2 % bibliography database
5 @Article{schroedinger26,
6 author = "E. Schrödinger",
7 title = "Quantisierung als Eigenwertproblem",
8 journal = "Annalen der Physik",
11 publisher = "WILEY-VCH Verlag",
13 URL = "http://dx.doi.org/10.1002/andp.19263840404",
14 doi = "10.1002/andp.19263840404",
19 @Article{albe_sic_pot,
20 author = "Paul Erhart and Karsten Albe",
21 title = "Analytical potential for atomistic simulations of
22 silicon, carbon, and silicon carbide",
25 journal = "Phys. Rev. B",
31 notes = "alble reparametrization, analytical bond oder
33 keywords = "silicon; elemental semiconductors; carbon; silicon
34 compounds; wide band gap semiconductors; elasticity;
35 enthalpy; point defects; crystallographic shear; atomic
37 URL = "http://link.aps.org/abstract/PRB/v71/e035211",
38 doi = "10.1103/PhysRevB.71.035211",
42 title = "The role of thermostats in modeling vapor phase
43 condensation of silicon nanoparticles",
44 journal = "Applied Surface Science",
49 note = "EMRS 2003 Symposium F, Nanostructures from Clusters",
51 doi = "DOI: 10.1016/j.apsusc.2003.11.003",
52 URL = "http://www.sciencedirect.com/science/article/B6THY-4B957HV-8/2/b35dbe80a70d173f6f7a00dacbcbd738",
53 author = "Paul Erhart and Karsten Albe",
57 title = "Modeling the metal-semiconductor interaction:
58 Analytical bond-order potential for platinum-carbon",
59 author = "Karsten Albe and Kai Nordlund and Robert S. Averback",
60 journal = "Phys. Rev. B",
67 doi = "10.1103/PhysRevB.65.195124",
68 publisher = "American Physical Society",
69 notes = "derivation of albe bond order formalism",
73 title = "Vibrational absorption of carbon in silicon",
74 journal = "Journal of Physics and Chemistry of Solids",
81 doi = "DOI: 10.1016/0022-3697(65)90166-6",
82 URL = "http://www.sciencedirect.com/science/article/B6TXR-46RVGM8-1C/2/d50c4df37065a75517d63a04af18d667",
83 author = "R. C. Newman and J. B. Willis",
84 notes = "c impurity dissolved as substitutional c in si",
88 author = "J. A. Baker and T. N. Tucker and N. E. Moyer and R. C.
91 title = "Effect of Carbon on the Lattice Parameter of Silicon",
94 journal = "Journal of Applied Physics",
98 URL = "http://link.aip.org/link/?JAP/39/4365/1",
99 doi = "10.1063/1.1656977",
100 notes = "lattice contraction due to subst c",
104 title = "The solubility of carbon in pulled silicon crystals",
105 journal = "Journal of Physics and Chemistry of Solids",
108 pages = "1211--1219",
112 doi = "DOI: 10.1016/S0022-3697(71)80179-8",
113 URL = "http://www.sciencedirect.com/science/article/B6TXR-4PR80SS-D/2/ce21d10d2bb885b5641905883a618ff5",
114 author = "A. R. Bean and R. C. Newman",
115 notes = "experimental solubility data of carbon in silicon",
119 author = "M. A. Capano and R. J. Trew",
120 title = "Silicon Carbide Electronic Materials and Devices",
121 journal = "MRS Bull.",
128 author = "G. R. Fisher and P. Barnes",
129 title = "Towards a unified view of polytypism in silicon
131 journal = "Philos. Mag. B",
135 notes = "sic polytypes",
139 author = "R. K{\"{o}}gler and F. Eichhorn and J. R. Kaschny and
140 A. M{\"{u}}cklich and H. Reuther and W. Skorupa and C.
141 Serre and A. Perez-Rodriguez",
142 title = "Synthesis of nano-sized Si{C} precipitates in Si by
143 simultaneous dual-beam implantation of {C}+ and Si+
145 journal = "Appl. Phys. A: Mater. Sci. Process.",
150 URL = "http://www.springerlink.com/content/jr8xj33mqc5vpwwj/",
151 notes = "dual implantation, sic prec enhanced by vacancies,
152 precipitation by interstitial and substitutional
153 carbon, both mechanisms explained + refs",
157 title = "Carbon-mediated effects in silicon and in
158 silicon-related materials",
159 journal = "Materials Chemistry and Physics",
166 doi = "DOI: 10.1016/0254-0584(95)01673-I",
167 URL = "http://www.sciencedirect.com/science/article/B6TX4-3VR9V74-2/2/4ab972315eb79eaa76b55ffab5aed982",
168 author = "W. Skorupa and R. A. Yankov",
169 notes = "review of silicon carbon compound",
173 author = "P. S. de Laplace",
174 title = "Th\'eorie analytique des probabilit\'es",
175 series = "Oeuvres Compl\`etes de Laplace",
177 publisher = "Gauthier-Villars",
181 @Article{mattoni2007,
182 author = "A. {Mattoni} and M. {Ippolito} and L. {Colombo}",
183 title = "{Atomistic modeling of brittleness in covalent
185 journal = "Phys. Rev. B",
191 doi = "10.1103/PhysRevB.76.224103",
192 notes = "adopted tersoff potential for Si, C, Ge ad SiC;
193 longe(r)-range-interactions, brittle propagation of
194 fracture, more available potentials, universal energy
195 relation (uer), minimum range model (mrm)",
199 title = "Comparative study of silicon empirical interatomic
201 author = "H. Balamane and T. Halicioglu and W. A. Tiller",
202 journal = "Phys. Rev. B",
205 pages = "2250--2279",
209 doi = "10.1103/PhysRevB.46.2250",
210 publisher = "American Physical Society",
211 notes = "comparison of classical potentials for si",
215 title = "Stress relaxation in $a-Si$ induced by ion
217 author = "H. M. Urbassek M. Koster",
218 journal = "Phys. Rev. B",
221 pages = "11219--11224",
225 doi = "10.1103/PhysRevB.62.11219",
226 publisher = "American Physical Society",
227 notes = "virial derivation for 3-body tersoff potential",
230 @Article{breadmore99,
231 title = "Direct simulation of ion-beam-induced stressing and
232 amorphization of silicon",
233 author = "N. Gr\o{}nbech-Jensen K. M. Beardmore",
234 journal = "Phys. Rev. B",
237 pages = "12610--12616",
241 doi = "10.1103/PhysRevB.60.12610",
242 publisher = "American Physical Society",
243 notes = "virial derivation for 3-body tersoff potential",
247 title = "First-Principles Calculation of Stress",
248 author = "O. H. Nielsen and Richard M. Martin",
249 journal = "Phys. Rev. Lett.",
256 doi = "10.1103/PhysRevLett.50.697",
257 publisher = "American Physical Society",
258 notes = "generalization of virial theorem",
262 title = "Quantum-mechanical theory of stress and force",
263 author = "O. H. Nielsen and Richard M. Martin",
264 journal = "Phys. Rev. B",
267 pages = "3780--3791",
271 doi = "10.1103/PhysRevB.32.3780",
272 publisher = "American Physical Society",
273 notes = "dft virial stress and forces",
277 author = "Henri Moissan",
278 title = "Nouvelles recherches sur la météorité de Cañon
280 journal = "Comptes rendus de l'Académie des Sciences",
287 author = "Y. S. Park",
288 title = "Si{C} Materials and Devices",
289 publisher = "Academic Press",
290 address = "San Diego",
295 author = "Valeri F. Tsvetkov and R. C. Glass and D. Henshall and
296 Calvin H. Carter Jr. and D. Asbury",
297 title = "Si{C} Seeded Boule Growth",
298 journal = "Materials Science Forum",
302 notes = "modified lely process, micropipes",
306 title = "Computer {"}Experiments{"} on Classical Fluids. {I}.
307 Thermodynamical Properties of Lennard-Jones Molecules",
308 author = "Loup Verlet",
309 journal = "Phys. Rev.",
315 doi = "10.1103/PhysRev.159.98",
316 publisher = "American Physical Society",
317 notes = "velocity verlet integration algorithm equation of
321 @Article{berendsen84,
322 author = "H. J. C. Berendsen and J. P. M. Postma and W. F. van
323 Gunsteren and A. DiNola and J. R. Haak",
325 title = "Molecular dynamics with coupling to an external bath",
328 journal = "J. Chem. Phys.",
331 pages = "3684--3690",
332 keywords = "MOLECULAR DYNAMICS CALCULATION; TRANSPORT THEORY;
333 COMPUTERIZED SIMULATION; LIQUIDS; STRUCTURE FACTORS",
334 URL = "http://link.aip.org/link/?JCP/81/3684/1",
335 doi = "10.1063/1.448118",
336 notes = "berendsen thermostat barostat",
340 author = "Hanchen Huang and N M Ghoniem and J K Wong and M
342 title = "Molecular dynamics determination of defect energetics
343 in beta -Si{C} using three representative empirical
345 journal = "Modell. Simul. Mater. Sci. Eng.",
349 URL = "http://stacks.iop.org/0965-0393/3/615",
350 notes = "comparison of tersoff, pearson and eam for defect
351 energetics in sic; (m)eam parameters for sic",
356 title = "Relationship between the embedded-atom method and
358 author = "Donald W. Brenner",
359 journal = "Phys. Rev. Lett.",
366 doi = "10.1103/PhysRevLett.63.1022",
367 publisher = "American Physical Society",
368 notes = "relation of tersoff and eam potential",
372 title = "Molecular-dynamics study of self-interstitials in
374 author = "Inder P. Batra and Farid F. Abraham and S. Ciraci",
375 journal = "Phys. Rev. B",
378 pages = "9552--9558",
382 doi = "10.1103/PhysRevB.35.9552",
383 publisher = "American Physical Society",
384 notes = "selft-interstitials in silicon, stillinger-weber,
385 calculation of defect formation energy, defect
390 title = "Extended interstitials in silicon and germanium",
391 author = "H. R. Schober",
392 journal = "Phys. Rev. B",
395 pages = "13013--13015",
399 doi = "10.1103/PhysRevB.39.13013",
400 publisher = "American Physical Society",
401 notes = "stillinger-weber silicon 110 stable and metastable
402 dumbbell configuration",
406 title = "Cascade overlap and amorphization in $3{C}-Si{C}:$
407 Defect accumulation, topological features, and
409 author = "F. Gao and W. J. Weber",
410 journal = "Phys. Rev. B",
417 doi = "10.1103/PhysRevB.66.024106",
418 publisher = "American Physical Society",
419 notes = "sic intro, si cascade in 3c-sic, amorphization,
420 tersoff modified, pair correlation of amorphous sic, md
424 @Article{devanathan98,
425 title = "Computer simulation of a 10 ke{V} Si displacement
427 journal = "Nucl. Instrum. Methods Phys. Res. B",
433 doi = "DOI: 10.1016/S0168-583X(98)00084-6",
434 author = "R. Devanathan and W. J. Weber and T. Diaz de la
436 notes = "modified tersoff short range potential, ab initio
440 @Article{devanathan98_2,
441 title = "Displacement threshold energies in [beta]-Si{C}",
442 journal = "J. Nucl. Mater.",
448 doi = "DOI: 10.1016/S0022-3115(97)00304-8",
449 author = "R. Devanathan and T. Diaz de la Rubia and W. J.
451 notes = "modified tersoff, ab initio, combined ab initio
455 @Article{kitabatake00,
456 title = "Si{C}/Si heteroepitaxial growth",
457 author = "M. Kitabatake",
458 journal = "Thin Solid Films",
463 notes = "md simulation, sic si heteroepitaxy, mbe",
467 title = "Intrinsic point defects in crystalline silicon:
468 Tight-binding molecular dynamics studies of
469 self-diffusion, interstitial-vacancy recombination, and
471 author = "M. Tang and L. Colombo and J. Zhu and T. Diaz de la
473 journal = "Phys. Rev. B",
476 pages = "14279--14289",
480 doi = "10.1103/PhysRevB.55.14279",
481 publisher = "American Physical Society",
482 notes = "si self interstitial, diffusion, tbmd",
486 author = "M. D. Johnson and M.-J. Caturla and T. D\'{\i}az de la
489 title = "A kinetic Monte--Carlo study of the effective
490 diffusivity of the silicon self-interstitial in the
491 presence of carbon and boron",
494 journal = "J. Appl. Phys.",
497 pages = "1963--1967",
498 keywords = "MONTE CARLO METHOD; DIFFUSION; SILICON; INTERSTITIALS;
499 CARBON ADDITIONS; BORON ADDITIONS; elemental
500 semiconductors; self-diffusion",
501 URL = "http://link.aip.org/link/?JAP/84/1963/1",
502 doi = "10.1063/1.368328",
503 notes = "kinetic monte carlo of si self interstitial
508 title = "Barrier to Migration of the Silicon
510 author = "Y. Bar-Yam and J. D. Joannopoulos",
511 journal = "Phys. Rev. Lett.",
514 pages = "1129--1132",
518 doi = "10.1103/PhysRevLett.52.1129",
519 publisher = "American Physical Society",
520 notes = "si self-interstitial migration barrier",
523 @Article{bar-yam84_2,
524 title = "Electronic structure and total-energy migration
525 barriers of silicon self-interstitials",
526 author = "Y. Bar-Yam and J. D. Joannopoulos",
527 journal = "Phys. Rev. B",
530 pages = "1844--1852",
534 doi = "10.1103/PhysRevB.30.1844",
535 publisher = "American Physical Society",
539 title = "First-principles calculations of self-diffusion
540 constants in silicon",
541 author = "Peter E. Bl{\"o}chl and Enrico Smargiassi and R. Car
542 and D. B. Laks and W. Andreoni and S. T. Pantelides",
543 journal = "Phys. Rev. Lett.",
546 pages = "2435--2438",
550 doi = "10.1103/PhysRevLett.70.2435",
551 publisher = "American Physical Society",
552 notes = "si self int diffusion by ab initio md, formation
553 entropy calculations",
557 title = "Defect migration in crystalline silicon",
558 author = "Lindsey J. Munro and David J. Wales",
559 journal = "Phys. Rev. B",
562 pages = "3969--3980",
566 doi = "10.1103/PhysRevB.59.3969",
567 publisher = "American Physical Society",
568 notes = "eigenvector following method, vacancy and interstiial
569 defect migration mechanisms",
573 title = "Tight-binding theory of native point defects in
575 author = "L. Colombo",
576 journal = "Annu. Rev. Mater. Res.",
581 doi = "10.1146/annurev.matsci.32.111601.103036",
582 publisher = "Annual Reviews",
583 notes = "si self interstitial, tbmd, virial stress",
586 @Article{al-mushadani03,
587 title = "Free-energy calculations of intrinsic point defects in
589 author = "O. K. Al-Mushadani and R. J. Needs",
590 journal = "Phys. Rev. B",
597 doi = "10.1103/PhysRevB.68.235205",
598 publisher = "American Physical Society",
599 notes = "formation energies of intrinisc point defects in
600 silicon, si self interstitials, free energy",
603 @Article{goedecker02,
604 title = "A Fourfold Coordinated Point Defect in Silicon",
605 author = "Stefan Goedecker and Thierry Deutsch and Luc Billard",
606 journal = "Phys. Rev. Lett.",
613 doi = "10.1103/PhysRevLett.88.235501",
614 publisher = "American Physical Society",
615 notes = "first time ffcd, fourfold coordinated point defect in
620 title = "Ab initio molecular dynamics simulation of
621 self-interstitial diffusion in silicon",
622 author = "Beat Sahli and Wolfgang Fichtner",
623 journal = "Phys. Rev. B",
630 doi = "10.1103/PhysRevB.72.245210",
631 publisher = "American Physical Society",
632 notes = "si self int, diffusion, barrier height, voronoi
637 title = "Ab initio calculations of the interaction between
638 native point defects in silicon",
639 journal = "Mater. Sci. Eng., B",
644 note = "EMRS 2005, Symposium D - Materials Science and Device
645 Issues for Future Technologies",
647 doi = "DOI: 10.1016/j.mseb.2005.08.072",
648 URL = "http://www.sciencedirect.com/science/article/B6TXF-4H6PKRB-3/2/e217bd3d7ee1fffee899eeb4a2f133a4",
649 author = "G. Hobler and G. Kresse",
650 notes = "vasp intrinsic si defect interaction study, capture
655 title = "Ab initio study of self-diffusion in silicon over a
656 wide temperature range: Point defect states and
657 migration mechanisms",
658 author = "Shangyi Ma and Shaoqing Wang",
659 journal = "Phys. Rev. B",
666 doi = "10.1103/PhysRevB.81.193203",
667 publisher = "American Physical Society",
668 notes = "si self interstitial diffusion + refs",
672 title = "Atomistic simulations on the thermal stability of the
673 antisite pair in 3{C}- and 4{H}-Si{C}",
674 author = "M. Posselt and F. Gao and W. J. Weber",
675 journal = "Phys. Rev. B",
682 doi = "10.1103/PhysRevB.73.125206",
683 publisher = "American Physical Society",
687 title = "Correlation between self-diffusion in Si and the
688 migration mechanisms of vacancies and
689 self-interstitials: An atomistic study",
690 author = "M. Posselt and F. Gao and H. Bracht",
691 journal = "Phys. Rev. B",
698 doi = "10.1103/PhysRevB.78.035208",
699 publisher = "American Physical Society",
700 notes = "si self-interstitial and vacancy diffusion, stillinger
705 title = "Ab initio and empirical-potential studies of defect
706 properties in $3{C}-Si{C}$",
707 author = "F. Gao and E. J. Bylaska and W. J. Weber and L. R.
709 journal = "Phys. Rev. B",
716 doi = "10.1103/PhysRevB.64.245208",
717 publisher = "American Physical Society",
718 notes = "defects in 3c-sic",
722 title = "Empirical potential approach for defect properties in
724 journal = "Nucl. Instrum. Methods Phys. Res. B",
731 doi = "DOI: 10.1016/S0168-583X(02)00600-6",
732 URL = "http://www.sciencedirect.com/science/article/B6TJN-453NR6B-G/2/e65b0730e94e13d66f72a2147b449ea7",
733 author = "Fei Gao and William J. Weber",
734 keywords = "Empirical potential",
735 keywords = "Defect properties",
736 keywords = "Silicon carbide",
737 keywords = "Computer simulation",
738 notes = "sic potential, brenner type, like erhart/albe",
742 title = "Atomistic study of intrinsic defect migration in
744 author = "Fei Gao and William J. Weber and M. Posselt and V.
746 journal = "Phys. Rev. B",
753 doi = "10.1103/PhysRevB.69.245205",
754 publisher = "American Physical Society",
755 notes = "defect migration in sic",
759 author = "F. Gao and J. Du and E. J. Bylaska and M. Posselt and
762 title = "Ab Initio atomic simulations of antisite pair recovery
763 in cubic silicon carbide",
766 journal = "Appl. Phys. Lett.",
772 keywords = "ab initio calculations; silicon compounds; antisite
773 defects; wide band gap semiconductors; molecular
774 dynamics method; density functional theory;
775 electron-hole recombination; photoluminescence;
776 impurities; diffusion",
777 URL = "http://link.aip.org/link/?APL/90/221915/1",
778 doi = "10.1063/1.2743751",
781 @Article{mattoni2002,
782 title = "Self-interstitial trapping by carbon complexes in
783 crystalline silicon",
784 author = "A. Mattoni and F. Bernardini and L. Colombo",
785 journal = "Phys. Rev. B",
792 doi = "10.1103/PhysRevB.66.195214",
793 publisher = "American Physical Society",
794 notes = "c in c-si, diffusion, interstitial configuration +
795 links, interaction of carbon and silicon interstitials,
796 tersoff suitability",
800 title = "Calculations of Silicon Self-Interstitial Defects",
801 author = "W.-K. Leung and R. J. Needs and G. Rajagopal and S.
803 journal = "Phys. Rev. Lett.",
806 pages = "2351--2354",
810 doi = "10.1103/PhysRevLett.83.2351",
811 publisher = "American Physical Society",
812 notes = "nice images of the defects, si defect overview +
817 title = "Identification of the migration path of interstitial
819 author = "R. B. Capaz and A. {Dal Pino} and J. D. Joannopoulos",
820 journal = "Phys. Rev. B",
823 pages = "7439--7442",
827 doi = "10.1103/PhysRevB.50.7439",
828 publisher = "American Physical Society",
829 notes = "carbon interstitial migration path shown, 001 c-si
834 title = "Theory of carbon-carbon pairs in silicon",
835 author = "R. B. Capaz and A. {Dal Pino} and J. D. Joannopoulos",
836 journal = "Phys. Rev. B",
839 pages = "9845--9850",
843 doi = "10.1103/PhysRevB.58.9845",
844 publisher = "American Physical Society",
845 notes = "c_i c_s pair configuration, theoretical results",
849 title = "Bistable interstitial-carbon--substitutional-carbon
851 author = "L. W. Song and X. D. Zhan and B. W. Benson and G. D.
853 journal = "Phys. Rev. B",
856 pages = "5765--5783",
860 doi = "10.1103/PhysRevB.42.5765",
861 publisher = "American Physical Society",
862 notes = "c_i c_s pair configuration, experimental results",
866 author = "Chun-Li Liu and Wolfgang Windl and Len Borucki and
867 Shifeng Lu and Xiang-Yang Liu",
869 title = "Ab initio modeling and experimental study of {C}--{B}
873 journal = "Appl. Phys. Lett.",
877 keywords = "silicon; boron; carbon; elemental semiconductors;
878 impurity-defect interactions; ab initio calculations;
879 secondary ion mass spectra; diffusion; interstitials",
880 URL = "http://link.aip.org/link/?APL/80/52/1",
881 doi = "10.1063/1.1430505",
882 notes = "c-c 100 split, lower as a and b states of capaz",
886 title = "Ab initio investigation of carbon-related defects in
888 author = "A. {Dal Pino} and Andrew M. Rappe and J. D.
890 journal = "Phys. Rev. B",
893 pages = "12554--12557",
897 doi = "10.1103/PhysRevB.47.12554",
898 publisher = "American Physical Society",
899 notes = "c interstitials in crystalline silicon",
903 title = "Microscopic Theory of Atomic Diffusion Mechanisms in
905 author = "Roberto Car and Paul J. Kelly and Atsushi Oshiyama and
906 Sokrates T. Pantelides",
907 journal = "Phys. Rev. Lett.",
910 pages = "1814--1817",
914 doi = "10.1103/PhysRevLett.52.1814",
915 publisher = "American Physical Society",
916 notes = "microscopic theory diffusion silicon dft migration
921 title = "Unified Approach for Molecular Dynamics and
922 Density-Functional Theory",
923 author = "R. Car and M. Parrinello",
924 journal = "Phys. Rev. Lett.",
927 pages = "2471--2474",
931 doi = "10.1103/PhysRevLett.55.2471",
932 publisher = "American Physical Society",
933 notes = "car parrinello method, dft and md",
937 title = "Short-range order, bulk moduli, and physical trends in
938 c-$Si1-x$$Cx$ alloys",
939 author = "P. C. Kelires",
940 journal = "Phys. Rev. B",
943 pages = "8784--8787",
947 doi = "10.1103/PhysRevB.55.8784",
948 publisher = "American Physical Society",
949 notes = "c strained si, montecarlo md, bulk moduli, next
954 title = "Monte Carlo Studies of Ternary Semiconductor Alloys:
955 Application to the $Si1-x-yGexCy$ System",
956 author = "P. C. Kelires",
957 journal = "Phys. Rev. Lett.",
960 pages = "1114--1117",
964 doi = "10.1103/PhysRevLett.75.1114",
965 publisher = "American Physical Society",
966 notes = "mc md, strain compensation in si ge by c insertion",
970 title = "Low temperature electron irradiation of silicon
972 journal = "Solid State Communications",
979 doi = "DOI: 10.1016/0038-1098(70)90074-8",
980 URL = "http://www.sciencedirect.com/science/article/B6TVW-46MF8S4-156/2/5f4d9c189a3d97227fde9214195aa081",
981 author = "A. R. Bean and R. C. Newman",
985 author = "F. Durand and J. Duby",
986 affiliation = "EPM-Madylam, CNRS and INP Grenoble, France",
987 title = "Carbon solubility in solid and liquid silicon—{A}
988 review with reference to eutectic equilibrium",
989 journal = "Journal of Phase Equilibria",
990 publisher = "Springer New York",
992 keyword = "Chemistry and Materials Science",
996 URL = "http://dx.doi.org/10.1361/105497199770335956",
997 note = "10.1361/105497199770335956",
999 notes = "better c solubility limit in silicon",
1003 title = "{EPR} Observation of the Isolated Interstitial Carbon
1005 author = "G. D. Watkins and K. L. Brower",
1006 journal = "Phys. Rev. Lett.",
1009 pages = "1329--1332",
1013 doi = "10.1103/PhysRevLett.36.1329",
1014 publisher = "American Physical Society",
1015 notes = "epr observations of 100 interstitial carbon atom in
1020 title = "{EPR} identification of the single-acceptor state of
1021 interstitial carbon in silicon",
1022 author = "L. W. Song and G. D. Watkins",
1023 journal = "Phys. Rev. B",
1026 pages = "5759--5764",
1030 doi = "10.1103/PhysRevB.42.5759",
1031 publisher = "American Physical Society",
1032 notes = "carbon diffusion in silicon",
1036 author = "A K Tipping and R C Newman",
1037 title = "The diffusion coefficient of interstitial carbon in
1039 journal = "Semicond. Sci. Technol.",
1043 URL = "http://stacks.iop.org/0268-1242/2/315",
1045 notes = "diffusion coefficient of carbon interstitials in
1050 author = "Seiichi Isomae and Tsutomu Ishiba and Toshio Ando and
1053 title = "Annealing behavior of Me{V} implanted carbon in
1057 journal = "Journal of Applied Physics",
1060 pages = "3815--3820",
1061 keywords = "SILICON; ION IMPLANTATION; WAFERS; CARBON IONS; MEV
1062 RANGE 0110; TEM; SIMS; INFRARED SPECTRA; STRAINS; DEPTH
1064 URL = "http://link.aip.org/link/?JAP/74/3815/1",
1065 doi = "10.1063/1.354474",
1066 notes = "c at interstitial location for rt implantation in si",
1070 title = "Carbon incorporation into Si at high concentrations by
1071 ion implantation and solid phase epitaxy",
1072 author = "J. W. Strane and S. R. Lee and H. J. Stein and S. T.
1073 Picraux and J. K. Watanabe and J. W. Mayer",
1074 journal = "J. Appl. Phys.",
1079 doi = "10.1063/1.360806",
1080 notes = "strained silicon, carbon supersaturation",
1083 @Article{laveant2002,
1084 title = "Epitaxy of carbon-rich silicon with {MBE}",
1085 journal = "Mater. Sci. Eng., B",
1091 doi = "DOI: 10.1016/S0921-5107(01)00794-2",
1092 URL = "http://www.sciencedirect.com/science/article/B6TXF-44YVPGS-1V/2/024ece074ad18ebbec62a39a2510a268",
1093 author = "P. Lav\'eant and G. Gerth and P. Werner and U.
1095 notes = "low c in si, tensile stress to compensate compressive
1096 stress, avoid sic precipitation",
1100 title = "The formation of swirl defects in silicon by
1101 agglomeration of self-interstitials",
1102 journal = "Journal of Crystal Growth",
1109 doi = "DOI: 10.1016/0022-0248(77)90034-3",
1110 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46BWB4Y-44/2/bddfd69e99369473feebcdc41692dddb",
1111 author = "H. Föll and U. Gösele and B. O. Kolbesen",
1112 notes = "b-swirl: si + c interstitial agglomerates, c-si
1117 title = "Microdefects in silicon and their relation to point
1119 journal = "Journal of Crystal Growth",
1126 doi = "DOI: 10.1016/0022-0248(81)90397-3",
1127 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46MD42X-90/2/a482c31bf9e2faeed71b7109be601078",
1128 author = "H. Föll and U. Gösele and B. O. Kolbesen",
1129 notes = "swirl review",
1133 author = "P. Werner and S. Eichler and G. Mariani and R.
1134 K{\"{o}}gler and W. Skorupa",
1135 title = "Investigation of {C}[sub x]Si defects in {C} implanted
1136 silicon by transmission electron microscopy",
1139 journal = "Appl. Phys. Lett.",
1143 keywords = "silicon; ion implantation; carbon; crystal defects;
1144 transmission electron microscopy; annealing; positron
1145 annihilation; secondary ion mass spectroscopy; buried
1146 layers; precipitation",
1147 URL = "http://link.aip.org/link/?APL/70/252/1",
1148 doi = "10.1063/1.118381",
1149 notes = "si-c complexes, agglomerate, sic in si matrix, sic
1153 @InProceedings{werner96,
1154 author = "P. Werner and R. K{\"{o}}gler and W. Skorupa and D.
1156 booktitle = "Ion Implantation Technology. Proceedings of the 11th
1157 International Conference on",
1158 title = "{TEM} investigation of {C}-Si defects in carbon
1165 doi = "10.1109/IIT.1996.586497",
1167 notes = "c-si agglomerates dumbbells",
1171 author = "P. Werner and U. G{\"{o}}sele and H.-J. Gossmann and
1174 title = "Carbon diffusion in silicon",
1177 journal = "Appl. Phys. Lett.",
1180 pages = "2465--2467",
1181 keywords = "silicon; carbon; elemental semiconductors; diffusion;
1182 secondary ion mass spectra; semiconductor epitaxial
1183 layers; annealing; impurity-defect interactions;
1184 impurity distribution",
1185 URL = "http://link.aip.org/link/?APL/73/2465/1",
1186 doi = "10.1063/1.122483",
1187 notes = "c diffusion in si, kick out mechnism",
1191 author = "J. P. Kalejs and L. A. Ladd and U. G{\"{o}}sele",
1193 title = "Self-interstitial enhanced carbon diffusion in
1197 journal = "Applied Physics Letters",
1201 keywords = "PHOSPHORUS; INTERSTITIALS; SILICON; PHOSPHORUS;
1202 CARBON; DIFFUSION; ANNEALING; ATOM TRANSPORT; VERY HIGH
1203 TEMPERATURE; IMPURITIES",
1204 URL = "http://link.aip.org/link/?APL/45/268/1",
1205 doi = "10.1063/1.95167",
1206 notes = "c diffusion due to si self-interstitials",
1210 author = "Akira Fukami and Ken-ichi Shoji and Takahiro Nagano
1213 title = "Characterization of SiGe/Si heterostructures formed by
1214 Ge[sup + ] and {C}[sup + ] implantation",
1217 journal = "Applied Physics Letters",
1220 pages = "2345--2347",
1221 keywords = "HETEROJUNCTIONS; ION IMPLANTATION; HETEROSTRUCTURES;
1222 FABRICATION; PN JUNCTIONS; LEAKAGE CURRENT; GERMANIUM
1223 SILICIDES; SILICON; ELECTRICAL PROPERTIES; SOLIDPHASE
1224 EPITAXY; CARBON IONS; GERMANIUM IONS",
1225 URL = "http://link.aip.org/link/?APL/57/2345/1",
1226 doi = "10.1063/1.103888",
1230 author = "J. W. Strane and H. J. Stein and S. R. Lee and B. L.
1231 Doyle and S. T. Picraux and J. W. Mayer",
1233 title = "Metastable SiGe{C} formation by solid phase epitaxy",
1236 journal = "Applied Physics Letters",
1239 pages = "2786--2788",
1240 keywords = "SILICON CARBIDES; GERMANIUM CARBIDES; TERNARY ALLOY
1241 SYSTEMS; EPITAXY; ION IMPLANTATION; METASTABLE STATES;
1242 ANNEALING; TRANSMISSION ELECTRON MICROSCOPY; RUTHERFORD
1243 SCATTERING; XRAY DIFFRACTION; STRAINS; SOLIDPHASE
1244 EPITAXY; AMORPHIZATION",
1245 URL = "http://link.aip.org/link/?APL/63/2786/1",
1246 doi = "10.1063/1.110334",
1250 author = "M. S. Goorsky and S. S. Iyer and K. Eberl and F.
1251 Legoues and J. Angilello and F. Cardone",
1253 title = "Thermal stability of Si[sub 1 - x]{C}[sub x]/Si
1254 strained layer superlattices",
1257 journal = "Applied Physics Letters",
1260 pages = "2758--2760",
1261 keywords = "SILICON ALLOYS; CARBON ALLOYS; BINARY ALLOYS;
1262 MOLECULAR BEAM EPITAXY; SUPERLATTICES; ANNEALING;
1263 CHEMICAL COMPOSITION; INTERNAL STRAINS; STRESS
1264 RELAXATION; THERMAL INSTABILITIES; INTERFACE STRUCTURE;
1265 DIFFUSION; PRECIPITATION; TEMPERATURE EFFECTS",
1266 URL = "http://link.aip.org/link/?APL/60/2758/1",
1267 doi = "10.1063/1.106868",
1271 author = "J. W. Strane and H. J. Stein and S. R. Lee and S. T.
1272 Picraux and J. K. Watanabe and J. W. Mayer",
1274 title = "Precipitation and relaxation in strained Si[sub 1 -
1275 y]{C}[sub y]/Si heterostructures",
1278 journal = "J. Appl. Phys.",
1281 pages = "3656--3668",
1282 keywords = "SILICON CARBIDES; SILICON; PRECIPITATION; STRAINS",
1283 URL = "http://link.aip.org/link/?JAP/76/3656/1",
1284 doi = "10.1063/1.357429",
1285 notes = "strained si-c to 3c-sic, carbon nucleation + refs,
1286 precipitation by substitutional carbon, coherent prec,
1287 coherent to incoherent transition strain vs interface
1292 author = "G. G. Fischer and P. Zaumseil and E. Bugiel and H. J.
1295 title = "Investigation of the high temperature behavior of
1296 strained Si[sub 1 - y]{C}[sub y] /Si heterostructures",
1299 journal = "J. Appl. Phys.",
1302 pages = "1934--1937",
1303 keywords = "SILICON CARBIDES; SILICON; HETEROSTRUCTURES; STRAINS;
1304 XRD; MOLECULAR BEAM EPITAXY; STABILITY; TENSILE
1305 PROPERTIES; EPITAXIAL LAYERS; ANNEALING; PRECIPITATION;
1306 TEMPERATURE RANGE 04001000 K",
1307 URL = "http://link.aip.org/link/?JAP/77/1934/1",
1308 doi = "10.1063/1.358826",
1312 title = "Prospects for device implementation of wide band gap
1314 author = "J. H. Edgar",
1315 journal = "J. Mater. Res.",
1320 doi = "10.1557/JMR.1992.0235",
1321 notes = "properties wide band gap semiconductor, sic
1325 @Article{zirkelbach2007,
1326 title = "Monte Carlo simulation study of a selforganisation
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1328 author = "F. Zirkelbach and M. H{\"a}berlen and J. K. N. Lindner
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1342 @Article{zirkelbach2006,
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1346 author = "F. Zirkelbach and M. H{\"a}berlen and J. K. N. Lindner
1348 journal = "Nucl. Instr. and Meth. B",
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1364 author = "F. Zirkelbach and M. H{\"a}berlen and J. K. N. Lindner
1366 journal = "Comp. Mater. Sci.",
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1378 @Article{zirkelbach09,
1379 title = "Molecular dynamics simulation of defect formation and
1380 precipitation in heavily carbon doped silicon",
1381 journal = "Mater. Sci. Eng., B",
1386 note = "EMRS 2008 Spring Conference Symposium K: Advanced
1387 Silicon Materials Research for Electronic and
1388 Photovoltaic Applications",
1390 doi = "DOI: 10.1016/j.mseb.2008.10.010",
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1395 keywords = "Carbon",
1396 keywords = "Silicon carbide",
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1406 K. N. Lindner and W. G. Schmidt and E. Rauls",
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1418 @Article{zirkelbach11a,
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1426 author = "F. Zirkelbach and B. Stritzker and J. K. N. Lindner
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1430 @Article{zirkelbach11b,
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1442 author = "J. K. N. Lindner and A. Frohnwieser and B.
1443 Rauschenbach and B. Stritzker",
1444 title = "ke{V}- and Me{V}- Ion Beam Synthesis of Buried Si{C}
1446 journal = "MRS Online Proceedings Library",
1451 doi = "10.1557/PROC-354-171",
1452 URL = "http://dx.doi.org/10.1557/PROC-354-171",
1453 eprint = "http://journals.cambridge.org/article_S1946427400420853",
1454 notes = "first time ibs at moderate temperatures",
1458 title = "Formation of buried epitaxial silicon carbide layers
1459 in silicon by ion beam synthesis",
1460 journal = "Materials Chemistry and Physics",
1467 doi = "DOI: 10.1016/S0254-0584(97)80008-9",
1468 URL = "http://www.sciencedirect.com/science/article/B6TX4-3VSGY9S-8/2/f001f23c0b3bc0fc3fc683616588fbc7",
1469 author = "J. K. N. Lindner and K. Volz and U. Preckwinkel and B.
1470 Götz and A. Frohnwieser and B. Rauschenbach and B.
1472 notes = "dose window",
1475 @Article{calcagno96,
1476 title = "Carbon clustering in Si[sub 1-x]{C}[sub x] formed by
1478 journal = "Nuclear Instruments and Methods in Physics Research
1479 Section B: Beam Interactions with Materials and Atoms",
1484 note = "Proceedings of the E-MRS '96 Spring Meeting Symp. I on
1485 New Trends in Ion Beam Processing of Materials",
1487 doi = "DOI: 10.1016/S0168-583X(96)00492-2",
1488 URL = "http://www.sciencedirect.com/science/article/B6TJN-3VSHB0W-1S/2/164b9f4f972a02f44b341b0de28bba1d",
1489 author = "L. Calcagno and G. Compagnini and G. Foti and M. G.
1490 Grimaldi and P. Musumeci",
1491 notes = "dose window, graphitic bonds",
1495 title = "Mechanisms of Si{C} Formation in the Ion Beam
1496 Synthesis of 3{C}-Si{C} Layers in Silicon",
1497 journal = "Materials Science Forum",
1502 doi = "10.4028/www.scientific.net/MSF.264-268.215",
1503 URL = "http://www.scientific.net/MSF.264-268.215",
1504 author = "J. K. N. Lindner and W. Reiber and B. Stritzker",
1505 notes = "intermediate temperature for sharp interface + good
1510 title = "Controlling the density distribution of Si{C}
1511 nanocrystals for the ion beam synthesis of buried Si{C}
1513 journal = "Nucl. Instrum. Methods Phys. Res. B",
1520 doi = "DOI: 10.1016/S0168-583X(98)00598-9",
1521 URL = "http://www.sciencedirect.com/science/article/B6TJN-3YMWWDY-1H/2/ad53e614f783b2a7474aecb936dd0169",
1522 author = "J. K. N. Lindner and B. Stritzker",
1523 notes = "two-step implantation process",
1526 @Article{lindner99_2,
1527 title = "Mechanisms in the ion beam synthesis of Si{C} layers
1529 journal = "Nucl. Instrum. Methods Phys. Res. B",
1535 doi = "DOI: 10.1016/S0168-583X(98)00787-3",
1536 URL = "http://www.sciencedirect.com/science/article/B6TJN-3XGFSSH-3H/2/17d138baa6db68cb279e6de9161e5f85",
1537 author = "J. K. N. Lindner and B. Stritzker",
1538 notes = "3c-sic precipitation model, c-si dimers (dumbbells)",
1542 title = "Ion beam synthesis of buried Si{C} layers in silicon:
1543 Basic physical processes",
1544 journal = "Nucl. Instrum. Methods Phys. Res. B",
1551 doi = "DOI: 10.1016/S0168-583X(01)00504-3",
1552 URL = "http://www.sciencedirect.com/science/article/B6TJN-435KG96-8/2/f222574d8945c3fd7aaf9ae1efdd37b3",
1553 author = "J{\"{o}}rg K. N. Lindner",
1557 title = "High-dose carbon implantations into silicon:
1558 fundamental studies for new technological tricks",
1559 author = "J. K. N. Lindner",
1560 journal = "Appl. Phys. A",
1564 doi = "10.1007/s00339-002-2062-8",
1565 notes = "ibs, burried sic layers",
1569 title = "On the balance between ion beam induced nanoparticle
1570 formation and displacive precipitate resolution in the
1572 journal = "Mater. Sci. Eng., C",
1577 note = "Current Trends in Nanoscience - from Materials to
1580 doi = "DOI: 10.1016/j.msec.2005.09.099",
1581 URL = "http://www.sciencedirect.com/science/article/B6TXG-4HSXVVM-1/2/5b0e351198cc2e8f5f4446a80a73d04a",
1582 author = "J. K. N. Lindner and M. H{\"a}berlen and G. Thorwarth
1584 notes = "c int diffusion barrier",
1588 title = "Ion beam synthesis of 3{C}-Si{C} layers in Si and its
1589 application in buffer layer for Ga{N} epitaxial
1591 journal = "Applied Surface Science",
1596 note = "APHYS'03 Special Issue",
1598 doi = "DOI: 10.1016/j.apsusc.2004.05.199",
1599 URL = "http://www.sciencedirect.com/science/article/B6THY-4CTTNGX-B/2/d24ee637db87f3f1a6ef7fe6820f267c",
1600 author = "Y. Ito and T. Yamauchi and A. Yamamoto and M. Sasase
1601 and S. Nishio and K. Yasuda and Y. Ishigami",
1602 notes = "gan on 3c-sic, focus on ibs of 3c-sic",
1605 @Article{yamamoto04,
1606 title = "Organometallic vapor phase epitaxial growth of Ga{N}
1607 on a 3c-Si{C}/Si(1 1 1) template formed by {C}+-ion
1608 implantation into Si(1 1 1) substrate",
1609 journal = "Journal of Crystal Growth",
1614 note = "Proceedings of the 11th Biennial (US) Workshop on
1615 Organometallic Vapor Phase Epitaxy (OMVPE)",
1617 doi = "DOI: 10.1016/j.jcrysgro.2003.11.041",
1618 URL = "http://www.sciencedirect.com/science/article/B6TJ6-4B5BFSX-2/2/55e79e024f2a23b487d19c6fd8dbf166",
1619 author = "A. Yamamoto and T. Yamauchi and T. Tanikawa and M.
1620 Sasase and B. K. Ghosh and A. Hashimoto and Y. Ito",
1621 notes = "gan on 3c-sic",
1625 title = "Substrates for gallium nitride epitaxy",
1626 journal = "Materials Science and Engineering: R: Reports",
1633 doi = "DOI: 10.1016/S0927-796X(02)00008-6",
1634 URL = "http://www.sciencedirect.com/science/article/B6TXH-45DFBSV-2/2/38c47e77fa91f23f8649a044e7135401",
1635 author = "L. Liu and J. H. Edgar",
1636 notes = "gan substrates",
1639 @Article{takeuchi91,
1640 title = "Growth of single crystalline Ga{N} film on Si
1641 substrate using 3{C}-Si{C} as an intermediate layer",
1642 journal = "Journal of Crystal Growth",
1649 doi = "DOI: 10.1016/0022-0248(91)90817-O",
1650 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46FJ525-TY/2/7bb50016a50b1dd1dbc36b43c46b3140",
1651 author = "Tetsuya Takeuchi and Hiroshi Amano and Kazumasa
1652 Hiramatsu and Nobuhiko Sawaki and Isamu Akasaki",
1653 notes = "gan on 3c-sic (first time?)",
1657 author = "B. J. Alder and T. E. Wainwright",
1658 title = "Phase Transition for a Hard Sphere System",
1661 journal = "J. Chem. Phys.",
1664 pages = "1208--1209",
1665 URL = "http://link.aip.org/link/?JCP/27/1208/1",
1666 doi = "10.1063/1.1743957",
1670 author = "B. J. Alder and T. E. Wainwright",
1671 title = "Studies in Molecular Dynamics. {I}. General Method",
1674 journal = "J. Chem. Phys.",
1678 URL = "http://link.aip.org/link/?JCP/31/459/1",
1679 doi = "10.1063/1.1730376",
1682 @Article{horsfield96,
1683 title = "Bond-order potentials: Theory and implementation",
1684 author = "A. P. Horsfield and A. M. Bratkovsky and M. Fearn and
1685 D. G. Pettifor and M. Aoki",
1686 journal = "Phys. Rev. B",
1689 pages = "12694--12712",
1693 doi = "10.1103/PhysRevB.53.12694",
1694 publisher = "American Physical Society",
1698 title = "Empirical chemical pseudopotential theory of molecular
1699 and metallic bonding",
1700 author = "G. C. Abell",
1701 journal = "Phys. Rev. B",
1704 pages = "6184--6196",
1708 doi = "10.1103/PhysRevB.31.6184",
1709 publisher = "American Physical Society",
1712 @Article{tersoff_si1,
1713 title = "New empirical model for the structural properties of
1715 author = "J. Tersoff",
1716 journal = "Phys. Rev. Lett.",
1723 doi = "10.1103/PhysRevLett.56.632",
1724 publisher = "American Physical Society",
1728 title = "Development of a many-body Tersoff-type potential for
1730 author = "Brian W. Dodson",
1731 journal = "Phys. Rev. B",
1734 pages = "2795--2798",
1738 doi = "10.1103/PhysRevB.35.2795",
1739 publisher = "American Physical Society",
1742 @Article{tersoff_si2,
1743 title = "New empirical approach for the structure and energy of
1745 author = "J. Tersoff",
1746 journal = "Phys. Rev. B",
1749 pages = "6991--7000",
1753 doi = "10.1103/PhysRevB.37.6991",
1754 publisher = "American Physical Society",
1757 @Article{tersoff_si3,
1758 title = "Empirical interatomic potential for silicon with
1759 improved elastic properties",
1760 author = "J. Tersoff",
1761 journal = "Phys. Rev. B",
1764 pages = "9902--9905",
1768 doi = "10.1103/PhysRevB.38.9902",
1769 publisher = "American Physical Society",
1773 title = "Empirical Interatomic Potential for Carbon, with
1774 Applications to Amorphous Carbon",
1775 author = "J. Tersoff",
1776 journal = "Phys. Rev. Lett.",
1779 pages = "2879--2882",
1783 doi = "10.1103/PhysRevLett.61.2879",
1784 publisher = "American Physical Society",
1788 title = "Modeling solid-state chemistry: Interatomic potentials
1789 for multicomponent systems",
1790 author = "J. Tersoff",
1791 journal = "Phys. Rev. B",
1794 pages = "5566--5568",
1798 doi = "10.1103/PhysRevB.39.5566",
1799 publisher = "American Physical Society",
1803 title = "Carbon defects and defect reactions in silicon",
1804 author = "J. Tersoff",
1805 journal = "Phys. Rev. Lett.",
1808 pages = "1757--1760",
1812 doi = "10.1103/PhysRevLett.64.1757",
1813 publisher = "American Physical Society",
1817 title = "Point defects and dopant diffusion in silicon",
1818 author = "P. M. Fahey and P. B. Griffin and J. D. Plummer",
1819 journal = "Rev. Mod. Phys.",
1826 doi = "10.1103/RevModPhys.61.289",
1827 publisher = "American Physical Society",
1831 title = "Silicon carbide: synthesis and processing",
1832 journal = "Nucl. Instrum. Methods Phys. Res. B",
1837 note = "Radiation Effects in Insulators",
1839 doi = "DOI: 10.1016/0168-583X(96)00065-1",
1840 URL = "http://www.sciencedirect.com/science/article/B6TJN-3VXHNFT-C7/2/4216cb1ec9e422c22de5fed7360fb06e",
1841 author = "W. Wesch",
1845 author = "R. F. Davis and G. Kelner and M. Shur and J. W.
1846 Palmour and J. A. Edmond",
1847 journal = "Proceedings of the IEEE",
1848 title = "Thin film deposition and microelectronic and
1849 optoelectronic device fabrication and characterization
1850 in monocrystalline alpha and beta silicon carbide",
1856 keywords = "HBT;LED;MESFET;MOSFET;Schottky contacts;Schottky
1857 diode;SiC;dry etching;electrical
1858 contacts;etching;impurity incorporation;optoelectronic
1859 device fabrication;solid-state devices;surface
1860 chemistry;Schottky effect;Schottky gate field effect
1861 transistors;Schottky-barrier
1862 diodes;etching;heterojunction bipolar
1863 transistors;insulated gate field effect
1864 transistors;light emitting diodes;semiconductor
1865 materials;semiconductor thin films;silicon compounds;",
1866 doi = "10.1109/5.90132",
1868 notes = "sic growth methods",
1872 author = "H. Morko\c{c} and S. Strite and G. B. Gao and M. E.
1873 Lin and B. Sverdlov and M. Burns",
1875 title = "Large-band-gap Si{C}, {III}-{V} nitride, and {II}-{VI}
1876 ZnSe-based semiconductor device technologies",
1879 journal = "J. Appl. Phys.",
1882 pages = "1363--1398",
1883 keywords = "SEMICONDUCTOR DEVICES; SILICON CARBIDES; GALLIUM
1884 NITRIDES; ZINC SELENIDES; SUBSTRATES; MOS JUNCTIONS;
1885 LASER MATERIALS; MATERIALS; REVIEWS; ENERGY GAP; THIN
1887 URL = "http://link.aip.org/link/?JAP/76/1363/1",
1888 doi = "10.1063/1.358463",
1889 notes = "sic intro, properties",
1893 author = "Noch Unbekannt",
1894 title = "How to find references",
1895 journal = "Journal of Applied References",
1902 title = "Atomistic simulation of thermomechanical properties of
1904 author = "Meijie Tang and Sidney Yip",
1905 journal = "Phys. Rev. B",
1908 pages = "15150--15159",
1911 doi = "10.1103/PhysRevB.52.15150",
1912 notes = "modified tersoff, scale cutoff with volume, promising
1913 tersoff reparametrization",
1914 publisher = "American Physical Society",
1918 title = "Silicon carbide as a new {MEMS} technology",
1919 journal = "Sensors and Actuators A: Physical",
1925 doi = "DOI: 10.1016/S0924-4247(99)00335-0",
1926 URL = "http://www.sciencedirect.com/science/article/B6THG-406VM55-13/2/75385a587669b215d9ef88029a93fd59",
1927 author = "Pasqualina M. Sarro",
1929 keywords = "Silicon carbide",
1930 keywords = "Micromachining",
1931 keywords = "Mechanical stress",
1935 title = "Status of silicon carbide (Si{C}) as a wide-bandgap
1936 semiconductor for high-temperature applications: {A}
1938 journal = "Solid-State Electronics",
1941 pages = "1409--1422",
1944 doi = "DOI: 10.1016/0038-1101(96)00045-7",
1945 URL = "http://www.sciencedirect.com/science/article/B6TY5-3VSR9J0-1/2/a871c11636e937dc45bfdf48e29f725b",
1946 author = "J. B. Casady and R. W. Johnson",
1947 notes = "sic intro",
1950 @Article{giancarli98,
1951 title = "Design requirements for Si{C}/Si{C} composites
1952 structural material in fusion power reactor blankets",
1953 journal = "Fusion Engineering and Design",
1959 doi = "DOI: 10.1016/S0920-3796(97)00200-7",
1960 URL = "http://www.sciencedirect.com/science/article/B6V3C-3V8RYK8-T/2/16949194114900fd1330f79892d7a7be",
1961 author = "L. Giancarli and J. P. Bonal and A. Caso and G. Le
1962 Marois and N. B. Morley and J. F. Salavy",
1966 title = "Electrical and optical characterization of Si{C}",
1967 journal = "Physica B: Condensed Matter",
1973 doi = "DOI: 10.1016/0921-4526(93)90249-6",
1974 URL = "http://www.sciencedirect.com/science/article/B6TVH-46G8HRX-99/2/eab9398bf2bbf10df3ae42c2ab28a776",
1975 author = "G. Pensl and W. J. Choyke",
1979 title = "Investigation of growth processes of ingots of silicon
1980 carbide single crystals",
1981 journal = "J. Cryst. Growth",
1986 notes = "modified lely process",
1988 doi = "DOI: 10.1016/0022-0248(78)90169-0",
1989 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46BY2NR-7S/2/fa6fee78ebd8322491f6366e72d5b6dc",
1990 author = "Yu. M. Tairov and V. F. Tsvetkov",
1994 title = "General principles of growing large-size single
1995 crystals of various silicon carbide polytypes",
1996 journal = "Journal of Crystal Growth",
2003 doi = "DOI: 10.1016/0022-0248(81)90184-6",
2004 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46FVMF6-2Y/2/b7c4025f0ef07ceec37fbd596819d529",
2005 author = "Yu.M. Tairov and V. F. Tsvetkov",
2009 title = "Si{C} boule growth by sublimation vapor transport",
2010 journal = "Journal of Crystal Growth",
2017 doi = "DOI: 10.1016/0022-0248(91)90152-U",
2018 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46FJ4VX-KF/2/fb802a6d67a8074a672007e972b264e1",
2019 author = "D. L. Barrett and R. G. Seidensticker and W. Gaida and
2020 R. H. Hopkins and W. J. Choyke",
2024 title = "Growth of large Si{C} single crystals",
2025 journal = "Journal of Crystal Growth",
2032 doi = "DOI: 10.1016/0022-0248(93)90348-Z",
2033 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46YKSGB-4D/2/bc26617f48735a9ffbf5c61a5e164d9c",
2034 author = "D. L. Barrett and J. P. McHugh and H. M. Hobgood and
2035 R. H. Hopkins and P. G. McMullin and R. C. Clarke and
2040 title = "Control of polytype formation by surface energy
2041 effects during the growth of Si{C} monocrystals by the
2042 sublimation method",
2043 journal = "Journal of Crystal Growth",
2050 doi = "DOI: 10.1016/0022-0248(93)90397-F",
2051 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46FX1XJ-1X/2/493b180c29103dba5dba351e0fae5b9d",
2052 author = "R. A. Stein and P. Lanig",
2053 notes = "6h and 4h, sublimation technique",
2057 author = "Shigehiro Nishino and J. Anthony Powell and Herbert A.
2060 title = "Production of large-area single-crystal wafers of
2061 cubic Si{C} for semiconductor devices",
2064 journal = "Appl. Phys. Lett.",
2068 keywords = "silicon carbides; layers; chemical vapor deposition;
2070 URL = "http://link.aip.org/link/?APL/42/460/1",
2071 doi = "10.1063/1.93970",
2072 notes = "cvd of 3c-sic on si, sic buffer layer",
2076 author = "Shigehiro Nishino and Hajime Suhara and Hideyuki Ono
2077 and Hiroyuki Matsunami",
2079 title = "Epitaxial growth and electric characteristics of cubic
2083 journal = "J. Appl. Phys.",
2086 pages = "4889--4893",
2087 URL = "http://link.aip.org/link/?JAP/61/4889/1",
2088 doi = "10.1063/1.338355",
2089 notes = "cvd of 3c-sic on si, sic buffer layer, first time
2094 author = "J. Anthony Powell and Lawrence G. Matus and Maria A.
2096 title = "Growth and Characterization of Cubic Si{C}
2097 Single-Crystal Films on Si",
2100 journal = "Journal of The Electrochemical Society",
2103 pages = "1558--1565",
2104 keywords = "semiconductor materials; silicon compounds; carbon
2105 compounds; crystal morphology; electron mobility",
2106 URL = "http://link.aip.org/link/?JES/134/1558/1",
2107 doi = "10.1149/1.2100708",
2108 notes = "blue light emitting diodes (led)",
2111 @Article{powell87_2,
2112 author = "J. A. Powell and L. G. Matus and M. A. Kuczmarski and
2113 C. M. Chorey and T. T. Cheng and P. Pirouz",
2115 title = "Improved beta-Si{C} heteroepitaxial films using
2116 off-axis Si substrates",
2119 journal = "Applied Physics Letters",
2123 keywords = "VAPOR PHASE EPITAXY; SILICON CARBIDES; VAPOR DEPOSITED
2124 COATINGS; SILICON; EPITAXIAL LAYERS; INTERFACE
2125 STRUCTURE; SURFACE STRUCTURE; FILM GROWTH; STACKING
2126 FAULTS; CRYSTAL DEFECTS; ANTIPHASE BOUNDARIES;
2127 OXIDATION; CHEMICAL VAPOR DEPOSITION; ROUGHNESS",
2128 URL = "http://link.aip.org/link/?APL/51/823/1",
2129 doi = "10.1063/1.98824",
2130 notes = "improved sic on off-axis si substrates, reduced apbs",
2134 title = "Crystal growth of Si{C} by step-controlled epitaxy",
2135 journal = "Journal of Crystal Growth",
2142 doi = "DOI: 10.1016/0022-0248(90)90013-B",
2143 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46CC6CX-KN/2/d5184c7bd29063985f7d1dd4112b12c9",
2144 author = "Tetsuzo Ueda and Hironori Nishino and Hiroyuki
2146 notes = "step-controlled epitaxy model",
2150 author = "Tsunenobu Kimoto and Hironori Nishino and Woo Sik Yoo
2151 and Hiroyuki Matsunami",
2152 title = "Growth mechanism of 6{H}-Si{C} in step-controlled
2156 journal = "J. Appl. Phys.",
2160 keywords = "SILICON CARBIDES; EPITAXY; GROWTH RATE; TEMPERATURE
2161 RANGE 10004000 K; TWINNING; ACTIVATION ENERGY; CHEMICAL
2163 URL = "http://link.aip.org/link/?JAP/73/726/1",
2164 doi = "10.1063/1.353329",
2165 notes = "cvd of 6h-sic on 6h-sic, twinned 3c-sic",
2168 @Article{powell90_2,
2169 author = "J. A. Powell and D. J. Larkin and L. G. Matus and W.
2170 J. Choyke and J. L. Bradshaw and L. Henderson and M.
2171 Yoganathan and J. Yang and P. Pirouz",
2173 title = "Growth of high quality 6{H}-Si{C} epitaxial films on
2174 vicinal (0001) 6{H}-Si{C} wafers",
2177 journal = "Applied Physics Letters",
2180 pages = "1442--1444",
2181 keywords = "SILICON CARBIDES; CHEMICAL VAPOR DEPOSITION; SORPTIVE
2182 PROPERTIES; WAFERS; CARRIER DENSITY; CARRIER MOBILITY;
2183 TRANSMISSION ELECTRON MICROSCOPY; CRYSTAL DEFECTS;
2184 DISLOCATIONS; PHOTOLUMINESCENCE; VAPOR PHASE EPITAXY",
2185 URL = "http://link.aip.org/link/?APL/56/1442/1",
2186 doi = "10.1063/1.102492",
2187 notes = "cvd of 6h-sic on 6h-sic",
2191 author = "H. S. Kong and J. T. Glass and R. F. Davis",
2193 title = "Chemical vapor deposition and characterization of
2194 6{H}-Si{C} thin films on off-axis 6{H}-Si{C}
2198 journal = "Journal of Applied Physics",
2201 pages = "2672--2679",
2202 keywords = "THIN FILMS; CHEMICAL VAPOR DEPOSITION; VAPOR DEPOSITED
2203 COATINGS; SILICON CARBIDES; TRANSMISSION ELECTRON
2204 MICROSCOPY; MONOCRYSTALS; MORPHOLOGY; CRYSTAL
2205 STRUCTURE; CRYSTAL DEFECTS; CARRIER DENSITY; VAPOR
2206 PHASE EPITAXY; CRYSTAL ORIENTATION",
2207 URL = "http://link.aip.org/link/?JAP/64/2672/1",
2208 doi = "10.1063/1.341608",
2212 author = "J. A. Powell and D. J. Larkin and L. G. Matus and W.
2213 J. Choyke and J. L. Bradshaw and L. Henderson and M.
2214 Yoganathan and J. Yang and P. Pirouz",
2216 title = "Growth of improved quality 3{C}-Si{C} films on
2217 6{H}-Si{C} substrates",
2220 journal = "Appl. Phys. Lett.",
2223 pages = "1353--1355",
2224 keywords = "SILICON CARBIDES; CHEMICAL VAPOR DEPOSITION; SORPTIVE
2225 PROPERTIES; PHOTOLUMINESCENCE; TRANSMISSION ELECTRON
2226 MICROSCOPY; DEFECT STRUCTURE; STACKING FAULTS; VAPOR
2228 URL = "http://link.aip.org/link/?APL/56/1353/1",
2229 doi = "10.1063/1.102512",
2230 notes = "cvd of 3c-sic on 6h-sic",
2234 author = "H. S. Kong and B. L. Jiang and J. T. Glass and G. A.
2235 Rozgonyi and K. L. More",
2237 title = "An examination of double positioning boundaries and
2238 interface misfit in beta-Si{C} films on alpha-Si{C}
2242 journal = "Journal of Applied Physics",
2245 pages = "2645--2650",
2246 keywords = "SILICON CARBIDES; INTERFACES; SILICON; STACKING
2247 FAULTS; TRANSMISSION ELECTRON MICROSCOPY; EPITAXY; THIN
2248 FILMS; OPTICAL MICROSCOPY; TOPOGRAPHY; NUCLEATION;
2249 MORPHOLOGY; ROTATION; SURFACE STRUCTURE; INTERFACE
2250 STRUCTURE; XRAY TOPOGRAPHY; EPITAXIAL LAYERS",
2251 URL = "http://link.aip.org/link/?JAP/63/2645/1",
2252 doi = "10.1063/1.341004",
2256 author = "J. A. Powell and J. B. Petit and J. H. Edgar and I. G.
2257 Jenkins and L. G. Matus and J. W. Yang and P. Pirouz
2258 and W. J. Choyke and L. Clemen and M. Yoganathan",
2260 title = "Controlled growth of 3{C}-Si{C} and 6{H}-Si{C} films
2261 on low-tilt-angle vicinal (0001) 6{H}-Si{C} wafers",
2264 journal = "Applied Physics Letters",
2268 keywords = "SILICON CARBIDES; SURFACE TREATMENTS; SORPTIVE
2269 PROPERTIES; CHEMICAL VAPOR DEPOSITION; MATHEMATICAL
2270 MODELS; CRYSTAL STRUCTURE; VERY HIGH TEMPERATURE",
2271 URL = "http://link.aip.org/link/?APL/59/333/1",
2272 doi = "10.1063/1.105587",
2276 author = "C. Yuan and A. J. Steckl and J. Chaudhuri and R.
2277 Thokala and M. J. Loboda",
2279 title = "Reduced temperature growth of crystalline 3{C}-Si{C}
2280 films on 6{H}-Si{C} by chemical vapor deposition from
2284 journal = "J. Appl. Phys.",
2287 pages = "1271--1273",
2288 keywords = "SILICON CARBIDES; THIN FILMS; CVD; EPITAXY; ABSORPTION
2289 EDGE; CRYSTAL STRUCTURE; STRAINS; DISLOCATIONS; XRD;
2291 URL = "http://link.aip.org/link/?JAP/78/1271/1",
2292 doi = "10.1063/1.360368",
2293 notes = "3c-sic on 6h-sic, cvd, reduced temperature",
2297 title = "{MBE} growth of 3{C}·Si{C}/6·Si{C} and the electric
2298 properties of its p-n junction",
2299 journal = "Journal of Crystal Growth",
2306 doi = "DOI: 10.1016/0022-0248(87)90449-0",
2307 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46X9W77-3F/2/864b2d86faa794252e1d1f16c99a9cf1",
2308 author = "Shigeo Kaneda and Yoshiki Sakamoto and Tadashi Mihara
2310 notes = "first time ssmbe of 3c-sic on 6h-sic",
2314 title = "Epitaxial growth of Si{C} thin films on Si-stabilized
2315 [alpha]-Si{C}(0001) at low temperatures by solid-source
2316 molecular beam epitaxy",
2317 journal = "J. Cryst. Growth",
2323 doi = "DOI: 10.1016/0022-0248(95)00170-0",
2324 URL = "http://www.sciencedirect.com/science/article/B6TJ6-3Y5MMXM-1N/2/65549019b878bf02d5ec645b7eea9e98",
2325 author = "A. Fissel and U. Kaiser and E. Ducke and B.
2326 Schr{\"{o}}ter and W. Richter",
2327 notes = "solid source mbe of 3c-sic on si and 6h-sic",
2330 @Article{fissel95_apl,
2331 author = "A. Fissel and B. Schr{\"{o}}ter and W. Richter",
2333 title = "Low-temperature growth of Si{C} thin films on Si and
2334 6{H}--Si{C} by solid-source molecular beam epitaxy",
2337 journal = "Appl. Phys. Lett.",
2340 pages = "3182--3184",
2341 keywords = "SILICON CARBIDES; MOLECULAR BEAM EPITAXY; MORPHOLOGY;
2343 URL = "http://link.aip.org/link/?APL/66/3182/1",
2344 doi = "10.1063/1.113716",
2345 notes = "mbe 3c-sic on si and 6h-sic",
2349 author = "Andreas Fissel and Ute Kaiser and Kay Pfennighaus and
2350 Bernd Schr{\"{o}}ter and Wolfgang Richter",
2352 title = "Growth of 6{H}--Si{C} on 6{H}--Si{C}(0001) by
2353 migration enhanced epitaxy controlled to an atomic
2354 level using surface superstructures",
2357 journal = "Applied Physics Letters",
2360 pages = "1204--1206",
2361 keywords = "MICROSTRUCTURE; MOLECULAR BEAM EPITAXY; MORPHOLOGY;
2362 NUCLEATION; SILICON CARBIDES; SURFACE RECONSTRUCTION;
2364 URL = "http://link.aip.org/link/?APL/68/1204/1",
2365 doi = "10.1063/1.115969",
2366 notes = "ss mbe sic, superstructure, reconstruction",
2370 title = "Ab initio Simulations of Homoepitaxial Si{C} Growth",
2371 author = "M. C. Righi and C. A. Pignedoli and R. Di Felice and
2372 C. M. Bertoni and A. Catellani",
2373 journal = "Phys. Rev. Lett.",
2380 doi = "10.1103/PhysRevLett.91.136101",
2381 publisher = "American Physical Society",
2382 notes = "dft calculations mbe sic growth",
2386 author = "J. A. Borders and S. T. Picraux and W. Beezhold",
2388 title = "{FORMATION} {OF} Si{C} {IN} {SILICON} {BY} {ION}
2392 journal = "Appl. Phys. Lett.",
2396 URL = "http://link.aip.org/link/?APL/18/509/1",
2397 doi = "10.1063/1.1653516",
2398 notes = "first time sic by ibs, follow cites for precipitation
2403 author = "F. L. Edelman and O. N. Kuznetsov and L. V. Lezheiko
2404 and E. V. Lubopytova",
2405 title = "Formation of Si{C} and Si[sub 3]{N}[sub 4] in silicon
2406 by ion implantation",
2407 publisher = "Taylor \& Francis",
2409 journal = "Radiation Effects",
2413 URL = "http://www.informaworld.com/10.1080/00337577608233477",
2414 notes = "3c-sic for different temperatures, amorphous, poly,
2415 single crystalline",
2418 @Article{akimchenko80,
2419 author = "I. P. Akimchenko and K. V. Kisseleva and V. V.
2420 Krasnopevtsev and A. G. Touryanski and V. S. Vavilov",
2421 title = "Structure and optical properties of silicon implanted
2422 by high doses of 70 and 310 ke{V} carbon ions",
2423 publisher = "Taylor \& Francis",
2425 journal = "Radiation Effects",
2429 URL = "http://www.informaworld.com/10.1080/00337578008209220",
2430 notes = "3c-sic nucleation by thermal spikes",
2434 title = "Structure and annealing properties of silicon carbide
2435 thin layers formed by implantation of carbon ions in
2437 journal = "Thin Solid Films",
2444 doi = "DOI: 10.1016/0040-6090(81)90516-2",
2445 URL = "http://www.sciencedirect.com/science/article/B6TW0-46T3DRB-NS/2/831f8ddd769a5d64cd493b89a9b0cf80",
2446 author = "Tadamasa Kimura and Shigeru Kagiyama and Shigemi
2451 title = "Characteristics of the synthesis of [beta]-Si{C} by
2452 the implantation of carbon ions into silicon",
2453 journal = "Thin Solid Films",
2460 doi = "DOI: 10.1016/0040-6090(82)90295-4",
2461 URL = "http://www.sciencedirect.com/science/article/B6TW0-46PB24G-11C/2/6bc025812640087a987ae09c38faaecd",
2462 author = "Tadamasa Kimura and Shigeru Kagiyama and Shigemi
2467 author = "K. J. Reeson and P. L. F. Hemment and R. F. Peart and
2468 C. D. Meekison and C. Marsh and G. R. Booker and R. J.
2469 Chater and J. A. Iulner and J. Davis",
2470 title = "Formation mechanisms and structures of insulating
2471 compounds formed in silicon by ion beam synthesis",
2472 publisher = "Taylor \& Francis",
2474 journal = "Radiation Effects",
2478 URL = "http://www.informaworld.com/10.1080/00337578608209614",
2479 notes = "ibs, comparison with sio and sin, higher temp or time,
2480 no c redistribution",
2484 author = "K. J. Reeson and P. L. F. Hemment and J. Stoemenos and
2485 J. Davis and G. E. Celler",
2487 title = "Formation of buried layers of beta-Si{C} using ion
2488 beam synthesis and incoherent lamp annealing",
2491 journal = "Appl. Phys. Lett.",
2494 pages = "2242--2244",
2495 keywords = "SILICON CARBIDES; FILM GROWTH; SOLIDPHASE EPITAXY; ION
2496 IMPLANTATION; CARBON IONS; DOPING PROFILES; SYNTHESIS",
2497 URL = "http://link.aip.org/link/?APL/51/2242/1",
2498 doi = "10.1063/1.98953",
2499 notes = "nice tem images, sic by ibs",
2503 author = "P. Martin and B. Daudin and M. Dupuy and A. Ermolieff
2504 and M. Olivier and A. M. Papon and G. Rolland",
2506 title = "High-temperature ion beam synthesis of cubic Si{C}",
2509 journal = "Journal of Applied Physics",
2512 pages = "2908--2912",
2513 keywords = "SILICON CARBIDES; SYNTHESIS; CUBIC LATTICES; ION
2514 IMPLANTATION; SILICON; SUBSTRATES; CARBON IONS;
2515 TRANSMISSION ELECTRON MICROSCOPY; XRAY DIFFRACTION;
2516 INFRARED SPECTRA; ABSORPTION SPECTROSCOPY; AUGER
2517 ELECTRON SPECTROSCOPY; RBS; CHANNELING; NUCLEAR
2518 REACTIONS; MONOCRYSTALS",
2519 URL = "http://link.aip.org/link/?JAP/67/2908/1",
2520 doi = "10.1063/1.346092",
2521 notes = "triple energy implantation to overcome high annealing
2526 author = "R. I. Scace and G. A. Slack",
2528 title = "Solubility of Carbon in Silicon and Germanium",
2531 journal = "J. Chem. Phys.",
2534 pages = "1551--1555",
2535 URL = "http://link.aip.org/link/?JCP/30/1551/1",
2536 doi = "10.1063/1.1730236",
2537 notes = "solubility of c in c-si, si-c phase diagram",
2541 author = "W. Hofker and H. Werner and D. Oosthoek and N.
2543 affiliation = "N. V. Philips' Gloeilampenfabrieken Philips Research
2544 Laboratories Eindhoven Netherlands Eindhoven
2546 title = "Boron implantations in silicon: {A} comparison of
2547 charge carrier and boron concentration profiles",
2548 journal = "Applied Physics A: Materials Science \& Processing",
2549 publisher = "Springer Berlin / Heidelberg",
2551 keyword = "Physics and Astronomy",
2555 URL = "http://dx.doi.org/10.1007/BF00884267",
2556 note = "10.1007/BF00884267",
2558 notes = "first time ted (only for boron?)",
2562 author = "A. E. Michel and W. Rausch and P. A. Ronsheim and R.
2565 title = "Rapid annealing and the anomalous diffusion of ion
2566 implanted boron into silicon",
2569 journal = "Applied Physics Letters",
2573 keywords = "SILICON; ION IMPLANTATION; ANNEALING; DIFFUSION;
2574 BORON; ATOM TRANSPORT; CHARGEDPARTICLE TRANSPORT; VERY
2575 HIGH TEMPERATURE; PN JUNCTIONS; SURFACE CONDUCTIVITY",
2576 URL = "http://link.aip.org/link/?APL/50/416/1",
2577 doi = "10.1063/1.98160",
2578 notes = "ted of boron in si",
2582 author = "N. E. B. Cowern and K. T. F. Janssen and H. F. F.
2585 title = "Transient diffusion of ion-implanted {B} in Si: Dose,
2586 time, and matrix dependence of atomic and electrical
2590 journal = "Journal of Applied Physics",
2593 pages = "6191--6198",
2594 keywords = "BORON IONS; ION IMPLANTATION; SILICON; DIFFUSION; TIME
2595 DEPENDENCE; ANNEALING; VERY HIGH TEMPERATURE; SIMS;
2596 CRYSTALS; AMORPHIZATION",
2597 URL = "http://link.aip.org/link/?JAP/68/6191/1",
2598 doi = "10.1063/1.346910",
2599 notes = "ted of boron in si",
2603 author = "N. E. B. Cowern and A. Cacciato and J. S. Custer and
2604 F. W. Saris and W. Vandervorst",
2606 title = "Role of {C} and {B} clusters in transient diffusion of
2610 journal = "Appl. Phys. Lett.",
2613 pages = "1150--1152",
2614 keywords = "ATOMIC CLUSTERS; BORON ADDITIONS; CRYSTAL DOPING;
2615 DIFFUSION; DOPED MATERIALS; IMPURITIES; INTERSTITIALS;
2617 URL = "http://link.aip.org/link/?APL/68/1150/1",
2618 doi = "10.1063/1.115706",
2619 notes = "suppression of transient enhanced diffusion (ted)",
2623 title = "Implantation and transient boron diffusion: the role
2624 of the silicon self-interstitial",
2625 journal = "Nucl. Instrum. Methods Phys. Res. B",
2630 note = "Selected Papers of the Tenth International Conference
2631 on Ion Implantation Technology (IIT '94)",
2633 doi = "DOI: 10.1016/0168-583X(94)00481-1",
2634 URL = "http://www.sciencedirect.com/science/article/B6TJN-40WKY1P-29/2/602c6e5b809221323d2d2968edd0a71c",
2635 author = "P. A. Stolk and H. -J. Gossmann and D. J. Eaglesham
2640 author = "P. A. Stolk and H.-J. Gossmann and D. J. Eaglesham and
2641 D. C. Jacobson and C. S. Rafferty and G. H. Gilmer and
2642 M. Jara\'{\i}z and J. M. Poate and H. S. Luftman and T.
2645 title = "Physical mechanisms of transient enhanced dopant
2646 diffusion in ion-implanted silicon",
2649 journal = "J. Appl. Phys.",
2652 pages = "6031--6050",
2653 URL = "http://link.aip.org/link/?JAP/81/6031/1",
2654 doi = "10.1063/1.364452",
2655 notes = "ted, transient enhanced diffusion, c silicon trap",
2659 author = "A. R. Powell and F. K. LeGoues and S. S. Iyer",
2661 title = "Formation of beta-Si{C} nanocrystals by the relaxation
2662 of Si[sub 1 - y]{C}[sub y] random alloy layers",
2665 journal = "Appl. Phys. Lett.",
2669 keywords = "SILICON CARBIDES; NANOSTRUCTURES; DISPERSIONS;
2670 EPITAXIAL LAYERS; STRESS RELAXATION; ANNEALING;
2671 TEMPERATURE EFFECTS; PRECIPITATION; DISLOCATIONS;
2673 URL = "http://link.aip.org/link/?APL/64/324/1",
2674 doi = "10.1063/1.111195",
2675 notes = "beta sic nano crystals in si, mbe, annealing",
2679 author = "Richard A. Soref",
2681 title = "Optical band gap of the ternary semiconductor Si[sub 1
2682 - x - y]Ge[sub x]{C}[sub y]",
2685 journal = "J. Appl. Phys.",
2688 pages = "2470--2472",
2689 keywords = "SILICON CARBIDES; GERMANIUM CARBIDES; ENERGY GAP;
2690 OPTICAL PROPERTIES; DIAMONDS; SEMICONDUCTOR ALLOYS;
2692 URL = "http://link.aip.org/link/?JAP/70/2470/1",
2693 doi = "10.1063/1.349403",
2694 notes = "band gap of strained si by c",
2698 author = "E Kasper",
2699 title = "Superlattices of group {IV} elements, a new
2700 possibility to produce direct band gap material",
2701 journal = "Physica Scripta",
2704 URL = "http://stacks.iop.org/1402-4896/T35/232",
2706 notes = "superlattices, convert indirect band gap into a
2711 author = "K. Eberl and S. S. Iyer and S. Zollner and J. C. Tsang
2714 title = "Growth and strain compensation effects in the ternary
2715 Si[sub 1 - x - y]Ge[sub x]{C}[sub y] alloy system",
2718 journal = "Applied Physics Letters",
2721 pages = "3033--3035",
2722 keywords = "SILICON ALLOYS; GERMANIUM ALLOYS; CARBON ALLOYS;
2723 TERNARY ALLOYS; SEMICONDUCTOR ALLOYS; MOLECULAR BEAM
2724 EPITAXY; INTERNAL STRAINS; TEMPERATURE EFFECTS; CRYSTAL
2725 STRUCTURE; LATTICE PARAMETERS; XRAY DIFFRACTION; PHASE
2727 URL = "http://link.aip.org/link/?APL/60/3033/1",
2728 doi = "10.1063/1.106774",
2732 author = "A. R. Powell and K. Eberl and F. E. LeGoues and B. A.
2735 title = "Stability of strained Si[sub 1 - y]{C}[sub y] random
2739 journal = "J. Vac. Sci. Technol. B",
2742 pages = "1064--1068",
2743 location = "Ottawa (Canada)",
2744 keywords = "SILICON ALLOYS; CARBON ALLOYS; STRAINS; THICKNESS;
2745 METASTABLE PHASES; TWINNING; DISLOCATIONS; MOLECULAR
2746 BEAM EPITAXY; EPITAXIAL LAYERS; CRITICAL PHENOMENA;
2747 TEMPERATURE RANGE 400--1000 K; BINARY ALLOYS",
2748 URL = "http://link.aip.org/link/?JVB/11/1064/1",
2749 doi = "10.1116/1.587008",
2750 notes = "substitutional c in si by mbe",
2753 @Article{powell93_2,
2754 title = "Si[sub 1-x-y]Ge[sub x]{C}[sub y] growth and properties
2755 of the ternary system",
2756 journal = "Journal of Crystal Growth",
2763 doi = "DOI: 10.1016/0022-0248(93)90653-E",
2764 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46J3RF2-8H/2/27fc231f28e4dc0a3b4770e5cf03257e",
2765 author = "A. R. Powell and K. Eberl and B. A. Ek and S. S.
2770 author = "H. J. Osten",
2771 title = "Modification of Growth Modes in Lattice-Mismatched
2772 Epitaxial Systems: Si/Ge",
2773 journal = "physica status solidi (a)",
2776 publisher = "WILEY-VCH Verlag",
2778 URL = "http://dx.doi.org/10.1002/pssa.2211450203",
2779 doi = "10.1002/pssa.2211450203",
2784 @Article{dietrich94,
2785 title = "Lattice distortion in a strain-compensated
2786 $Si_{1-x-y}$$Ge_{x}$${C}_{y}$ layer on silicon",
2787 author = "B. Dietrich and H. J. Osten and H. R{\"u}cker and M.
2788 Methfessel and P. Zaumseil",
2789 journal = "Phys. Rev. B",
2792 pages = "17185--17190",
2796 doi = "10.1103/PhysRevB.49.17185",
2797 publisher = "American Physical Society",
2801 author = "H. J. Osten and E. Bugiel and P. Zaumseil",
2803 title = "Growth of an inverse tetragonal distorted SiGe layer
2804 on Si(001) by adding small amounts of carbon",
2807 journal = "Applied Physics Letters",
2810 pages = "3440--3442",
2811 keywords = "SILICON ALLOYS; GERMANIUM ALLOYS; FILM GROWTH; CARBON
2812 ALLOYS; TERNARY ALLOYS; MOLECULAR BEAM EPITAXY; TEM;
2813 XRD; LATTICE PARAMETERS; EPITAXIAL LAYERS; TETRAGONAL
2815 URL = "http://link.aip.org/link/?APL/64/3440/1",
2816 doi = "10.1063/1.111235",
2817 notes = "inversely strained / distorted heterostructure",
2821 author = "S. S. Iyer and K. Eberl and M. S. Goorsky and F. K.
2822 LeGoues and J. C. Tsang and F. Cardone",
2824 title = "Synthesis of Si[sub 1 - y]{C}[sub y] alloys by
2825 molecular beam epitaxy",
2828 journal = "Applied Physics Letters",
2832 keywords = "SILICON ALLOYS; CARBON ALLOYS; BINARY ALLOYS;
2833 SEMICONDUCTOR ALLOYS; SUPERLATTICES; MOLECULAR BEAM
2834 EPITAXY; CHEMICAL COMPOSITION; TEMPERATURE EFFECTS;
2835 FILM GROWTH; MICROSTRUCTURE",
2836 URL = "http://link.aip.org/link/?APL/60/356/1",
2837 doi = "10.1063/1.106655",
2841 author = "H. J. Osten and J. Griesche and S. Scalese",
2843 title = "Substitutional carbon incorporation in epitaxial
2844 Si[sub 1 - y]{C}[sub y] alloys on Si(001) grown by
2845 molecular beam epitaxy",
2848 journal = "Appl. Phys. Lett.",
2852 keywords = "molecular beam epitaxial growth; semiconductor growth;
2853 wide band gap semiconductors; interstitials; silicon
2855 URL = "http://link.aip.org/link/?APL/74/836/1",
2856 doi = "10.1063/1.123384",
2857 notes = "substitutional c in si by mbe",
2861 author = "M. Born and R. Oppenheimer",
2862 title = "Zur Quantentheorie der Molekeln",
2863 journal = "Annalen der Physik",
2866 publisher = "WILEY-VCH Verlag",
2868 URL = "http://dx.doi.org/10.1002/andp.19273892002",
2869 doi = "10.1002/andp.19273892002",
2874 @Article{hohenberg64,
2875 title = "Inhomogeneous Electron Gas",
2876 author = "P. Hohenberg and W. Kohn",
2877 journal = "Phys. Rev.",
2880 pages = "B864--B871",
2884 doi = "10.1103/PhysRev.136.B864",
2885 publisher = "American Physical Society",
2886 notes = "density functional theory, dft",
2890 title = "The calculation of atomic fields",
2891 author = "L. H. Thomas",
2892 journal = "Mathematical Proceedings of the Cambridge
2893 Philosophical Society",
2897 doi = "10.1017/S0305004100011683",
2902 author = "E. Fermi",
2903 journal = "Atti Accad. Naz. Lincei, Cl. Sci. Fis. Mat. Nat.
2911 title = "The Wave Mechanics of an Atom with a Non-Coulomb
2912 Central Field. Part {I}. Theory and Methods",
2913 author = "D. R. Hartree",
2914 journal = "Mathematical Proceedings of the Cambridge
2915 Philosophical Society",
2919 doi = "10.1017/S0305004100011919",
2923 title = "Self-Consistent Equations Including Exchange and
2924 Correlation Effects",
2925 author = "W. Kohn and L. J. Sham",
2926 journal = "Phys. Rev.",
2929 pages = "A1133--A1138",
2933 doi = "10.1103/PhysRev.140.A1133",
2934 publisher = "American Physical Society",
2935 notes = "dft, exchange and correlation",
2939 title = "Nobel Lecture: Electronic structure of matter---wave
2940 functions and density functionals",
2942 journal = "Rev. Mod. Phys.",
2945 pages = "1253--1266",
2949 doi = "10.1103/RevModPhys.71.1253",
2950 publisher = "American Physical Society",
2954 title = "Electron densities in search of Hamiltonians",
2955 author = "Mel Levy",
2956 journal = "Phys. Rev. A",
2959 pages = "1200--1208",
2963 doi = "10.1103/PhysRevA.26.1200",
2964 publisher = "American Physical Society",
2968 title = "Strain-stabilized highly concentrated pseudomorphic
2969 $Si1-x$$Cx$ layers in Si",
2970 author = "H. R{\"u}cker and M. Methfessel and E. Bugiel and H.
2972 journal = "Phys. Rev. Lett.",
2975 pages = "3578--3581",
2979 doi = "10.1103/PhysRevLett.72.3578",
2980 publisher = "American Physical Society",
2981 notes = "high c concentration in si, heterostructure, strained
2986 title = "Phosphorous Doping of Strain-Induced
2987 Si$_{1-y}${C}$_{y}$ Epitaxial Films Grown\\
2988 by Low-Temperature Chemical Vapor Deposition",
2989 author = "Shuhei Yagi and Katsuya Abe and Takashi Okabayashi and
2990 Yuichi Yoneyama and Akira Yamada and Makoto Konagai",
2991 journal = "Japanese Journal of Applied Physics",
2993 number = "Part 1, No. 4B",
2994 pages = "2472--2475",
2997 URL = "http://jjap.jsap.jp/link?JJAP/41/2472/",
2998 doi = "10.1143/JJAP.41.2472",
2999 publisher = "The Japan Society of Applied Physics",
3000 notes = "experimental charge carrier mobility in strained si",
3004 title = "Electron Transport Model for Strained Silicon-Carbon
3006 author = "Shu-Tong Chang and Chung-Yi Lin",
3007 journal = "Japanese J. Appl. Phys.",
3010 pages = "2257--2262",
3013 URL = "http://jjap.ipap.jp/link?JJAP/44/2257/",
3014 doi = "10.1143/JJAP.44.2257",
3015 publisher = "The Japan Society of Applied Physics",
3016 notes = "enhance of electron mobility in strained si",
3019 @Article{kissinger94,
3020 author = "W. Kissinger and M. Weidner and H. J. Osten and M.
3023 title = "Optical transitions in strained Si[sub 1 - y]{C}[sub
3024 y] layers on Si(001)",
3027 journal = "Applied Physics Letters",
3030 pages = "3356--3358",
3031 keywords = "SILICON CARBIDES; INTERNAL STRAINS; EPITAXIAL LAYERS;
3032 CHEMICAL COMPOSITION; ELLIPSOMETRY; REFLECTION
3033 SPECTROSCOPY; ELECTROOPTICAL EFFECTS; BAND STRUCTURE;
3034 ENERGY LEVELS; ENERGYLEVEL TRANSITIONS",
3035 URL = "http://link.aip.org/link/?APL/65/3356/1",
3036 doi = "10.1063/1.112390",
3037 notes = "strained si influence on optical properties",
3041 author = "H. J. Osten and Myeongcheol Kim and K. Pressel and P.
3044 title = "Substitutional versus interstitial carbon
3045 incorporation during pseudomorphic growth of Si[sub 1 -
3046 y]{C}[sub y] on Si(001)",
3049 journal = "Journal of Applied Physics",
3052 pages = "6711--6715",
3053 keywords = "SILICON CARBIDES; CRYSTAL DEFECTS; FILM GROWTH;
3054 MOLECULAR BEAM EPITAXY; INTERSTITIALS; SUBSTITUTION;
3056 URL = "http://link.aip.org/link/?JAP/80/6711/1",
3057 doi = "10.1063/1.363797",
3058 notes = "mbe substitutional vs interstitial c incorporation",
3062 author = "H. J. Osten and P. Gaworzewski",
3064 title = "Charge transport in strained Si[sub 1 - y]{C}[sub y]
3065 and Si[sub 1 - x - y]Ge[sub x]{C}[sub y] alloys on
3069 journal = "J. Appl. Phys.",
3072 pages = "4977--4981",
3073 keywords = "silicon compounds; Ge-Si alloys; wide band gap
3074 semiconductors; semiconductor epitaxial layers; carrier
3075 density; Hall mobility; interstitials; defect states",
3076 URL = "http://link.aip.org/link/?JAP/82/4977/1",
3077 doi = "10.1063/1.366364",
3078 notes = "charge transport in strained si",
3082 title = "Carbon-mediated aggregation of self-interstitials in
3083 silicon: {A} large-scale molecular dynamics study",
3084 author = "Sumeet S. Kapur and Manish Prasad and Talid Sinno",
3085 journal = "Phys. Rev. B",
3092 doi = "10.1103/PhysRevB.69.155214",
3093 publisher = "American Physical Society",
3094 notes = "simulation using promising tersoff reparametrization",
3098 title = "Event-Based Relaxation of Continuous Disordered
3100 author = "G. T. Barkema and Normand Mousseau",
3101 journal = "Phys. Rev. Lett.",
3104 pages = "4358--4361",
3108 doi = "10.1103/PhysRevLett.77.4358",
3109 publisher = "American Physical Society",
3110 notes = "activation relaxation technique, art, speed up slow
3115 author = "E. Canc\`{e}s and F. Legoll and M.-C. Marinica and K.
3116 Minoukadeh and F. Willaime",
3118 title = "Some improvements of the activation-relaxation
3119 technique method for finding transition pathways on
3120 potential energy surfaces",
3123 journal = "J. Chem. Phys.",
3129 keywords = "eigenvalues and eigenfunctions; iron; potential energy
3130 surfaces; vacancies (crystal)",
3131 URL = "http://link.aip.org/link/?JCP/130/114711/1",
3132 doi = "10.1063/1.3088532",
3133 notes = "improvements to art, refs for methods to find
3134 transition pathways",
3137 @Article{parrinello81,
3138 author = "M. Parrinello and A. Rahman",
3140 title = "Polymorphic transitions in single crystals: {A} new
3141 molecular dynamics method",
3144 journal = "J. Appl. Phys.",
3147 pages = "7182--7190",
3148 keywords = "MONOCRYSTALS; PHASE TRANSFORMATIONS; STRUCTURAL
3149 MODELS; DYNAMICS; THEORETICAL DATA; STRESSES;
3150 CONFIGURATION; LAGRANGE EQUATIONS; SIZE; NICKEL;
3151 COMPRESSION; TENSILE PROPERTIES; COMPARATIVE
3152 EVALUATIONS; STRAINS; CUBIC LATTICES; HCP LATTICES;
3154 URL = "http://link.aip.org/link/?JAP/52/7182/1",
3155 doi = "10.1063/1.328693",
3158 @Article{stillinger85,
3159 title = "Computer simulation of local order in condensed phases
3161 author = "Frank H. Stillinger and Thomas A. Weber",
3162 journal = "Phys. Rev. B",
3165 pages = "5262--5271",
3169 doi = "10.1103/PhysRevB.31.5262",
3170 publisher = "American Physical Society",
3174 title = "Empirical potential for hydrocarbons for use in
3175 simulating the chemical vapor deposition of diamond
3177 author = "Donald W. Brenner",
3178 journal = "Phys. Rev. B",
3181 pages = "9458--9471",
3185 doi = "10.1103/PhysRevB.42.9458",
3186 publisher = "American Physical Society",
3187 notes = "brenner hydro carbons",
3191 title = "Modeling of Covalent Bonding in Solids by Inversion of
3192 Cohesive Energy Curves",
3193 author = "Martin Z. Bazant and Efthimios Kaxiras",
3194 journal = "Phys. Rev. Lett.",
3197 pages = "4370--4373",
3201 doi = "10.1103/PhysRevLett.77.4370",
3202 publisher = "American Physical Society",
3203 notes = "first si edip",
3207 title = "Environment-dependent interatomic potential for bulk
3209 author = "Martin Z. Bazant and Efthimios Kaxiras and J. F.
3211 journal = "Phys. Rev. B",
3214 pages = "8542--8552",
3218 doi = "10.1103/PhysRevB.56.8542",
3219 publisher = "American Physical Society",
3220 notes = "second si edip",
3224 title = "Interatomic potential for silicon defects and
3226 author = "Jo\tilde{a}o F. Justo and Martin Z. Bazant and
3227 Efthimios Kaxiras and V. V. Bulatov and Sidney Yip",
3228 journal = "Phys. Rev. B",
3231 pages = "2539--2550",
3235 doi = "10.1103/PhysRevB.58.2539",
3236 publisher = "American Physical Society",
3237 notes = "latest si edip, good dislocation explanation",
3241 title = "{PARCAS} molecular dynamics code",
3242 author = "K. Nordlund",
3247 title = "Hyperdynamics: Accelerated Molecular Dynamics of
3249 author = "Arthur F. Voter",
3250 journal = "Phys. Rev. Lett.",
3253 pages = "3908--3911",
3257 doi = "10.1103/PhysRevLett.78.3908",
3258 publisher = "American Physical Society",
3259 notes = "hyperdynamics, accelerated md",
3263 author = "Arthur F. Voter",
3265 title = "A method for accelerating the molecular dynamics
3266 simulation of infrequent events",
3269 journal = "J. Chem. Phys.",
3272 pages = "4665--4677",
3273 keywords = "COMPUTERIZED SIMULATION; NICKEL; DIFFUSION; ATOM
3274 TRANSPORT; MOLECULAR ORBITAL METHOD; POTENTIAL ENERGY;
3275 SURFACE POTENTIAL; MOLECULAR DYNAMICS METHOD; potential
3276 energy functions; surface diffusion; reaction kinetics
3277 theory; potential energy surfaces",
3278 URL = "http://link.aip.org/link/?JCP/106/4665/1",
3279 doi = "10.1063/1.473503",
3280 notes = "improved hyperdynamics md",
3283 @Article{sorensen2000,
3284 author = "Mads R. S{\o }rensen and Arthur F. Voter",
3286 title = "Temperature-accelerated dynamics for simulation of
3290 journal = "J. Chem. Phys.",
3293 pages = "9599--9606",
3294 keywords = "SOLID STATE PHYSICS; SIMULATION; DIFFUSION; SURFACES;
3295 MOLECULAR DYNAMICS METHOD; surface diffusion",
3296 URL = "http://link.aip.org/link/?JCP/112/9599/1",
3297 doi = "10.1063/1.481576",
3298 notes = "temperature accelerated dynamics, tad",
3302 title = "Parallel replica method for dynamics of infrequent
3304 author = "Arthur F. Voter",
3305 journal = "Phys. Rev. B",
3308 pages = "R13985--R13988",
3312 doi = "10.1103/PhysRevB.57.R13985",
3313 publisher = "American Physical Society",
3314 notes = "parallel replica method, accelerated md",
3318 author = "Xiongwu Wu and Shaomeng Wang",
3320 title = "Enhancing systematic motion in molecular dynamics
3324 journal = "J. Chem. Phys.",
3327 pages = "9401--9410",
3328 keywords = "molecular dynamics method; argon; Lennard-Jones
3329 potential; crystallisation; liquid theory",
3330 URL = "http://link.aip.org/link/?JCP/110/9401/1",
3331 doi = "10.1063/1.478948",
3332 notes = "self guided md, sgmd, accelerated md, enhancing
3336 @Article{choudhary05,
3337 author = "Devashish Choudhary and Paulette Clancy",
3339 title = "Application of accelerated molecular dynamics schemes
3340 to the production of amorphous silicon",
3343 journal = "J. Chem. Phys.",
3349 keywords = "molecular dynamics method; silicon; glass structure;
3350 amorphous semiconductors",
3351 URL = "http://link.aip.org/link/?JCP/122/154509/1",
3352 doi = "10.1063/1.1878733",
3353 notes = "explanation of sgmd and hyper md, applied to amorphous
3358 author = "W. J. Taylor and T. Y. Tan and U. G{\"{o}}sele",
3360 title = "Carbon precipitation in silicon: Why is it so
3364 journal = "Appl. Phys. Lett.",
3367 pages = "3336--3338",
3368 keywords = "SILICON; CARBON ADDITIONS; OXYGEN ADDITIONS; DOPED
3369 MATERIALS; PRECIPITATION; THERMODYNAMICS; SURFACE
3371 URL = "http://link.aip.org/link/?APL/62/3336/1",
3372 doi = "10.1063/1.109063",
3373 notes = "interfacial energy of cubic sic and si, si self
3374 interstitials necessary for precipitation, volume
3375 decrease, high interface energy",
3378 @Article{chaussende08,
3379 title = "Prospects for 3{C}-Si{C} bulk crystal growth",
3380 journal = "J. Cryst. Growth",
3385 note = "Proceedings of the E-MRS Conference, Symposium G -
3386 Substrates of Wide Bandgap Materials",
3388 doi = "DOI: 10.1016/j.jcrysgro.2007.11.140",
3389 URL = "http://www.sciencedirect.com/science/article/B6TJ6-4R7J67S-F/2/e92fc194b652409f5b119393d608b082",
3390 author = "D. Chaussende and F. Mercier and A. Boulle and F.
3391 Conchon and M. Soueidan and G. Ferro and A. Mantzari
3392 and A. Andreadou and E. K. Polychroniadis and C.
3393 Balloud and S. Juillaguet and J. Camassel and M. Pons",
3394 notes = "3c-sic crystal growth, sic fabrication + links,
3398 @Article{chaussende07,
3399 author = "D. Chaussende and P. J. Wellmann and M. Pons",
3400 title = "Status of Si{C} bulk growth processes",
3401 journal = "Journal of Physics D: Applied Physics",
3405 URL = "http://stacks.iop.org/0022-3727/40/i=20/a=S02",
3407 notes = "review of sic single crystal growth methods, process
3412 title = "Forces in Molecules",
3413 author = "R. P. Feynman",
3414 journal = "Phys. Rev.",
3421 doi = "10.1103/PhysRev.56.340",
3422 publisher = "American Physical Society",
3423 notes = "hellmann feynman forces",
3427 title = "Bonding Arrangements at the $Si-Si{O}_{2}$ and
3428 $Si{C}-Si{O}_{2}$ Interfaces and a Possible Origin of
3429 their Contrasting Properties",
3430 author = "Ryszard Buczko and Stephen J. Pennycook and Sokrates
3432 journal = "Phys. Rev. Lett.",
3439 doi = "10.1103/PhysRevLett.84.943",
3440 publisher = "American Physical Society",
3441 notes = "si sio2 and sic sio2 interface",
3444 @Article{djurabekova08,
3445 title = "Atomistic simulation of the interface structure of Si
3446 nanocrystals embedded in amorphous silica",
3447 author = "Flyura Djurabekova and Kai Nordlund",
3448 journal = "Phys. Rev. B",
3455 doi = "10.1103/PhysRevB.77.115325",
3456 publisher = "American Physical Society",
3457 notes = "nc-si in sio2, interface energy, nc construction,
3458 angular distribution, coordination",
3462 author = "C. Wen and Y. M. Wang and W. Wan and F. H. Li and J.
3463 W. Liang and J. Zou",
3465 title = "Nature of interfacial defects and their roles in
3466 strain relaxation at highly lattice mismatched
3467 3{C}-Si{C}/Si (001) interface",
3470 journal = "J. Appl. Phys.",
3476 keywords = "anelastic relaxation; crystal structure; dislocations;
3477 elemental semiconductors; semiconductor growth;
3478 semiconductor thin films; silicon; silicon compounds;
3479 stacking faults; wide band gap semiconductors",
3480 URL = "http://link.aip.org/link/?JAP/106/073522/1",
3481 doi = "10.1063/1.3234380",
3482 notes = "sic/si interface, follow refs, tem image
3483 deconvolution, dislocation defects",
3486 @Article{kitabatake93,
3487 author = "Makoto Kitabatake and Masahiro Deguchi and Takashi
3490 title = "Simulations and experiments of Si{C} heteroepitaxial
3491 growth on Si(001) surface",
3494 journal = "J. Appl. Phys.",
3497 pages = "4438--4445",
3498 keywords = "SILICON CARBIDES; FILM GROWTH; SIMULATION; MOLECULAR
3499 BEAM EPITAXY; MOLECULAR DYNAMICS CALCULATIONS; SILICON;
3500 MICROSTRUCTURE; ULTRAVIOLET RADIATION; IRRADIATION",
3501 URL = "http://link.aip.org/link/?JAP/74/4438/1",
3502 doi = "10.1063/1.354385",
3503 notes = "mbe and md of sic growth on si, 4 to 5 shrinkage
3507 @Article{kitabatake97,
3508 author = "Makoto Kitabatake",
3509 title = "Simulations and Experiments of 3{C}-Si{C}/Si
3510 Heteroepitaxial Growth",
3511 publisher = "WILEY-VCH Verlag",
3513 journal = "physica status solidi (b)",
3516 URL = "http://dx.doi.org/10.1002/1521-3951(199707)202:1<405::AID-PSSB405>3.0.CO;2-5",
3517 doi = "10.1002/1521-3951(199707)202:1<405::AID-PSSB405>3.0.CO;2-5",
3518 notes = "3c-sic heteroepitaxial growth on si off-axis model",
3522 title = "Strain relaxation and thermal stability of the
3523 3{C}-Si{C}(001)/Si(001) interface: {A} molecular
3525 journal = "Thin Solid Films",
3532 doi = "DOI: 10.1016/S0040-6090(96)09257-7",
3533 URL = "http://www.sciencedirect.com/science/article/B6TW0-41WBB52-C/2/6ef684a04d02dd3b108f972377cde8f4",
3534 author = "V. Chirita and L. Hultman and L. R. Wallenberg",
3535 keywords = "Strain relaxation",
3536 keywords = "Interfaces",
3537 keywords = "Thermal stability",
3538 keywords = "Molecular dynamics",
3539 notes = "tersoff sic/si interface study",
3543 title = "Ab initio Study of Misfit Dislocations at the
3544 $Si{C}/Si(001)$ Interface",
3545 author = "Giancarlo Cicero and Laurent Pizzagalli and Alessandra
3547 journal = "Phys. Rev. Lett.",
3554 doi = "10.1103/PhysRevLett.89.156101",
3555 publisher = "American Physical Society",
3556 notes = "sic/si interface study",
3559 @Article{pizzagalli03,
3560 title = "Theoretical investigations of a highly mismatched
3561 interface: Si{C}/Si(001)",
3562 author = "Laurent Pizzagalli and Giancarlo Cicero and Alessandra
3564 journal = "Phys. Rev. B",
3571 doi = "10.1103/PhysRevB.68.195302",
3572 publisher = "American Physical Society",
3573 notes = "tersoff md and ab initio sic/si interface study",
3577 title = "Atomic configurations of dislocation core and twin
3578 boundaries in $ 3{C}-Si{C} $ studied by high-resolution
3579 electron microscopy",
3580 author = "C. Y. Tang and F. H. Li and R. Wang and J. Zou and X.
3581 H. Zheng and J. W. Liang",
3582 journal = "Phys. Rev. B",
3589 doi = "10.1103/PhysRevB.75.184103",
3590 publisher = "American Physical Society",
3591 notes = "hrem image deconvolution on 3c-sic on si, distinguish
3595 @Article{hornstra58,
3596 title = "Dislocations in the diamond lattice",
3597 journal = "Journal of Physics and Chemistry of Solids",
3604 doi = "DOI: 10.1016/0022-3697(58)90138-0",
3605 URL = "http://www.sciencedirect.com/science/article/B6TXR-46MMPHJ-10D/2/7176c01c29cd4e73faa26ab2aacdcea5",
3606 author = "J. Hornstra",
3607 notes = "dislocations in diamond lattice",
3611 title = "Synthesis of $\beta$-Si{C} Layer in Silicon by Carbon
3612 Ion `Hot' Implantation",
3613 author = "Masahiro Deguchi and Makoto Kitabatake and Takashi
3614 Hirao and Naoki Arai and Tomio Izumi",
3615 journal = "Japanese J. Appl. Phys.",
3617 number = "Part 1, No. 2A",
3621 URL = "http://jjap.ipap.jp/link?JJAP/31/343/",
3622 doi = "10.1143/JJAP.31.343",
3623 publisher = "The Japan Society of Applied Physics",
3624 notes = "c-c bonds in c implanted si, hot implantation
3625 efficiency, c-c hard to break by thermal annealing",
3628 @Article{eichhorn99,
3629 author = "F. Eichhorn and N. Schell and W. Matz and R.
3632 title = "Strain and Si{C} particle formation in silicon
3633 implanted with carbon ions of medium fluence studied by
3634 synchrotron x-ray diffraction",
3637 journal = "J. Appl. Phys.",
3640 pages = "4184--4187",
3641 keywords = "silicon; carbon; elemental semiconductors; chemical
3642 interdiffusion; ion implantation; X-ray diffraction;
3643 precipitation; semiconductor doping",
3644 URL = "http://link.aip.org/link/?JAP/86/4184/1",
3645 doi = "10.1063/1.371344",
3646 notes = "sic conversion by ibs, detected substitutional carbon,
3647 expansion of si lattice",
3650 @Article{eichhorn02,
3651 author = "F. Eichhorn and N. Schell and A. M{\"{u}}cklich and H.
3652 Metzger and W. Matz and R. K{\"{o}}gler",
3654 title = "Structural relation between Si and Si{C} formed by
3655 carbon ion implantation",
3658 journal = "J. Appl. Phys.",
3661 pages = "1287--1292",
3662 keywords = "silicon compounds; wide band gap semiconductors; ion
3663 implantation; annealing; X-ray scattering; transmission
3664 electron microscopy",
3665 URL = "http://link.aip.org/link/?JAP/91/1287/1",
3666 doi = "10.1063/1.1428105",
3667 notes = "3c-sic alignement to si host in ibs depending on
3668 temperature, might explain c into c sub trafo",
3672 author = "G Lucas and M Bertolus and L Pizzagalli",
3673 title = "An environment-dependent interatomic potential for
3674 silicon carbide: calculation of bulk properties,
3675 high-pressure phases, point and extended defects, and
3676 amorphous structures",
3677 journal = "J. Phys.: Condens. Matter",
3681 URL = "http://stacks.iop.org/0953-8984/22/i=3/a=035802",
3687 author = "J Godet and L Pizzagalli and S Brochard and P
3689 title = "Comparison between classical potentials and ab initio
3690 methods for silicon under large shear",
3691 journal = "J. Phys.: Condens. Matter",
3695 URL = "http://stacks.iop.org/0953-8984/15/i=41/a=004",
3697 notes = "comparison of empirical potentials, stillinger weber,
3698 edip, tersoff, ab initio",
3701 @Article{moriguchi98,
3702 title = "Verification of Tersoff's Potential for Static
3703 Structural Analysis of Solids of Group-{IV} Elements",
3704 author = "Koji Moriguchi and Akira Shintani",
3705 journal = "Japanese J. Appl. Phys.",
3707 number = "Part 1, No. 2",
3711 URL = "http://jjap.ipap.jp/link?JJAP/37/414/",
3712 doi = "10.1143/JJAP.37.414",
3713 publisher = "The Japan Society of Applied Physics",
3714 notes = "tersoff stringent test",
3717 @Article{mazzarolo01,
3718 title = "Low-energy recoils in crystalline silicon: Quantum
3720 author = "Massimiliano Mazzarolo and Luciano Colombo and Giorgio
3721 Lulli and Eros Albertazzi",
3722 journal = "Phys. Rev. B",
3729 doi = "10.1103/PhysRevB.63.195207",
3730 publisher = "American Physical Society",
3733 @Article{holmstroem08,
3734 title = "Threshold defect production in silicon determined by
3735 density functional theory molecular dynamics
3737 author = "E. Holmstr{\"o}m and A. Kuronen and K. Nordlund",
3738 journal = "Phys. Rev. B",
3745 doi = "10.1103/PhysRevB.78.045202",
3746 publisher = "American Physical Society",
3747 notes = "threshold displacement comparison empirical and ab
3751 @Article{nordlund97,
3752 title = "Repulsive interatomic potentials calculated using
3753 Hartree-Fock and density-functional theory methods",
3754 journal = "Nucl. Instrum. Methods Phys. Res. B",
3761 doi = "DOI: 10.1016/S0168-583X(97)00447-3",
3762 URL = "http://www.sciencedirect.com/science/article/B6TJN-4CP0TGF-91/2/1a9100c0aae82d2d258fc83dfdba23c1",
3763 author = "K. Nordlund and N. Runeberg and D. Sundholm",
3764 notes = "repulsive ab initio potential",
3768 title = "Efficiency of ab-initio total energy calculations for
3769 metals and semiconductors using a plane-wave basis
3771 journal = "Comput. Mater. Sci.",
3778 doi = "DOI: 10.1016/0927-0256(96)00008-0",
3779 URL = "http://www.sciencedirect.com/science/article/B6TWM-3VRVTBF-3/2/88689b1eacfe2b5fe57f09d37eff3b74",
3780 author = "G. Kresse and J. Furthm{\"{u}}ller",
3785 title = "Projector augmented-wave method",
3786 author = "P. E. Bl{\"o}chl",
3787 journal = "Phys. Rev. B",
3790 pages = "17953--17979",
3794 doi = "10.1103/PhysRevB.50.17953",
3795 publisher = "American Physical Society",
3796 notes = "paw method",
3800 title = "Norm-Conserving Pseudopotentials",
3801 author = "D. R. Hamann and M. Schl{\"u}ter and C. Chiang",
3802 journal = "Phys. Rev. Lett.",
3805 pages = "1494--1497",
3809 doi = "10.1103/PhysRevLett.43.1494",
3810 publisher = "American Physical Society",
3811 notes = "norm-conserving pseudopotentials",
3814 @Article{vanderbilt90,
3815 title = "Soft self-consistent pseudopotentials in a generalized
3816 eigenvalue formalism",
3817 author = "David Vanderbilt",
3818 journal = "Phys. Rev. B",
3821 pages = "7892--7895",
3825 doi = "10.1103/PhysRevB.41.7892",
3826 publisher = "American Physical Society",
3827 notes = "vasp pseudopotentials",
3831 title = "Accurate and simple density functional for the
3832 electronic exchange energy: Generalized gradient
3834 author = "John P. Perdew and Yue Wang",
3835 journal = "Phys. Rev. B",
3838 pages = "8800--8802",
3842 doi = "10.1103/PhysRevB.33.8800",
3843 publisher = "American Physical Society",
3844 notes = "rapid communication gga",
3848 title = "Generalized gradient approximations for exchange and
3849 correlation: {A} look backward and forward",
3850 journal = "Physica B: Condensed Matter",
3857 doi = "DOI: 10.1016/0921-4526(91)90409-8",
3858 URL = "http://www.sciencedirect.com/science/article/B6TVH-46G8GR9-3D/2/18e610a616e4d80b934079c89063ece7",
3859 author = "John P. Perdew",
3860 notes = "gga overview",
3864 title = "Atoms, molecules, solids, and surfaces: Applications
3865 of the generalized gradient approximation for exchange
3867 author = "John P. Perdew and J. A. Chevary and S. H. Vosko and
3868 Koblar A. Jackson and Mark R. Pederson and D. J. Singh
3869 and Carlos Fiolhais",
3870 journal = "Phys. Rev. B",
3873 pages = "6671--6687",
3877 doi = "10.1103/PhysRevB.46.6671",
3878 publisher = "American Physical Society",
3879 notes = "gga pw91 (as in vasp)",
3882 @Article{baldereschi73,
3883 title = "Mean-Value Point in the Brillouin Zone",
3884 author = "A. Baldereschi",
3885 journal = "Phys. Rev. B",
3888 pages = "5212--5215",
3892 doi = "10.1103/PhysRevB.7.5212",
3893 publisher = "American Physical Society",
3894 notes = "mean value k point",
3898 title = "Ab initio pseudopotential calculations of dopant
3900 journal = "Comput. Mater. Sci.",
3907 doi = "DOI: 10.1016/S0927-0256(98)00023-8",
3908 URL = "http://www.sciencedirect.com/science/article/B6TWM-3VB7F2K-7/2/aa864582273be8e054300efb7bd16a1b",
3909 author = "Jing Zhu",
3910 keywords = "TED (transient enhanced diffusion)",
3911 keywords = "Boron dopant",
3912 keywords = "Carbon dopant",
3913 keywords = "Defect",
3914 keywords = "ab initio pseudopotential method",
3915 keywords = "Impurity cluster",
3916 notes = "binding of c to si interstitial, c in si defects",
3920 author = "A. Nejim and P. L. F. Hemment and J. Stoemenos",
3922 title = "Si{C} buried layer formation by ion beam synthesis at
3926 journal = "Appl. Phys. Lett.",
3929 pages = "2646--2648",
3930 keywords = "SILICON; ION IMPLANTATION; CARBON IONS; SILICON
3931 CARBIDES; BURIED LAYERS; SYNTHESIS; KEV RANGE 100 --
3932 1000; CRYSTAL DEFECTS; MORPHOLOGY; RBS; TRANSMISSION
3933 ELECTRON MICROSCOPY",
3934 URL = "http://link.aip.org/link/?APL/66/2646/1",
3935 doi = "10.1063/1.113112",
3936 notes = "precipitation mechanism by substitutional carbon, si
3937 self interstitials react with further implanted c",
3941 author = "C. Guedj and M. W. Dashiell and L. Kulik and J.
3942 Kolodzey and A. Hairie",
3944 title = "Precipitation of beta-Si{C} in Si[sub 1 - y]{C}[sub y]
3948 journal = "J. Appl. Phys.",
3951 pages = "4631--4633",
3952 keywords = "silicon compounds; precipitation; localised modes;
3953 semiconductor epitaxial layers; infrared spectra;
3954 Fourier transform spectra; thermal stability;
3956 URL = "http://link.aip.org/link/?JAP/84/4631/1",
3957 doi = "10.1063/1.368703",
3958 notes = "coherent 3C-SiC, topotactic, critical coherence size",
3962 author = "R Jones and B J Coomer and P R Briddon",
3963 title = "Quantum mechanical modelling of defects in
3965 journal = "J. Phys.: Condens. Matter",
3969 URL = "http://stacks.iop.org/0953-8984/16/i=27/a=004",
3971 notes = "ab inito dft intro, vibrational modes, c defect in
3976 author = "S. Y. Park and J. D'Arcy-Gall and D. Gall and J. A. N.
3977 T Soares and Y.-W. Kim and H. Kim and P. Desjardins and
3978 J. E. Greene and S. G. Bishop",
3980 title = "Carbon incorporation pathways and lattice sites in
3981 Si[sub 1 - y]{C}[sub y] alloys grown on Si(001) by
3982 molecular-beam epitaxy",
3985 journal = "J. Appl. Phys.",
3988 pages = "5716--5727",
3989 URL = "http://link.aip.org/link/?JAP/91/5716/1",
3990 doi = "10.1063/1.1465122",
3991 notes = "c substitutional incorporation pathway, dft and expt",
3995 title = "Dynamic properties of interstitial carbon and
3996 carbon-carbon pair defects in silicon",
3997 author = "P. Leary and R. Jones and S. {\"O}berg and V. J. B.
3999 journal = "Phys. Rev. B",
4002 pages = "2188--2194",
4006 doi = "10.1103/PhysRevB.55.2188",
4007 publisher = "American Physical Society",
4008 notes = "ab initio c in si and di-carbon defect, no formation
4009 energies, different migration barriers and paths",
4013 title = "Interstitial carbon and the carbon-carbon pair in
4014 silicon: Semiempirical electronic-structure
4016 author = "Matthew J. Burnard and Gary G. DeLeo",
4017 journal = "Phys. Rev. B",
4020 pages = "10217--10225",
4024 doi = "10.1103/PhysRevB.47.10217",
4025 publisher = "American Physical Society",
4026 notes = "semi empirical mndo, pm3 and mindo3 c in si and di
4027 carbon defect, formation energies",
4031 title = "Electronic structure of interstitial carbon in
4033 author = "Morgan Besson and Gary G. DeLeo",
4034 journal = "Phys. Rev. B",
4037 pages = "4028--4033",
4041 doi = "10.1103/PhysRevB.43.4028",
4042 publisher = "American Physical Society",
4046 title = "Review of atomistic simulations of surface diffusion
4047 and growth on semiconductors",
4048 journal = "Comput. Mater. Sci.",
4053 note = "Proceedings of the Workshop on Virtual Molecular Beam
4056 doi = "DOI: 10.1016/0927-0256(96)00030-4",
4057 URL = "http://www.sciencedirect.com/science/article/B6TWM-3VSFF1G-7/2/afc8408b00ded1ca2dc3ad1686c2dae6",
4058 author = "Efthimios Kaxiras",
4059 notes = "might contain c 100 db formation energy, overview md,
4060 tight binding, first principles",
4063 @Article{kaukonen98,
4064 title = "Effect of {N} and {B} doping on the growth of {CVD}
4066 $(100):{H}(2\ifmmode\times\else\texttimes\fi{}1)$
4068 author = "M. Kaukonen and P. K. Sitch and G. Jungnickel and R.
4069 M. Nieminen and Sami P{\"o}ykk{\"o} and D. Porezag and
4071 journal = "Phys. Rev. B",
4074 pages = "9965--9970",
4078 doi = "10.1103/PhysRevB.57.9965",
4079 publisher = "American Physical Society",
4080 notes = "constrained conjugate gradient relaxation technique
4085 title = "Correlation between the antisite pair and the ${DI}$
4087 author = "A. Gali and P. De\'ak and E. Rauls and N. T. Son and
4088 I. G. Ivanov and F. H. C. Carlsson and E. Janz\'en and
4090 journal = "Phys. Rev. B",
4097 doi = "10.1103/PhysRevB.67.155203",
4098 publisher = "American Physical Society",
4102 title = "Production and recovery of defects in Si{C} after
4103 irradiation and deformation",
4104 journal = "J. Nucl. Mater.",
4107 pages = "1803--1808",
4111 doi = "DOI: 10.1016/S0022-3115(98)00139-1",
4112 URL = "http://www.sciencedirect.com/science/article/B6TXN-43G486N-47/2/56905f48f025ab98e5de4d6cde09c62b",
4113 author = "J. Chen and P. Jung and H. Klein",
4117 title = "Accumulation, dynamic annealing and thermal recovery
4118 of ion-beam-induced disorder in silicon carbide",
4119 journal = "Nucl. Instrum. Methods Phys. Res. B",
4126 doi = "DOI: 10.1016/S0168-583X(00)00542-5",
4127 URL = "http://www.sciencedirect.com/science/article/B6TJN-435KH7Y-2R/2/8acc176700c95bb8614d96c40cfc5577",
4128 author = "W. J. Weber and W. Jiang and S. Thevuthasan",
4131 @Article{bockstedte03,
4132 title = "Ab initio study of the migration of intrinsic defects
4134 author = "Michel Bockstedte and Alexander Mattausch and Oleg
4136 journal = "Phys. Rev. B",
4143 doi = "10.1103/PhysRevB.68.205201",
4144 publisher = "American Physical Society",
4145 notes = "defect migration in sic",
4149 title = "Theoretical study of vacancy diffusion and
4150 vacancy-assisted clustering of antisites in Si{C}",
4151 author = "E. Rauls and Th. Frauenheim and A. Gali and P.
4153 journal = "Phys. Rev. B",
4160 doi = "10.1103/PhysRevB.68.155208",
4161 publisher = "American Physical Society",
4165 journal = "Telegrafiya i Telefoniya bez Provodov",
4169 author = "O. V. Lossev",
4173 title = "Luminous carborundum detector and detection effect and
4174 oscillations with crystals",
4175 journal = "Philosophical Magazine Series 7",
4178 pages = "1024--1044",
4180 URL = "http://www.informaworld.com/10.1080/14786441108564683",
4181 author = "O. V. Lossev",
4185 journal = "Physik. Zeitschr.",
4189 author = "O. V. Lossev",
4193 journal = "Physik. Zeitschr.",
4197 author = "O. V. Lossev",
4201 journal = "Physik. Zeitschr.",
4205 author = "O. V. Lossev",
4209 title = "A note on carborundum",
4210 journal = "Electrical World",
4214 author = "H. J. Round",
4217 @Article{vashishath08,
4218 title = "Recent trends in silicon carbide device research",
4219 journal = "Mj. Int. J. Sci. Tech.",
4224 author = "Munish Vashishath and Ashoke K. Chatterjee",
4225 URL = "http://www.doaj.org/doaj?func=abstract&id=286746",
4226 notes = "sic polytype electronic properties",
4230 author = "W. E. Nelson and F. A. Halden and A. Rosengreen",
4232 title = "Growth and Properties of beta-Si{C} Single Crystals",
4235 journal = "Journal of Applied Physics",
4239 URL = "http://link.aip.org/link/?JAP/37/333/1",
4240 doi = "10.1063/1.1707837",
4241 notes = "sic melt growth",
4245 author = "A. E. van Arkel and J. H. de Boer",
4246 title = "Darstellung von reinem Titanium-, Zirkonium-, Hafnium-
4248 publisher = "WILEY-VCH Verlag GmbH",
4250 journal = "Z. Anorg. Chem.",
4253 URL = "http://dx.doi.org/10.1002/zaac.19251480133",
4254 doi = "10.1002/zaac.19251480133",
4255 notes = "van arkel apparatus",
4259 author = "K. Moers",
4261 journal = "Z. Anorg. Chem.",
4264 notes = "sic by van arkel apparatus, pyrolitical vapor growth
4269 author = "J. T. Kendall",
4270 title = "Electronic Conduction in Silicon Carbide",
4273 journal = "The Journal of Chemical Physics",
4277 URL = "http://link.aip.org/link/?JCP/21/821/1",
4278 notes = "sic by van arkel apparatus, pyrolitical vapor growth
4283 author = "J. A. Lely",
4285 journal = "Ber. Deut. Keram. Ges.",
4288 notes = "lely sublimation growth process",
4291 @Article{knippenberg63,
4292 author = "W. F. Knippenberg",
4294 journal = "Philips Res. Repts.",
4297 notes = "acheson process",
4300 @Article{hoffmann82,
4301 author = "L. Hoffmann and G. Ziegler and D. Theis and C.
4304 title = "Silicon carbide blue light emitting diodes with
4305 improved external quantum efficiency",
4308 journal = "Journal of Applied Physics",
4311 pages = "6962--6967",
4312 keywords = "light emitting diodes; silicon carbides; quantum
4313 efficiency; visible radiation; experimental data;
4314 epitaxy; fabrication; medium temperature; layers;
4315 aluminium; nitrogen; substrates; pn junctions;
4316 electroluminescence; spectra; current density;
4318 URL = "http://link.aip.org/link/?JAP/53/6962/1",
4319 doi = "10.1063/1.330041",
4320 notes = "blue led, sublimation process",
4324 author = "Philip Neudeck",
4325 affiliation = "NASA Lewis Research Center M.S. 77-1, 21000 Brookpark
4326 Road 44135 Cleveland OH",
4327 title = "Progress in silicon carbide semiconductor electronics
4329 journal = "Journal of Electronic Materials",
4330 publisher = "Springer Boston",
4332 keyword = "Chemistry and Materials Science",
4336 URL = "http://dx.doi.org/10.1007/BF02659688",
4337 note = "10.1007/BF02659688",
4339 notes = "sic data, advantages of 3c sic",
4342 @Article{bhatnagar93,
4343 author = "M. Bhatnagar and B. J. Baliga",
4344 journal = "Electron Devices, IEEE Transactions on",
4345 title = "Comparison of 6{H}-Si{C}, 3{C}-Si{C}, and Si for power
4352 keywords = "3C-SiC;50 to 5000 V;6H-SiC;Schottky
4353 rectifiers;Si;SiC;breakdown voltages;drift region
4354 properties;output characteristics;power MOSFETs;power
4355 semiconductor devices;switching characteristics;thermal
4356 analysis;Schottky-barrier diodes;electric breakdown of
4357 solids;insulated gate field effect transistors;power
4358 transistors;semiconductor materials;silicon;silicon
4359 compounds;solid-state rectifiers;thermal analysis;",
4360 doi = "10.1109/16.199372",
4362 notes = "comparison 3c 6h sic and si devices",
4366 author = "P. G. Neudeck and D. J. Larkin and J. E. Starr and J.
4367 A. Powell and C. S. Salupo and L. G. Matus",
4368 journal = "Electron Devices, IEEE Transactions on",
4369 title = "Electrical properties of epitaxial 3{C}- and
4370 6{H}-Si{C} p-n junction diodes produced side-by-side on
4371 6{H}-Si{C} substrates",
4377 keywords = "20 nA;200 micron;300 to 1100 V;3C-SiC layers;400
4378 C;6H-SiC layers;6H-SiC substrates;CVD
4379 process;SiC;chemical vapor deposition;doping;electrical
4380 properties;epitaxial layers;light
4381 emission;low-tilt-angle 6H-SiC substrates;p-n junction
4382 diodes;polytype;rectification characteristics;reverse
4383 leakage current;reverse voltages;temperature;leakage
4384 currents;power electronics;semiconductor
4385 diodes;semiconductor epitaxial layers;semiconductor
4386 growth;semiconductor materials;silicon
4387 compounds;solid-state rectifiers;substrates;vapour
4388 phase epitaxial growth;",
4389 doi = "10.1109/16.285038",
4391 notes = "comparison 6h 3c sic, cvd of 3c and 6h on single 6h
4396 author = "N. Schulze and D. L. Barrett and G. Pensl",
4398 title = "Near-equilibrium growth of micropipe-free 6{H}-Si{C}
4399 single crystals by physical vapor transport",
4402 journal = "Applied Physics Letters",
4405 pages = "1632--1634",
4406 keywords = "silicon compounds; semiconductor materials;
4407 semiconductor growth; crystal growth from vapour;
4408 photoluminescence; Hall mobility",
4409 URL = "http://link.aip.org/link/?APL/72/1632/1",
4410 doi = "10.1063/1.121136",
4411 notes = "micropipe free 6h-sic pvt growth",
4415 author = "P. Pirouz and C. M. Chorey and J. A. Powell",
4417 title = "Antiphase boundaries in epitaxially grown beta-Si{C}",
4420 journal = "Applied Physics Letters",
4424 keywords = "SILICON CARBIDES; DOMAIN STRUCTURE; SCANNING ELECTRON
4425 MICROSCOPY; NUCLEATION; EPITAXIAL LAYERS; CHEMICAL
4426 VAPOR DEPOSITION; ETCHING; ETCH PITS; TRANSMISSION
4427 ELECTRON MICROSCOPY; ELECTRON MICROSCOPY; ANTIPHASE
4429 URL = "http://link.aip.org/link/?APL/50/221/1",
4430 doi = "10.1063/1.97667",
4431 notes = "apb 3c-sic heteroepitaxy on si",
4434 @Article{shibahara86,
4435 title = "Surface morphology of cubic Si{C}(100) grown on
4436 Si(100) by chemical vapor deposition",
4437 journal = "Journal of Crystal Growth",
4444 doi = "DOI: 10.1016/0022-0248(86)90158-2",
4445 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46D26F7-1R/2/cfdbc7607352f3bc99d321303e3934e9",
4446 author = "Kentaro Shibahara and Shigehiro Nishino and Hiroyuki
4448 notes = "defects in 3c-sis cvd on si, anti phase boundaries",
4451 @Article{desjardins96,
4452 author = "P. Desjardins and J. E. Greene",
4454 title = "Step-flow epitaxial growth on two-domain surfaces",
4457 journal = "Journal of Applied Physics",
4460 pages = "1423--1434",
4461 keywords = "ADATOMS; COMPUTERIZED SIMULATION; DIFFUSION; EPITAXY;
4462 FILM GROWTH; SURFACE STRUCTURE",
4463 URL = "http://link.aip.org/link/?JAP/79/1423/1",
4464 doi = "10.1063/1.360980",
4465 notes = "apb model",
4469 author = "S. Henke and B. Stritzker and B. Rauschenbach",
4471 title = "Synthesis of epitaxial beta-Si{C} by {C}[sub 60]
4472 carbonization of silicon",
4475 journal = "Journal of Applied Physics",
4478 pages = "2070--2073",
4479 keywords = "SILICON CARBIDES; THIN FILMS; EPITAXY; CARBONIZATION;
4480 FULLERENES; ANNEALING; XRD; RBS; TWINNING; CRYSTAL
4482 URL = "http://link.aip.org/link/?JAP/78/2070/1",
4483 doi = "10.1063/1.360184",
4484 notes = "ssmbe of sic on si, lower temperatures",
4488 title = "Atomic layer epitaxy of cubic Si{C} by gas source
4489 {MBE} using surface superstructure",
4490 journal = "Journal of Crystal Growth",
4497 doi = "DOI: 10.1016/0022-0248(89)90442-9",
4498 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46DFS6F-GF/2/a8e0abaef892c6d96992ff4751fdeda2",
4499 author = "Takashi Fuyuki and Michiaki Nakayama and Tatsuo
4500 Yoshinobu and Hiromu Shiomi and Hiroyuki Matsunami",
4501 notes = "gas source mbe of 3c-sic on 6h-sic",
4504 @Article{yoshinobu92,
4505 author = "Tatsuo Yoshinobu and Hideaki Mitsui and Iwao Izumikawa
4506 and Takashi Fuyuki and Hiroyuki Matsunami",
4508 title = "Lattice-matched epitaxial growth of single crystalline
4509 3{C}-Si{C} on 6{H}-Si{C} substrates by gas source
4510 molecular beam epitaxy",
4513 journal = "Applied Physics Letters",
4517 keywords = "SILICON CARBIDES; HOMOJUNCTIONS; MOLECULAR BEAM
4518 EPITAXY; TWINNING; RHEED; TEMPERATURE EFFECTS;
4519 INTERFACE STRUCTURE",
4520 URL = "http://link.aip.org/link/?APL/60/824/1",
4521 doi = "10.1063/1.107430",
4522 notes = "gas source mbe of 3c-sic on 6h-sic",
4525 @Article{yoshinobu90,
4526 title = "Atomic level control in gas source {MBE} growth of
4528 journal = "Journal of Crystal Growth",
4535 doi = "DOI: 10.1016/0022-0248(90)90575-6",
4536 URL = "http://www.sciencedirect.com/science/article/B6TJ6-46YKT9W-HY/2/04dd57af2f42ee620895844e480a2736",
4537 author = "Tatsuo Yoshinobu and Michiaki Nakayama and Hiromu
4538 Shiomi and Takashi Fuyuki and Hiroyuki Matsunami",
4539 notes = "gas source mbe of 3c-sic on 3c-sic",
4543 title = "Atomic layer epitaxy controlled by surface
4544 superstructures in Si{C}",
4545 journal = "Thin Solid Films",
4552 doi = "DOI: 10.1016/0040-6090(93)90159-M",
4553 URL = "http://www.sciencedirect.com/science/article/B6TW0-46NY79X-40/2/c9675e1d8c4bcebc7ce7d06e44e14f1f",
4554 author = "Takashi Fuyuki and Tatsuo Yoshinobu and Hiroyuki
4556 notes = "gas source mbe of 3c-sic on 3c-sic, atomic layer
4561 title = "Microscopic mechanisms of accurate layer-by-layer
4562 growth of [beta]-Si{C}",
4563 journal = "Thin Solid Films",
4570 doi = "DOI: 10.1016/0040-6090(93)90162-I",
4571 URL = "http://www.sciencedirect.com/science/article/B6TW0-46NY79X-43/2/18694bfe0e75b1f29a3cf5f90d19987c",
4572 author = "Shiro Hara and T. Meguro and Y. Aoyagi and M. Kawai
4573 and S. Misawa and E. Sakuma and S. Yoshida",
4574 notes = "gas source mbe of 3c-sic on 3c-sic, atomic layer
4579 author = "Satoru Tanaka and R. Scott Kern and Robert F. Davis",
4581 title = "Effects of gas flow ratio on silicon carbide thin film
4582 growth mode and polytype formation during gas-source
4583 molecular beam epitaxy",
4586 journal = "Applied Physics Letters",
4589 pages = "2851--2853",
4590 keywords = "SILICON CARBIDES; MOLECULAR BEAM EPITAXY; RHEED;
4591 TRANSMISSION ELECTRON MICROSCOPY; MORPHOLOGY;
4592 NUCLEATION; COALESCENCE; SURFACE RECONSTRUCTION; GAS
4594 URL = "http://link.aip.org/link/?APL/65/2851/1",
4595 doi = "10.1063/1.112513",
4596 notes = "gas source mbe of 6h-sic on 6h-sic",
4600 author = "T. Fuyuki and T. Hatayama and H. Matsunami",
4601 title = "Heterointerface Control and Epitaxial Growth of
4602 3{C}-Si{C} on Si by Gas Source Molecular Beam Epitaxy",
4603 publisher = "WILEY-VCH Verlag",
4605 journal = "physica status solidi (b)",
4608 notes = "3c-sic heteroepitaxial growth on si by gsmbe, lower
4613 title = "Initial stage of Si{C} growth on Si(1 0 0) surface",
4614 journal = "Journal of Crystal Growth",
4621 doi = "DOI: 10.1016/S0022-0248(97)00391-6",
4622 URL = "http://www.sciencedirect.com/science/article/B6TJ6-3W8STD4-V/2/8de695de037d5e20b8326c4107547918",
4623 author = "T. Takaoka and H. Saito and Y. Igari and I. Kusunoki",
4624 keywords = "Reflection high-energy electron diffraction (RHEED)",
4625 keywords = "Scanning electron microscopy (SEM)",
4626 keywords = "Silicon carbide",
4627 keywords = "Silicon",
4628 keywords = "Island growth",
4629 notes = "lower temperature, 550-700",
4632 @Article{hatayama95,
4633 title = "Low-temperature heteroepitaxial growth of cubic Si{C}
4634 on Si using hydrocarbon radicals by gas source
4635 molecular beam epitaxy",
4636 journal = "Journal of Crystal Growth",
4643 doi = "DOI: 10.1016/0022-0248(95)80077-P",
4644 URL = "http://www.sciencedirect.com/science/article/B6TJ6-47RY2F6-1P/2/49acd5c4545dd9fd3486f70a6c25586e",
4645 author = "Tomoaki Hatayama and Yoichiro Tarui and Takashi Fuyuki
4646 and Hiroyuki Matsunami",
4650 author = "Volker Heine and Ching Cheng and Richard J. Needs",
4651 title = "The Preference of Silicon Carbide for Growth in the
4652 Metastable Cubic Form",
4653 journal = "Journal of the American Ceramic Society",
4656 publisher = "Blackwell Publishing Ltd",
4658 URL = "http://dx.doi.org/10.1111/j.1151-2916.1991.tb06811.x",
4659 doi = "10.1111/j.1151-2916.1991.tb06811.x",
4660 pages = "2630--2633",
4661 keywords = "silicon carbide, crystal growth, crystal structure,
4662 calculations, stability",
4664 notes = "3c-sic metastable, 3c-sic preferred growth, sic
4665 polytype dft calculation refs",
4668 @Article{allendorf91,
4669 title = "The adsorption of {H}-atoms on polycrystalline
4670 [beta]-silicon carbide",
4671 journal = "Surface Science",
4678 doi = "DOI: 10.1016/0039-6028(91)90912-C",
4679 URL = "http://www.sciencedirect.com/science/article/B6TVX-46T3BSB-24V/2/534f1f4786088ceb88b6d31eccb096b3",
4680 author = "Mark D. Allendorf and Duane A. Outka",
4681 notes = "h adsorption on 3c-sic",
4684 @Article{eaglesham93,
4685 author = "D. J. Eaglesham and F. C. Unterwald and H. Luftman and
4686 D. P. Adams and S. M. Yalisove",
4688 title = "Effect of {H} on Si molecular-beam epitaxy",
4691 journal = "Journal of Applied Physics",
4694 pages = "6615--6618",
4695 keywords = "SILICON; MOLECULAR BEAM EPITAXY; HYDROGEN; SURFACE
4696 CONTAMINATION; SIMS; SEGREGATION; IMPURITIES;
4697 DIFFUSION; ADSORPTION",
4698 URL = "http://link.aip.org/link/?JAP/74/6615/1",
4699 doi = "10.1063/1.355101",
4700 notes = "h incorporation on si surface, lower surface
4705 author = "Ronald C. Newman",
4706 title = "Carbon in Crystalline Silicon",
4707 journal = "MRS Online Proceedings Library",
4712 doi = "10.1557/PROC-59-403",
4713 URL = "http://dx.doi.org/10.1557/PROC-59-403",
4714 eprint = "http://journals.cambridge.org/article_S194642740054367X",
4718 title = "The diffusivity of carbon in silicon",
4719 journal = "Journal of Physics and Chemistry of Solids",
4726 doi = "DOI: 10.1016/0022-3697(61)90032-4",
4727 URL = "http://www.sciencedirect.com/science/article/B6TXR-46M72R1-4D/2/9235472e4c0a95bf7b995769474f5fbd",
4728 author = "R. C. Newman and J. Wakefield",
4729 notes = "diffusivity of substitutional c in si",
4733 author = "U. Gösele",
4734 title = "The Role of Carbon and Point Defects in Silicon",
4735 journal = "MRS Online Proceedings Library",
4740 doi = "10.1557/PROC-59-419",
4741 URL = "http://dx.doi.org/10.1557/PROC-59-419",
4742 eprint = "http://journals.cambridge.org/article_S1946427400543681",
4745 @Article{mukashev82,
4746 title = "Defects in Carbon-Implanted Silicon",
4747 author = "Bulat N. Mukashev and Alexey V. Spitsyn and Noboru
4748 Fukuoka and Haruo Saito",
4749 journal = "Japanese Journal of Applied Physics",
4751 number = "Part 1, No. 2",
4755 URL = "http://jjap.jsap.jp/link?JJAP/21/399/",
4756 doi = "10.1143/JJAP.21.399",
4757 publisher = "The Japan Society of Applied Physics",
4761 title = "Convergence of supercell calculations for point
4762 defects in semiconductors: Vacancy in silicon",
4763 author = "M. J. Puska and S. P{\"o}ykk{\"o} and M. Pesola and R.
4765 journal = "Phys. Rev. B",
4768 pages = "1318--1325",
4772 doi = "10.1103/PhysRevB.58.1318",
4773 publisher = "American Physical Society",
4774 notes = "convergence k point supercell size, vacancy in
4779 author = "C. Serre and A. P\'{e}rez-Rodr\'{\i}guez and A.
4780 Romano-Rodr\'{\i}guez and J. R. Morante and R.
4781 K{\"{o}}gler and W. Skorupa",
4783 title = "Spectroscopic characterization of phases formed by
4784 high-dose carbon ion implantation in silicon",
4787 journal = "Journal of Applied Physics",
4790 pages = "2978--2984",
4791 keywords = "SILICON; ION IMPLANTATION; PHASE STUDIES; CARBON IONS;
4792 FOURIER TRANSFORM SPECTROSCOPY; RAMAN SPECTRA;
4793 PHOTOELECTRON SPECTROSCOPY; TEM; TEMPERATURE
4794 DEPENDENCE; PRECIPITATES; ANNEALING",
4795 URL = "http://link.aip.org/link/?JAP/77/2978/1",
4796 doi = "10.1063/1.358714",
4799 @Article{romano-rodriguez96,
4800 title = "Detailed analysis of [beta]-Si{C} formation by high
4801 dose carbon ion implantation in silicon",
4802 journal = "Materials Science and Engineering B",
4807 note = "European Materials Research Society 1995 Spring
4808 Meeting, Symposium N: Carbon, Hydrogen, Nitrogen, and
4809 Oxygen in Silicon and in Other Elemental
4812 doi = "DOI: 10.1016/0921-5107(95)01283-4",
4813 URL = "http://www.sciencedirect.com/science/article/B6TXF-3VR7691-25/2/995fd57b9e5c1100558f80c472620408",
4814 author = "A. Romano-Rodriguez and C. Serre and L. Calvo-Barrio
4815 and A. Pérez-Rodríguez and J. R. Morante and R. Kögler
4817 keywords = "Silicon",
4818 keywords = "Ion implantation",
4819 notes = "incoherent 3c-sic precipitate",