. Reeson and P. L. F. Hemment and J. Stoemenos and
1989 J. Davis and G. E. Celler",
1991 title = "Formation of buried layers of beta-Si{C} using ion
1992 beam synthesis and incoherent lamp annealing",
1995 journal = "Appl. Phys. Lett.",
1998 pages = "2242--2244",
1999 keywords = "SILICON CARBIDES; FILM GROWTH; SOLIDPHASE EPITAXY; ION
2000 IMPLANTATION; CARBON IONS; DOPING PROFILES; SYNTHESIS",
2001 URL = "http://link.aip.org/link/?APL/51/2242/1",
2002 doi = "10.1063/1.98953",
2003 notes = "nice tem images, sic by ibs",
2007 author = "R. I. Scace and G. A. Slack",
2009 title = "Solubility of Carbon in Silicon and Germanium",
2012 journal = "J. Chem. Phys.",
2015 pages = "1551--1555",
2016 URL = "http://link.aip.org/link/?JCP/30/1551/1",
2017 doi = "10.1063/1.1730236",
2018 notes = "solubility of c in c-si, si-c phase diagram",
2022 author = "N. E. B. Cowern and A. Cacciato and J. S. Custer and
2023 F. W. Saris and W. Vandervorst",
2025 title = "Role of {C} and {B} clusters in transient diffusion of
2029 journal = "Appl. Phys. Lett.",
2032 pages = "1150--1152",
2033 keywords = "ATOMIC CLUSTERS; BORON ADDITIONS; CRYSTAL DOPING;
2034 DIFFUSION; DOPED MATERIALS; IMPURITIES; INTERSTITIALS;
2036 URL = "http://link.aip.org/link/?APL/68/1150/1",
2037 doi = "10.1063/1.115706",
2038 notes = "suppression of transient enhanced diffusion (ted)",
2042 title = "Implantation and transient boron diffusion: the role
2043 of the silicon self-interstitial",
2044 journal = "Nucl. Instrum. Methods Phys. Res. B",
2049 note = "Selected Papers of the Tenth International Conference
2050 on Ion Implantation Technology (IIT '94)",
2052 doi = "DOI: 10.1016/0168-583X(94)00481-1",
2053 URL = "http://www.sciencedirect.com/science/article/B6TJN-40WKY1P-29/2/602c6e5b809221323d2d2968edd0a71c",
2054 author = "P. A. Stolk and H. -J. Gossmann and D. J. Eaglesham
2059 author = "P. A. Stolk and H.-J. Gossmann and D. J. Eaglesham and
2060 D. C. Jacobson and C. S. Rafferty and G. H. Gilmer and
2061 M. Jara\'{\i}z and J. M. Poate and H. S. Luftman and T.
2064 title = "Physical mechanisms of transient enhanced dopant
2065 diffusion in ion-implanted silicon",
2068 journal = "J. Appl. Phys.",
2071 pages = "6031--6050",
2072 URL = "http://link.aip.org/link/?JAP/81/6031/1",
2073 doi = "10.1063/1.364452",
2074 notes = "ted, transient enhanced diffusion, c silicon trap",
2078 author = "A. R. Powell and F. K. LeGoues and S. S. Iyer",
2080 title = "Formation of beta-Si{C} nanocrystals by the relaxation
2081 of Si[sub 1 - y]{C}[sub y] random alloy layers",
2084 journal = "Appl. Phys. Lett.",
2088 keywords = "SILICON CARBIDES; NANOSTRUCTURES; DISPERSIONS;
2089 EPITAXIAL LAYERS; STRESS RELAXATION; ANNEALING;
2090 TEMPERATURE EFFECTS; PRECIPITATION; DISLOCATIONS;
2092 URL = "http://link.aip.org/link/?APL/64/324/1",
2093 doi = "10.1063/1.111195",
2094 notes = "beta sic nano crystals in si, mbe, annealing",
2098 author = "Richard A. Soref",
2100 title = "Optical band gap of the ternary semiconductor Si[sub 1
2101 - x - y]Ge[sub x]{C}[sub y]",
2104 journal = "J. Appl. Phys.",
2107 pages = "2470--2472",
2108 keywords = "SILICON CARBIDES; GERMANIUM CARBIDES; ENERGY GAP;
2109 OPTICAL PROPERTIES; DIAMONDS; SEMICONDUCTOR ALLOYS;
2111 URL = "http://link.aip.org/link/?JAP/70/2470/1",
2112 doi = "10.1063/1.349403",
2113 notes = "band gap of strained si by c",
2117 author = "E Kasper",
2118 title = "Superlattices of group {IV} elements, a new
2119 possibility to produce direct band gap material",
2120 journal = "Physica Scripta",
2123 URL = "http://stacks.iop.org/1402-4896/T35/232",
2125 notes = "superlattices, convert indirect band gap into a
2130 author = "H. J. Osten and J. Griesche and S. Scalese",
2132 title = "Substitutional carbon incorporation in epitaxial
2133 Si[sub 1 - y]{C}[sub y] alloys on Si(001) grown by
2134 molecular beam epitaxy",
2137 journal = "Appl. Phys. Lett.",
2141 keywords = "molecular beam epitaxial growth; semiconductor growth;
2142 wide band gap semiconductors; interstitials; silicon
2144 URL = "http://link.aip.org/link/?APL/74/836/1",
2145 doi = "10.1063/1.123384",
2146 notes = "substitutional c in si",
2149 @Article{hohenberg64,
2150 title = "Inhomogeneous Electron Gas",
2151 author = "P. Hohenberg and W. Kohn",
2152 journal = "Phys. Rev.",
2155 pages = "B864--B871",
2159 doi = "10.1103/PhysRev.136.B864",
2160 publisher = "American Physical Society",
2161 notes = "density functional theory, dft",
2165 title = "Self-Consistent Equations Including Exchange and
2166 Correlation Effects",
2167 author = "W. Kohn and L. J. Sham",
2168 journal = "Phys. Rev.",
2171 pages = "A1133--A1138",
2175 doi = "10.1103/PhysRev.140.A1133",
2176 publisher = "American Physical Society",
2177 notes = "dft, exchange and correlation",
2181 title = "Strain-stabilized highly concentrated pseudomorphic
2182 $Si1-x$$Cx$ layers in Si",
2183 author = "H. R{\"u}cker and M. Methfessel and E. Bugiel and H.
2185 journal = "Phys. Rev. Lett.",
2188 pages = "3578--3581",
2192 doi = "10.1103/PhysRevLett.72.3578",
2193 publisher = "American Physical Society",
2194 notes = "high c concentration in si, heterostructure, strained
2199 title = "Electron Transport Model for Strained Silicon-Carbon
2201 author = "Shu-Tong Chang and Chung-Yi Lin",
2202 journal = "Japanese J. Appl. Phys.",
2205 pages = "2257--2262",
2208 URL = "http://jjap.ipap.jp/link?JJAP/44/2257/",
2209 doi = "10.1143/JJAP.44.2257",
2210 publisher = "The Japan Society of Applied Physics",
2211 notes = "enhance of electron mobility in starined si",
2215 author = "H. J. Osten and P. Gaworzewski",
2217 title = "Charge transport in strained Si[sub 1 - y]{C}[sub y]
2218 and Si[sub 1 - x - y]Ge[sub x]{C}[sub y] alloys on
2222 journal = "J. Appl. Phys.",
2225 pages = "4977--4981",
2226 keywords = "silicon compounds; Ge-Si alloys; wide band gap
2227 semiconductors; semiconductor epitaxial layers; carrier
2228 density; Hall mobility; interstitials; defect states",
2229 URL = "http://link.aip.org/link/?JAP/82/4977/1",
2230 doi = "10.1063/1.366364",
2231 notes = "charge transport in strained si",
2235 title = "Carbon-mediated aggregation of self-interstitials in
2236 silicon: {A} large-scale molecular dynamics study",
2237 author = "Sumeet S. Kapur and Manish Prasad and Talid Sinno",
2238 journal = "Phys. Rev. B",
2245 doi = "10.1103/PhysRevB.69.155214",
2246 publisher = "American Physical Society",
2247 notes = "simulation using promising tersoff reparametrization",
2251 title = "Event-Based Relaxation of Continuous Disordered
2253 author = "G. T. Barkema and Normand Mousseau",
2254 journal = "Phys. Rev. Lett.",
2257 pages = "4358--4361",
2261 doi = "10.1103/PhysRevLett.77.4358",
2262 publisher = "American Physical Society",
2263 notes = "activation relaxation technique, art, speed up slow
2268 author = "E. Canc\`{e}s and F. Legoll and M.-C. Marinica and K.
2269 Minoukadeh and F. Willaime",
2271 title = "Some improvements of the activation-relaxation
2272 technique method for finding transition pathways on
2273 potential energy surfaces",
2276 journal = "J. Chem. Phys.",
2282 keywords = "eigenvalues and eigenfunctions; iron; potential energy
2283 surfaces; vacancies (crystal)",
2284 URL = "http://link.aip.org/link/?JCP/130/114711/1",
2285 doi = "10.1063/1.3088532",
2286 notes = "improvements to art, refs for methods to find
2287 transition pathways",
2290 @Article{parrinello81,
2291 author = "M. Parrinello and A. Rahman",
2293 title = "Polymorphic transitions in single crystals: {A} new
2294 molecular dynamics method",
2297 journal = "J. Appl. Phys.",
2300 pages = "7182--7190",
2301 keywords = "MONOCRYSTALS; PHASE TRANSFORMATIONS; STRUCTURAL
2302 MODELS; DYNAMICS; THEORETICAL DATA; STRESSES;
2303 CONFIGURATION; LAGRANGE EQUATIONS; SIZE; NICKEL;
2304 COMPRESSION; TENSILE PROPERTIES; COMPARATIVE
2305 EVALUATIONS; STRAINS; CUBIC LATTICES; HCP LATTICES;
2307 URL = "http://link.aip.org/link/?JAP/52/7182/1",
2308 doi = "10.1063/1.328693",
2311 @Article{stillinger85,
2312 title = "Computer simulation of local order in condensed phases
2314 author = "Frank H. Stillinger and Thomas A. Weber",
2315 journal = "Phys. Rev. B",
2318 pages = "5262--5271",
2322 doi = "10.1103/PhysRevB.31.5262",
2323 publisher = "American Physical Society",
2327 title = "Empirical potential for hydrocarbons for use in
2328 simulating the chemical vapor deposition of diamond
2330 author = "Donald W. Brenner",
2331 journal = "Phys. Rev. B",
2334 pages = "9458--9471",
2338 doi = "10.1103/PhysRevB.42.9458",
2339 publisher = "American Physical Society",
2340 notes = "brenner hydro carbons",
2344 title = "Modeling of Covalent Bonding in Solids by Inversion of
2345 Cohesive Energy Curves",
2346 author = "Martin Z. Bazant and Efthimios Kaxiras",
2347 journal = "Phys. Rev. Lett.",
2350 pages = "4370--4373",
2354 doi = "10.1103/PhysRevLett.77.4370",
2355 publisher = "American Physical Society",
2356 notes = "first si edip",
2360 title = "Environment-dependent interatomic potential for bulk
2362 author = "Martin Z. Bazant and Efthimios Kaxiras and J. F.
2364 journal = "Phys. Rev. B",
2367 pages = "8542--8552",
2371 doi = "10.1103/PhysRevB.56.8542",
2372 publisher = "American Physical Society",
2373 notes = "second si edip",
2377 title = "Interatomic potential for silicon defects and
2379 author = "Jo\tilde{a}o F. Justo and Martin Z. Bazant and
2380 Efthimios Kaxiras and V. V. Bulatov and Sidney Yip",
2381 journal = "Phys. Rev. B",
2384 pages = "2539--2550",
2388 doi = "10.1103/PhysRevB.58.2539",
2389 publisher = "American Physical Society",
2390 notes = "latest si edip, good dislocation explanation",
2394 title = "{PARCAS} molecular dynamics code",
2395 author = "K. Nordlund",
2400 title = "Hyperdynamics: Accelerated Molecular Dynamics of
2402 author = "Arthur F. Voter",
2403 journal = "Phys. Rev. Lett.",
2406 pages = "3908--3911",
2410 doi = "10.1103/PhysRevLett.78.3908",
2411 publisher = "American Physical Society",
2412 notes = "hyperdynamics, accelerated md",
2416 author = "Arthur F. Voter",
2418 title = "A method for accelerating the molecular dynamics
2419 simulation of infrequent events",
2422 journal = "J. Chem. Phys.",
2425 pages = "4665--4677",
2426 keywords = "COMPUTERIZED SIMULATION; NICKEL; DIFFUSION; ATOM
2427 TRANSPORT; MOLECULAR ORBITAL METHOD; POTENTIAL ENERGY;
2428 SURFACE POTENTIAL; MOLECULAR DYNAMICS METHOD; potential
2429 energy functions; surface diffusion; reaction kinetics
2430 theory; potential energy surfaces",
2431 URL = "http://link.aip.org/link/?JCP/106/4665/1",
2432 doi = "10.1063/1.473503",
2433 notes = "improved hyperdynamics md",
2436 @Article{sorensen2000,
2437 author = "Mads R. S{\o }rensen and Arthur F. Voter",
2439 title = "Temperature-accelerated dynamics for simulation of
2443 journal = "J. Chem. Phys.",
2446 pages = "9599--9606",
2447 keywords = "SOLID STATE PHYSICS; SIMULATION; DIFFUSION; SURFACES;
2448 MOLECULAR DYNAMICS METHOD; surface diffusion",
2449 URL = "http://link.aip.org/link/?JCP/112/9599/1",
2450 doi = "10.1063/1.481576",
2451 notes = "temperature accelerated dynamics, tad",
2455 title = "Parallel replica method for dynamics of infrequent
2457 author = "Arthur F. Voter",
2458 journal = "Phys. Rev. B",
2461 pages = "R13985--R13988",
2465 doi = "10.1103/PhysRevB.57.R13985",
2466 publisher = "American Physical Society",
2467 notes = "parallel replica method, accelerated md",
2471 author = "Xiongwu Wu and Shaomeng Wang",
2473 title = "Enhancing systematic motion in molecular dynamics
2477 journal = "J. Chem. Phys.",
2480 pages = "9401--9410",
2481 keywords = "molecular dynamics method; argon; Lennard-Jones
2482 potential; crystallisation; liquid theory",
2483 URL = "http://link.aip.org/link/?JCP/110/9401/1",
2484 doi = "10.1063/1.478948",
2485 notes = "self guided md, sgmd, accelerated md, enhancing
2489 @Article{choudhary05,
2490 author = "Devashish Choudhary and Paulette Clancy",
2492 title = "Application of accelerated molecular dynamics schemes
2493 to the production of amorphous silicon",
2496 journal = "J. Chem. Phys.",
2502 keywords = "molecular dynamics method; silicon; glass structure;
2503 amorphous semiconductors",
2504 URL = "http://link.aip.org/link/?JCP/122/154509/1",
2505 doi = "10.1063/1.1878733",
2506 notes = "explanation of sgmd and hyper md, applied to amorphous
2511 author = "W. J. Taylor and T. Y. Tan and U. G{\"{o}}sele",
2513 title = "Carbon precipitation in silicon: Why is it so
2517 journal = "Appl. Phys. Lett.",
2520 pages = "3336--3338",
2521 keywords = "SILICON; CARBON ADDITIONS; OXYGEN ADDITIONS; DOPED
2522 MATERIALS; PRECIPITATION; THERMODYNAMICS; SURFACE
2524 URL = "http://link.aip.org/link/?APL/62/3336/1",
2525 doi = "10.1063/1.109063",
2526 notes = "interfacial energy of cubic sic and si",
2529 @Article{chaussende08,
2530 title = "Prospects for 3{C}-Si{C} bulk crystal growth",
2531 journal = "J. Cryst. Growth",
2536 note = "Proceedings of the E-MRS Conference, Symposium G -
2537 Substrates of Wide Bandgap Materials",
2539 doi = "DOI: 10.1016/j.jcrysgro.2007.11.140",
2540 URL = "http://www.sciencedirect.com/science/article/B6TJ6-4R7J67S-F/2/e92fc194b652409f5b119393d608b082",
2541 author = "D. Chaussende and F. Mercier and A. Boulle and F.
2542 Conchon and M. Soueidan and G. Ferro and A. Mantzari
2543 and A. Andreadou and E. K. Polychroniadis and C.
2544 Balloud and S. Juillaguet and J. Camassel and M. Pons",
2545 notes = "3c-sic crystal growth, sic fabrication + links,
2549 @Article{chaussende07,
2550 author = "D. Chaussende and P. J. Wellmann and M. Pons",
2551 title = "Status of Si{C} bulk growth processes",
2552 journal = "Journal of Physics D: Applied Physics",
2556 URL = "http://stacks.iop.org/0022-3727/40/i=20/a=S02",
2558 notes = "review of sic single crystal growth methods, process
2563 title = "Forces in Molecules",
2564 author = "R. P. Feynman",
2565 journal = "Phys. Rev.",
2572 doi = "10.1103/PhysRev.56.340",
2573 publisher = "American Physical Society",
2574 notes = "hellmann feynman forces",
2578 title = "Bonding Arrangements at the $Si-Si{O}_{2}$ and
2579 $Si{C}-Si{O}_{2}$ Interfaces and a Possible Origin of
2580 their Contrasting Properties",
2581 author = "Ryszard Buczko and Stephen J. Pennycook and Sokrates
2583 journal = "Phys. Rev. Lett.",
2590 doi = "10.1103/PhysRevLett.84.943",
2591 publisher = "American Physical Society",
2592 notes = "si sio2 and sic sio2 interface",
2595 @Article{djurabekova08,
2596 title = "Atomistic simulation of the interface structure of Si
2597 nanocrystals embedded in amorphous silica",
2598 author = "Flyura Djurabekova and Kai Nordlund",
2599 journal = "Phys. Rev. B",
2606 doi = "10.1103/PhysRevB.77.115325",
2607 publisher = "American Physical Society",
2608 notes = "nc-si in sio2, interface energy, nc construction,
2609 angular distribution, coordination",
2613 author = "C. Wen and Y. M. Wang and W. Wan and F. H. Li and J.
2614 W. Liang and J. Zou",
2616 title = "Nature of interfacial defects and their roles in
2617 strain relaxation at highly lattice mismatched
2618 3{C}-Si{C}/Si (001) interface",
2621 journal = "J. Appl. Phys.",
2627 keywords = "anelastic relaxation; crystal structure; dislocations;
2628 elemental semiconductors; semiconductor growth;
2629 semiconductor thin films; silicon; silicon compounds;
2630 stacking faults; wide band gap semiconductors",
2631 URL = "http://link.aip.org/link/?JAP/106/073522/1",
2632 doi = "10.1063/1.3234380",
2633 notes = "sic/si interface, follow refs, tem image
2634 deconvolution, dislocation defects",
2637 @Article{kitabatake93,
2638 author = "Makoto Kitabatake and Masahiro Deguchi and Takashi
2641 title = "Simulations and experiments of Si{C} heteroepitaxial
2642 growth on Si(001) surface",
2645 journal = "J. Appl. Phys.",
2648 pages = "4438--4445",
2649 keywords = "SILICON CARBIDES; FILM GROWTH; SIMULATION; MOLECULAR
2650 BEAM EPITAXY; MOLECULAR DYNAMICS CALCULATIONS; SILICON;
2651 MICROSTRUCTURE; ULTRAVIOLET RADIATION; IRRADIATION",
2652 URL = "http://link.aip.org/link/?JAP/74/4438/1",
2653 doi = "10.1063/1.354385",
2654 notes = "mbe and md of sic growth on si, 4 to 5 shrinkage
2658 @Article{kitabatake97,
2659 author = "Makoto Kitabatake",
2660 title = "Simulations and Experiments of 3{C}-Si{C}/Si
2661 Heteroepitaxial Growth",
2662 publisher = "WILEY-VCH Verlag",
2664 journal = "physica status solidi (b)",
2667 URL = "http://dx.doi.org/10.1002/1521-3951(199707)202:1<405::AID-PSSB405>3.0.CO;2-5",
2668 doi = "10.1002/1521-3951(199707)202:1<405::AID-PSSB405>3.0.CO;2-5",
2669 notes = "3c-sic heteroepitaxial growth on si off-axis model",
2673 title = "Strain relaxation and thermal stability of the
2674 3{C}-Si{C}(001)/Si(001) interface: {A} molecular
2676 journal = "Thin Solid Films",
2683 doi = "DOI: 10.1016/S0040-6090(96)09257-7",
2684 URL = "http://www.sciencedirect.com/science/article/B6TW0-41WBB52-C/2/6ef684a04d02dd3b108f972377cde8f4",
2685 author = "V. Chirita and L. Hultman and L. R. Wallenberg",
2686 keywords = "Strain relaxation",
2687 keywords = "Interfaces",
2688 keywords = "Thermal stability",
2689 keywords = "Molecular dynamics",
2690 notes = "tersoff sic/si interface study",
2694 title = "Ab initio Study of Misfit Dislocations at the
2695 $Si{C}/Si(001)$ Interface",
2696 author = "Giancarlo Cicero and Laurent Pizzagalli and Alessandra
2698 journal = "Phys. Rev. Lett.",
2705 doi = "10.1103/PhysRevLett.89.156101",
2706 publisher = "American Physical Society",
2707 notes = "sic/si interface study",
2710 @Article{pizzagalli03,
2711 title = "Theoretical investigations of a highly mismatched
2712 interface: Si{C}/Si(001)",
2713 author = "Laurent Pizzagalli and Giancarlo Cicero and Alessandra
2715 journal = "Phys. Rev. B",
2722 doi = "10.1103/PhysRevB.68.195302",
2723 publisher = "American Physical Society",
2724 notes = "tersoff md and ab initio sic/si interface study",
2728 title = "Atomic configurations of dislocation core and twin
2729 boundaries in $ 3{C}-Si{C} $ studied by high-resolution
2730 electron microscopy",
2731 author = "C. Y. Tang and F. H. Li and R. Wang and J. Zou and X.
2732 H. Zheng and J. W. Liang",
2733 journal = "Phys. Rev. B",
2740 doi = "10.1103/PhysRevB.75.184103",
2741 publisher = "American Physical Society",
2742 notes = "hrem image deconvolution on 3c-sic on si, distinguish
2746 @Article{hornstra58,
2747 title = "Dislocations in the diamond lattice",
2748 journal = "Journal of Physics and Chemistry of Solids",
2755 doi = "DOI: 10.1016/0022-3697(58)90138-0",
2756 URL = "http://www.sciencedirect.com/science/article/B6TXR-46MMPHJ-10D/2/7176c01c29cd4e73faa26ab2aacdcea5",
2757 author = "J. Hornstra",
2758 notes = "dislocations in diamond lattice",
2762 title = "Synthesis of $\beta$-Si{C} Layer in Silicon by Carbon
2763 Ion `Hot' Implantation",
2764 author = "Masahiro Deguchi and Makoto Kitabatake and Takashi
2765 Hirao and Naoki Arai and Tomio Izumi",
2766 journal = "Japanese Journal of Applied Physics",
2768 number = "Part 1, No. 2A",
2772 URL = "http://jjap.ipap.jp/link?JJAP/31/343/",
2773 doi = "10.1143/JJAP.31.343",
2774 publisher = "The Japan Society of Applied Physics",
2775 notes = "c-c bonds in c implanted si, hot implantation
2776 efficiency, c-c hard to break by thermal annealing",
2779 @Article{eichhorn99,
2780 author = "F. Eichhorn and N. Schell and W. Matz and R.
2783 title = "Strain and Si{C} particle formation in silicon
2784 implanted with carbon ions of medium fluence studied by
2785 synchrotron x-ray diffraction",
2788 journal = "J. Appl. Phys.",
2791 pages = "4184--4187",
2792 keywords = "silicon; carbon; elemental semiconductors; chemical
2793 interdiffusion; ion implantation; X-ray diffraction;
2794 precipitation; semiconductor doping",
2795 URL = "http://link.aip.org/link/?JAP/86/4184/1",
2796 doi = "10.1063/1.371344",
2797 notes = "sic conversion by ibs, detected substitutional carbon,
2798 expansion of si lattice",
2801 @Article{eichhorn02,
2802 author = "F. Eichhorn and N. Schell and A. M{\"{u}}cklich and H.
2803 Metzger and W. Matz and R. K{\"{o}}gler",
2805 title = "Structural relation between Si and Si{C} formed by
2806 carbon ion implantation",
2809 journal = "J. Appl. Phys.",
2812 pages = "1287--1292",
2813 keywords = "silicon compounds; wide band gap semiconductors; ion
2814 implantation; annealing; X-ray scattering; transmission
2815 electron microscopy",
2816 URL = "http://link.aip.org/link/?JAP/91/1287/1",
2817 doi = "10.1063/1.1428105",
2818 notes = "3c-sic alignement to si host in ibs depending on
2819 temperature, might explain c into c sub trafo",
2823 author = "G Lucas and M Bertolus and L Pizzagalli",
2824 title = "An environment-dependent interatomic potential for
2825 silicon carbide: calculation of bulk properties,
2826 high-pressure phases, point and extended defects, and
2827 amorphous structures",
2828 journal = "J. Phys.: Condens. Matter",
2832 URL = "http://stacks.iop.org/0953-8984/22/i=3/a=035802",
2838 author = "J Godet and L Pizzagalli and S Brochard and P
2840 title = "Comparison between classical potentials and ab initio
2841 methods for silicon under large shear",
2842 journal = "J. Phys.: Condens. Matter",
2846 URL = "http://stacks.iop.org/0953-8984/15/i=41/a=004",
2848 notes = "comparison of empirical potentials, stillinger weber,
2849 edip, tersoff, ab initio",
2852 @Article{moriguchi98,
2853 title = "Verification of Tersoff's Potential for Static
2854 Structural Analysis of Solids of Group-{IV} Elements",
2855 author = "Koji Moriguchi and Akira Shintani",
2856 journal = "Japanese J. Appl. Phys.",
2858 number = "Part 1, No. 2",
2862 URL = "http://jjap.ipap.jp/link?JJAP/37/414/",
2863 doi = "10.1143/JJAP.37.414",
2864 publisher = "The Japan Society of Applied Physics",
2865 notes = "tersoff stringent test",
2868 @Article{mazzarolo01,
2869 title = "Low-energy recoils in crystalline silicon: Quantum
2871 author = "Massimiliano Mazzarolo and Luciano Colombo and Giorgio
2872 Lulli and Eros Albertazzi",
2873 journal = "Phys. Rev. B",
2880 doi = "10.1103/PhysRevB.63.195207",
2881 publisher = "American Physical Society",
2884 @Article{holmstroem08,
2885 title = "Threshold defect production in silicon determined by
2886 density functional theory molecular dynamics
2888 author = "E. Holmstr{\"o}m and A. Kuronen and K. Nordlund",
2889 journal = "Phys. Rev. B",
2896 doi = "10.1103/PhysRevB.78.045202",
2897 publisher = "American Physical Society",
2898 notes = "threshold displacement comparison empirical and ab
2902 @Article{nordlund97,
2903 title = "Repulsive interatomic potentials calculated using
2904 Hartree-Fock and density-functional theory methods",
2905 journal = "Nucl. Instrum. Methods Phys. Res. B",
2912 doi = "DOI: 10.1016/S0168-583X(97)00447-3",
2913 URL = "http://www.sciencedirect.com/science/article/B6TJN-4CP0TGF-91/2/1a9100c0aae82d2d258fc83dfdba23c1",
2914 author = "K. Nordlund and N. Runeberg and D. Sundholm",
2915 notes = "repulsive ab initio potential",
2919 title = "Efficiency of ab-initio total energy calculations for
2920 metals and semiconductors using a plane-wave basis
2922 journal = "Comput. Mater. Sci.",
2929 doi = "DOI: 10.1016/0927-0256(96)00008-0",
2930 URL = "http://www.sciencedirect.com/science/article/B6TWM-3VRVTBF-3/2/88689b1eacfe2b5fe57f09d37eff3b74",
2931 author = "G. Kresse and J. Furthm{\"{u}}ller",
2936 title = "Projector augmented-wave method",
2937 author = "P. E. Bl{\"o}chl",
2938 journal = "Phys. Rev. B",
2941 pages = "17953--17979",
2945 doi = "10.1103/PhysRevB.50.17953",
2946 publisher = "American Physical Society",
2947 notes = "paw method",
2951 title = "Norm-Conserving Pseudopotentials",
2952 author = "D. R. Hamann and M. Schl{\"u}ter and C. Chiang",
2953 journal = "Phys. Rev. Lett.",
2956 pages = "1494--1497",
2960 doi = "10.1103/PhysRevLett.43.1494",
2961 publisher = "American Physical Society",
2962 notes = "norm-conserving pseudopotentials",
2965 @Article{vanderbilt90,
2966 title = "Soft self-consistent pseudopotentials in a generalized
2967 eigenvalue formalism",
2968 author = "David Vanderbilt",
2969 journal = "Phys. Rev. B",
2972 pages = "7892--7895",
2976 doi = "10.1103/PhysRevB.41.7892",
2977 publisher = "American Physical Society",
2978 notes = "vasp pseudopotentials",
2982 title = "Accurate and simple density functional for the
2983 electronic exchange energy: Generalized gradient
2985 author = "John P. Perdew and Yue Wang",
2986 journal = "Phys. Rev. B",
2989 pages = "8800--8802",
2993 doi = "10.1103/PhysRevB.33.8800",
2994 publisher = "American Physical Society",
2995 notes = "rapid communication gga",
2999 title = "Generalized gradient approximations for exchange and
3000 correlation: {A} look backward and forward",
3001 journal = "Physica B: Condensed Matter",
3008 doi = "DOI: 10.1016/0921-4526(91)90409-8",
3009 URL = "http://www.sciencedirect.com/science/article/B6TVH-46G8GR9-3D/2/18e610a616e4d80b934079c89063ece7",
3010 author = "John P. Perdew",
3011 notes = "gga overview",
3015 title = "Atoms, molecules, solids, and surfaces: Applications
3016 of the generalized gradient approximation for exchange
3018 author = "John P. Perdew and J. A. Chevary and S. H. Vosko and
3019 Koblar A. Jackson and Mark R. Pederson and D. J. Singh
3020 and Carlos Fiolhais",
3021 journal = "Phys. Rev. B",
3024 pages = "6671--6687",
3028 doi = "10.1103/PhysRevB.46.6671",
3029 publisher = "American Physical Society",
3030 notes = "gga pw91 (as in vasp)",
3033 @Article{baldereschi73,
3034 title = "Mean-Value Point in the Brillouin Zone",
3035 author = "A. Baldereschi",
3036 journal = "Phys. Rev. B",
3039 pages = "5212--5215",
3043 doi = "10.1103/PhysRevB.7.5212",
3044 publisher = "American Physical Society",
3045 notes = "mean value k point",
3049 title = "Ab initio pseudopotential calculations of dopant
3051 journal = "Comput. Mater. Sci.",
3058 doi = "DOI: 10.1016/S0927-0256(98)00023-8",
3059 URL = "http://www.sciencedirect.com/science/article/B6TWM-3VB7F2K-7/2/aa864582273be8e054300efb7bd16a1b",
3060 author = "Jing Zhu",
3061 keywords = "TED (transient enhanced diffusion)",
3062 keywords = "Boron dopant",
3063 keywords = "Carbon dopant",
3064 keywords = "Defect",
3065 keywords = "ab initio pseudopotential method",
3066 keywords = "Impurity cluster",
3067 notes = "binding of c to si interstitial, c in si defects",
3071 author = "A. Nejim and P. L. F. Hemment and J. Stoemenos",
3073 title = "Si{C} buried layer formation by ion beam synthesis at
3077 journal = "Appl. Phys. Lett.",
3080 pages = "2646--2648",
3081 keywords = "SILICON; ION IMPLANTATION; CARBON IONS; SILICON
3082 CARBIDES; BURIED LAYERS; SYNTHESIS; KEV RANGE 100 --
3083 1000; CRYSTAL DEFECTS; MORPHOLOGY; RBS; TRANSMISSION
3084 ELECTRON MICROSCOPY",
3085 URL = "http://link.aip.org/link/?APL/66/2646/1",
3086 doi = "10.1063/1.113112",
3087 notes = "precipitation mechanism by substitutional carbon, si
3088 self interstitials react with further implanted c",
3092 author = "C. Guedj and M. W. Dashiell and L. Kulik and J.
3093 Kolodzey and A. Hairie",
3095 title = "Precipitation of beta-Si{C} in Si[sub 1 - y]{C}[sub y]
3099 journal = "J. Appl. Phys.",
3102 pages = "4631--4633",
3103 keywords = "silicon compounds; precipitation; localised modes;
3104 semiconductor epitaxial layers; infrared spectra;
3105 Fourier transform spectra; thermal stability;
3107 URL = "http://link.aip.org/link/?JAP/84/4631/1",
3108 doi = "10.1063/1.368703",
3109 notes = "coherent 3C-SiC, topotactic, critical coherence size",
3113 author = "R Jones and B J Coomer and P R Briddon",
3114 title = "Quantum mechanical modelling of defects in
3116 journal = "J. Phys.: Condens. Matter",
3120 URL = "http://stacks.iop.org/0953-8984/16/i=27/a=004",
3122 notes = "ab inito init, vibrational modes, c defect in si",
3126 author = "S. Y. Park and J. D'Arcy-Gall and D. Gall and J. A. N.
3127 T Soares and Y.-W. Kim and H. Kim and P. Desjardins and
3128 J. E. Greene and S. G. Bishop",
3130 title = "Carbon incorporation pathways and lattice sites in
3131 Si[sub 1 - y]{C}[sub y] alloys grown on Si(001) by
3132 molecular-beam epitaxy",
3135 journal = "J. Appl. Phys.",
3138 pages = "5716--5727",
3139 URL = "http://link.aip.org/link/?JAP/91/5716/1",
3140 doi = "10.1063/1.1465122",
3141 notes = "c substitutional incorporation pathway, dft and expt",
3145 title = "Dynamic properties of interstitial carbon and
3146 carbon-carbon pair defects in silicon",
3147 author = "P. Leary and R. Jones and S. {\"O}berg and V. J. B.
3149 journal = "Phys. Rev. B",
3152 pages = "2188--2194",
3156 doi = "10.1103/PhysRevB.55.2188",
3157 publisher = "American Physical Society",
3158 notes = "ab initio c in si and di-carbon defect, no formation
3159 energies, different migration barriers and paths",
3163 title = "Interstitial carbon and the carbon-carbon pair in
3164 silicon: Semiempirical electronic-structure
3166 author = "Matthew J. Burnard and Gary G. DeLeo",
3167 journal = "Phys. Rev. B",
3170 pages = "10217--10225",
3174 doi = "10.1103/PhysRevB.47.10217",
3175 publisher = "American Physical Society",
3176 notes = "semi empirical mndo, pm3 and mindo3 c in si and di
3177 carbon defect, formation energies",
3181 title = "Electronic structure of interstitial carbon in
3183 author = "Morgan Besson and Gary G. DeLeo",
3184 journal = "Phys. Rev. B",
3187 pages = "4028--4033",
3191 doi = "10.1103/PhysRevB.43.4028",
3192 publisher = "American Physical Society",
3196 title = "Review of atomistic simulations of surface diffusion
3197 and growth on semiconductors",
3198 journal = "Comput. Mater. Sci.",
3203 note = "Proceedings of the Workshop on Virtual Molecular Beam
3206 doi = "DOI: 10.1016/0927-0256(96)00030-4",
3207 URL = "http://www.sciencedirect.com/science/article/B6TWM-3VSFF1G-7/2/afc8408b00ded1ca2dc3ad1686c2dae6",
3208 author = "Efthimios Kaxiras",
3209 notes = "might contain c 100 db formation energy, overview md,
3210 tight binding, first principles",
3213 @Article{kaukonen98,
3214 title = "Effect of {N} and {B} doping on the growth of {CVD}
3216 $(100):{H}(2\ifmmode\times\else\texttimes\fi{}1)$
3218 author = "M. Kaukonen and P. K. Sitch and G. Jungnickel and R.
3219 M. Nieminen and Sami P{\"o}ykk{\"o} and D. Porezag and
3221 journal = "Phys. Rev. B",
3224 pages = "9965--9970",
3228 doi = "10.1103/PhysRevB.57.9965",
3229 publisher = "American Physical Society",
3230 notes = "constrained conjugate gradient relaxation technique
3235 title = "Correlation between the antisite pair and the ${DI}$
3237 author = "A. Gali and P. De\'ak and E. Rauls and N. T. Son and
3238 I. G. Ivanov and F. H. C. Carlsson and E. Janz\'en and
3240 journal = "Phys. Rev. B",
3247 doi = "10.1103/PhysRevB.67.155203",
3248 publisher = "American Physical Society",
3252 title = "Production and recovery of defects in Si{C} after
3253 irradiation and deformation",
3254 journal = "J. Nucl. Mater.",
3257 pages = "1803--1808",
3261 doi = "DOI: 10.1016/S0022-3115(98)00139-1",
3262 URL = "http://www.sciencedirect.com/science/article/B6TXN-43G486N-47/2/56905f48f025ab98e5de4d6cde09c62b",
3263 author = "J. Chen and P. Jung and H. Klein",
3267 title = "Accumulation, dynamic annealing and thermal recovery
3268 of ion-beam-induced disorder in silicon carbide",
3269 journal = "Nucl. Instrum. Methods Phys. Res. B",
3276 doi = "DOI: 10.1016/S0168-583X(00)00542-5",
3277 URL = "http://www.sciencedirect.com/science/article/B6TJN-435KH7Y-2R/2/8acc176700c95bb8614d96c40cfc5577",
3278 author = "W. J. Weber and W. Jiang and S. Thevuthasan",
3281 @Article{bockstedte03,
3282 title = "Ab initio study of the migration of intrinsic defects
3284 author = "Michel Bockstedte and Alexander Mattausch and Oleg
3286 journal = "Phys. Rev. B",
3293 doi = "10.1103/PhysRevB.68.205201",
3294 publisher = "American Physical Society",
3295 notes = "defect migration in sic",
3299 title = "Theoretical study of vacancy diffusion and
3300 vacancy-assisted clustering of antisites in Si{C}",
3301 author = "E. Rauls and Th. Frauenheim and A. Gali and P.
3303 journal = "Phys. Rev. B",
3310 doi = "10.1103/PhysRevB.68.155208",
3311 publisher = "American Physical Society",
3315 journal = "Telegrafiya i Telefoniya bez Provodov",
3319 author = "O. V. Lossev",
3323 title = "Luminous carborundum detector and detection effect and
3324 oscillations with crystals",
3325 journal = "Philosophical Magazine Series 7",
3328 pages = "1024--1044",
3330 URL = "http://www.informaworld.com/10.1080/14786441108564683",
3331 author = "O. V. Lossev",
3335 journal = "Physik. Zeitschr.",
3339 author = "O. V. Lossev",
3343 journal = "Physik. Zeitschr.",
3347 author = "O. V. Lossev",
3351 journal = "Physik. Zeitschr.",
3355 author = "O. V. Lossev",
3359 title = "A note on carborundum",
3360 journal = "Electrical World",
3364 author = "H. J. Round",
3367 @Article{vashishath08,
3368 title = "Recent trends in silicon carbide device research",
3369 journal = "Mj. Int. J. Sci. Tech.",
3374 author = "Munish Vashishath and Ashoke K. Chatterjee",
3375 URL = "http://www.doaj.org/doaj?func=abstract&id=286746",
3376 notes = "sic polytype electronic properties",
3380 author = "W. E. Nelson and F. A. Halden and A. Rosengreen",
3382 title = "Growth and Properties of beta-Si{C} Single Crystals",
3385 journal = "Journal of Applied Physics",
3389 URL = "http://link.aip.org/link/?JAP/37/333/1",
3390 doi = "10.1063/1.1707837",
3391 notes = "sic melt growth",
3395 author = "A. E. van Arkel and J. H. de Boer",
3396 title = "Darstellung von reinem Titanium-, Zirkonium-, Hafnium-
3398 publisher = "WILEY-VCH Verlag GmbH",
3400 journal = "Z. Anorg. Chem.",
3403 URL = "http://dx.doi.org/10.1002/zaac.19251480133",
3404 doi = "10.1002/zaac.19251480133",
3405 notes = "van arkel apparatus",
3409 author = "K. Moers",
3411 journal = "Z. Anorg. Chem.",
3414 notes = "sic by van arkel apparatus, pyrolitical vapor growth
3419 author = "J. T. Kendall",
3420 title = "Electronic Conduction in Silicon Carbide",
3423 journal = "The Journal of Chemical Physics",
3427 URL = "http://link.aip.org/link/?JCP/21/821/1",
3428 notes = "sic by van arkel apparatus, pyrolitical vapor growth
3433 author = "J. A. Lely",
3435 journal = "Ber. Deut. Keram. Ges.",
3438 notes = "lely sublimation growth process",
3441 @Article{knippenberg63,
3442 author = "W. F. Knippenberg",
3444 journal = "Philips Res. Repts.",
3447 notes = "acheson process",
3450 @Article{hoffmann82,
3451 author = "L. Hoffmann and G. Ziegler and D. Theis and C.
3454 title = "Silicon carbide blue light emitting diodes with
3455 improved external quantum efficiency",
3458 journal = "Journal of Applied Physics",
3461 pages = "6962--6967",
3462 keywords = "light emitting diodes; silicon carbides; quantum
3463 efficiency; visible radiation; experimental data;
3464 epitaxy; fabrication; medium temperature; layers;
3465 aluminium; nitrogen; substrates; pn junctions;
3466 electroluminescence; spectra; current density;
3468 URL = "http://link.aip.org/link/?JAP/53/6962/1",
3469 doi = "10.1063/1.330041",
3470 notes = "blue led, sublimation process",
3474 author = "Philip Neudeck",
3475 affiliation = "NASA Lewis Research Center M.S. 77-1, 21000 Brookpark
3476 Road 44135 Cleveland OH",
3477 title = "Progress in silicon carbide semiconductor electronics
3479 journal = "Journal of Electronic Materials",
3480 publisher = "Springer Boston",
3482 keyword = "Chemistry and Materials Science",
3486 URL = "http://dx.doi.org/10.1007/BF02659688",
3487 note = "10.1007/BF02659688",
3489 notes = "sic data, advantages of 3c sic",
3492 @Article{bhatnagar93,
3493 author = "M. Bhatnagar and B. J. Baliga",
3494 journal = "Electron Devices, IEEE Transactions on",
3495 title = "Comparison of 6{H}-Si{C}, 3{C}-Si{C}, and Si for power
3502 keywords = "3C-SiC;50 to 5000 V;6H-SiC;Schottky
3503 rectifiers;Si;SiC;breakdown voltages;drift region
3504 properties;output characteristics;power MOSFETs;power
3505 semiconductor devices;switching characteristics;thermal
3506 analysis;Schottky-barrier diodes;electric breakdown of
3507 solids;insulated gate field effect transistors;power
3508 transistors;semiconductor materials;silicon;silicon
3509 compounds;solid-state rectifiers;thermal analysis;",
3510 doi = "10.1109/16.199372",
3512 notes = "comparison 3c 6h sic and si devices",
3516 author = "P. G. Neudeck and D. J. Larkin and J. E. Starr and J.
3517 A. Powell and C. S. Salupo and L. G. Matus",
3518 journal = "Electron Devices, IEEE Transactions on",
3519 title = "Electrical properties of epitaxial 3{C}- and
3520 6{H}-Si{C} p-n junction diodes produced side-by-side on
3521 6{H}-Si{C} substrates",
3527 keywords = "20 nA;200 micron;300 to 1100 V;3C-SiC layers;400
3528 C;6H-SiC layers;6H-SiC substrates;CVD
3529 process;SiC;chemical vapor deposition;doping;electrical
3530 properties;epitaxial layers;light
3531 emission;low-tilt-angle 6H-SiC substrates;p-n junction
3532 diodes;polytype;rectification characteristics;reverse
3533 leakage current;reverse voltages;temperature;leakage
3534 currents;power electronics;semiconductor
3535 diodes;semiconductor epitaxial layers;semiconductor
3536 growth;semiconductor materials;silicon
3537 compounds;solid-state rectifiers;substrates;vapour
3538 phase epitaxial growth;",
3539 doi = "10.1109/16.285038",
3541 notes = "comparison 6h 3c sic, cvd of 3c and 6h on single 6h
3546 author = "N. Schulze and D. L. Barrett and G. Pensl",
3548 title = "Near-equilibrium growth of micropipe-free 6{H}-Si{C}
3549 single crystals by physical vapor transport",
3552 journal = "Applied Physics Letters",
3555 pages = "1632--1634",
3556 keywords = "silicon compounds; semiconductor materials;
3557 semiconductor growth; crystal growth from vapour;
3558 photoluminescence; Hall mobility",
3559 URL = "http://link.aip.org/link/?APL/72/1632/1",
3560 doi = "10.1063/1.121136",
3561 notes = "micropipe free 6h-sic pvt growth",
3565 author = "P. Pirouz and C. M. Chorey and J. A. Powell",
3567 title = "Antiphase boundaries in epitaxially grown beta-Si{C}",
3570 journal = "Applied Physics Letters",
3574 keywords = "SILICON CARBIDES; DOMAIN STRUCTURE; SCANNING ELECTRON
3575 MICROSCOPY; NUCLEATION; EPITAXIAL LAYERS; CHEMICAL
3576 VAPOR DEPOSITION; ETCHING; ETCH PITS; TRANSMISSION
3577 ELECTRON MICROSCOPY; ELECTRON MICROSCOPY; ANTIPHASE
3579 URL = "http://link.aip.org/link/?APL/50/221/1",
3580 doi = "10.1063/1.97667",
3581 notes = "apb 3c-sic heteroepitaxy on si",
3584 @Article{shibahara86,
3585 title = "Surface morphology of cubic Si{C}(100) grown on
3586 Si(100) by chemical vapor deposition",
3587 journal = "Journal of Crystal Growth",
3594 doi = "DOI: 10.1016/0022-0248(86)90158-2",
3595 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46D26F7-1R/2/cfdbc7607352f3bc99d321303e3934e9",
3596 author = "Kentaro Shibahara and Shigehiro Nishino and Hiroyuki
3598 notes = "defects in 3c-sis cvd on si, anti phase boundaries",
3601 @Article{desjardins96,
3602 author = "P. Desjardins and J. E. Greene",
3604 title = "Step-flow epitaxial growth on two-domain surfaces",
3607 journal = "Journal of Applied Physics",
3610 pages = "1423--1434",
3611 keywords = "ADATOMS; COMPUTERIZED SIMULATION; DIFFUSION; EPITAXY;
3612 FILM GROWTH; SURFACE STRUCTURE",
3613 URL = "http://link.aip.org/link/?JAP/79/1423/1",
3614 doi = "10.1063/1.360980",
3615 notes = "apb model",
3619 author = "S. Henke and B. Stritzker and B. Rauschenbach",
3621 title = "Synthesis of epitaxial beta-Si{C} by {C}[sub 60]
3622 carbonization of silicon",
3625 journal = "Journal of Applied Physics",
3628 pages = "2070--2073",
3629 keywords = "SILICON CARBIDES; THIN FILMS; EPITAXY; CARBONIZATION;
3630 FULLERENES; ANNEALING; XRD; RBS; TWINNING; CRYSTAL
3632 URL = "http://link.aip.org/link/?JAP/78/2070/1",
3633 doi = "10.1063/1.360184",
3634 notes = "ssmbe of sic on si, lower temperatures",
3638 title = "Atomic layer epitaxy of cubic Si{C} by gas source
3639 {MBE} using surface superstructure",
3640 journal = "Journal of Crystal Growth",
3647 doi = "DOI: 10.1016/0022-0248(89)90442-9",
3648 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46DFS6F-GF/2/a8e0abaef892c6d96992ff4751fdeda2",
3649 author = "Takashi Fuyuki and Michiaki Nakayama and Tatsuo
3650 Yoshinobu and Hiromu Shiomi and Hiroyuki Matsunami",
3651 notes = "gas source mbe of 3c-sic on 6h-sic",
3654 @Article{yoshinobu92,
3655 author = "Tatsuo Yoshinobu and Hideaki Mitsui and Iwao Izumikawa
3656 and Takashi Fuyuki and Hiroyuki Matsunami",
3658 title = "Lattice-matched epitaxial growth of single crystalline
3659 3{C}-Si{C} on 6{H}-Si{C} substrates by gas source
3660 molecular beam epitaxy",
3663 journal = "Applied Physics Letters",
3667 keywords = "SILICON CARBIDES; HOMOJUNCTIONS; MOLECULAR BEAM
3668 EPITAXY; TWINNING; RHEED; TEMPERATURE EFFECTS;
3669 INTERFACE STRUCTURE",
3670 URL = "http://link.aip.org/link/?APL/60/824/1",
3671 doi = "10.1063/1.107430",
3672 notes = "gas source mbe of 3c-sic on 6h-sic",
3675 @Article{yoshinobu90,
3676 title = "Atomic level control in gas source {MBE} growth of
3678 journal = "Journal of Crystal Growth",
3685 doi = "DOI: 10.1016/0022-0248(90)90575-6",
3686 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46YKT9W-HY/2/04dd57af2f42ee620895844e480a2736",
3687 author = "Tatsuo Yoshinobu and Michiaki Nakayama and Hiromu
3688 Shiomi and Takashi Fuyuki and Hiroyuki Matsunami",
3689 notes = "gas source mbe of 3c-sic on 3c-sic",
3693 title = "Atomic layer epitaxy controlled by surface
3694 superstructures in Si{C}",
3695 journal = "Thin Solid Films",
3702 doi = "DOI: 10.1016/0040-6090(93)90159-M",
3703 URL = "http://www.sciencedirect.com/science/article/B6TW0-46NY79X-40/2/c9675e1d8c4bcebc7ce7d06e44e14f1f",
3704 author = "Takashi Fuyuki and Tatsuo Yoshinobu and Hiroyuki
3706 notes = "gas source mbe of 3c-sic on 3c-sic, atomic layer
3711 title = "Microscopic mechanisms of accurate layer-by-layer
3712 growth of [beta]-Si{C}",
3713 journal = "Thin Solid Films",
3720 doi = "DOI: 10.1016/0040-6090(93)90162-I",
3721 URL = "http://www.sciencedirect.com/science/article/B6TW0-46NY79X-43/2/18694bfe0e75b1f29a3cf5f90d19987c",
3722 author = "Shiro Hara and T. Meguro and Y. Aoyagi and M. Kawai
3723 and S. Misawa and E. Sakuma and S. Yoshida",
3724 notes = "gas source mbe of 3c-sic on 3c-sic, atomic layer
3729 author = "Satoru Tanaka and R. Scott Kern and Robert F. Davis",
3731 title = "Effects of gas flow ratio on silicon carbide thin film
3732 growth mode and polytype formation during gas-source
3733 molecular beam epitaxy",
3736 journal = "Applied Physics Letters",
3739 pages = "2851--2853",
3740 keywords = "SILICON CARBIDES; MOLECULAR BEAM EPITAXY; RHEED;
3741 TRANSMISSION ELECTRON MICROSCOPY; MORPHOLOGY;
3742 NUCLEATION; COALESCENCE; SURFACE RECONSTRUCTION; GAS
3744 URL = "http://link.aip.org/link/?APL/65/2851/1",
3745 doi = "10.1063/1.112513",
3746 notes = "gas source mbe of 6h-sic on 6h-sic",
3750 author = "T. Fuyuki and T. Hatayama and H. Matsunami",
3751 title = "Heterointerface Control and Epitaxial Growth of
3752 3{C}-Si{C} on Si by Gas Source Molecular Beam Epitaxy",
3753 publisher = "WILEY-VCH Verlag",
3755 journal = "physica status solidi (b)",
3758 notes = "3c-sic heteroepitaxial growth on si by gsmbe, lower
3763 title = "Initial stage of Si{C} growth on Si(1 0 0) surface",
3764 journal = "Journal of Crystal Growth",
3771 doi = "DOI: 10.1016/S0022-0248(97)00391-6",
3772 URL = "http://www.sciencedirect.com/science/article/B6TJ6-3W8STD4-V/2/8de695de037d5e20b8326c4107547918",
3773 author = "T. Takaoka and H. Saito and Y. Igari and I. Kusunoki",
3774 keywords = "Reflection high-energy electron diffraction (RHEED)",
3775 keywords = "Scanning electron microscopy (SEM)",
3776 keywords = "Silicon carbide",
3777 keywords = "Silicon",
3778 keywords = "Island growth",
3779 notes = "lower temperature, 550-700",
3782 @Article{hatayama95,
3783 title = "Low-temperature heteroepitaxial growth of cubic Si{C}
3784 on Si using hydrocarbon radicals by gas source
3785 molecular beam epitaxy",
3786 journal = "Journal of Crystal Growth",
3793 doi = "DOI: 10.1016/0022-0248(95)80077-P",
3794 URL = "http://www.sciencedirect.com/science/article/B6TJ6-47RY2F6-1P/2/49acd5c4545dd9fd3486f70a6c25586e",
3795 author = "Tomoaki Hatayama and Yoichiro Tarui and Takashi Fuyuki
3796 and Hiroyuki Matsunami",