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\title{Modelling of a selforganizaton process leading to periodic arrays of nanometric amorphous precipitates by ion irradiation}

\author{F. Zirkelbach, M. Häberlen, J.K.N. Lindner and B. Stritzkeri}
%\from{Institute of Physics, University of Augsburg, Universitätsstrasse 1, D-86135 Augsburg, Germany}

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\begin{document}

\begin{center}
 {\Large\bf
  Modelling of a selforganizaton process leading to periodic arrays of nanometric amorphous precipitates by ion irradiation
  \par
 }
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\begin{center}
 {\large
  F. Zirkelbach, M. Häberlen, J. K. N. Lindner and B. Stritzker
  \par
 }
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 {\scriptsize
  Institute of Physics, University of Augsburg, Universitätsstrasse 1, D-86135 Augsburg, Germany
  \par
 }
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{\bf
 Abstract
}

We developed a Monte-Carlo-Simulation code based on a simple model that tries to explain the selforganizaton process leading to periodic arrays of nanometric amorphous precipitates by ion irradiation. Due to the compressive stress caused by amorphous $SiC_x$ on the $Si$ host lattice,  which is relaxing in vertical direction as this process occurs near the target surface, preferential amorphization of the stressed regions between amorphous inclusions during continued implantation is taking place. 

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\section{Introduction}

\section{Model}

\section{Simulations}

\section{Results}

\section{Conclusion}

\listoffigures

\begin{thebibliography}{20}
 \bibitem{1} J.K.N. Lindner, Appl. Phys. A 77 (2003) 27-38.
 \bibitem{2} M. Häberlen, J.K.N. Lindner, B. Stritzker, Nucl. Instr. and Meth. B 216 (2004) 36-40.
\end{thebibliography}

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